10/30/2011	9:06:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	9:06:25 AM	Recipe started at 9:06 AM
10/30/2011	9:06:25 AM	Helium valve closed
10/30/2011	9:06:25 AM	H2 valve closed
10/30/2011	9:06:25 AM	BCl3 valve closed
10/30/2011	9:06:25 AM	PH3 valve closed
10/30/2011	9:06:25 AM	SiCl4 pre valve closed
10/30/2011	9:06:25 AM	SiCl4 post valve closed
10/30/2011	9:06:25 AM	Main Vac valve closed
10/30/2011	9:06:25 AM	Bypass valve closed
10/30/2011	9:06:25 AM	Bubbler valve closed
10/30/2011	9:06:25 AM	Helium MFC set to  0.000000
10/30/2011	9:06:25 AM	H2 MFC set to  0.000000
10/30/2011	9:06:25 AM	BCl3 MFC set to  0.000000
10/30/2011	9:06:25 AM	PHl3 MFC set to  0.000000
10/30/2011	9:06:25 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:06:25 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:06:25 AM	Tube furnace set to 0
10/30/2011	9:06:28 AM	H2 valve closed
10/30/2011	9:06:28 AM	BCl3 valve closed
10/30/2011	9:06:28 AM	PH3 valve closed
10/30/2011	9:06:28 AM	SiCl4 pre valve closed
10/30/2011	9:06:28 AM	SiCl4 post valve closed
10/30/2011	9:06:28 AM	Main Vac valve closed
10/30/2011	9:06:28 AM	Bypass valve closed
10/30/2011	9:06:28 AM	Bubbler valve closed
10/30/2011	9:06:28 AM	Helium valve opened
10/30/2011	9:06:28 AM	Helium MFC set to  500.000000
10/30/2011	9:06:28 AM	H2 MFC set to  0.000000
10/30/2011	9:06:28 AM	BCl3 MFC set to  0.000000
10/30/2011	9:06:28 AM	PHl3 MFC set to  0.000000
10/30/2011	9:06:28 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:06:28 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:06:29 AM	Tube furnace set to 0
10/30/2011	9:07:35 AM	Helium valve closed
10/30/2011	9:07:35 AM	H2 valve closed
10/30/2011	9:07:35 AM	BCl3 valve closed
10/30/2011	9:07:35 AM	PH3 valve closed
10/30/2011	9:07:35 AM	SiCl4 pre valve closed
10/30/2011	9:07:35 AM	SiCl4 post valve closed
10/30/2011	9:07:35 AM	Main Vac valve closed
10/30/2011	9:07:35 AM	Bypass valve closed
10/30/2011	9:07:35 AM	Bubbler valve closed
10/30/2011	9:07:35 AM	Helium MFC set to  0.000000
10/30/2011	9:07:35 AM	H2 MFC set to  0.000000
10/30/2011	9:07:35 AM	BCl3 MFC set to  0.000000
10/30/2011	9:07:35 AM	PHl3 MFC set to  0.000000
10/30/2011	9:07:35 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:07:35 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:07:35 AM	Tube furnace set to 0
10/30/2011	9:07:36 AM	Run finished at 9:07 AM
10/30/2011	9:07:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	9:12:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	9:12:48 AM	Recipe started at 9:12 AM
10/30/2011	9:12:48 AM	Helium valve closed
10/30/2011	9:12:48 AM	H2 valve closed
10/30/2011	9:12:48 AM	BCl3 valve closed
10/30/2011	9:12:48 AM	PH3 valve closed
10/30/2011	9:12:48 AM	SiCl4 pre valve closed
10/30/2011	9:12:48 AM	SiCl4 post valve closed
10/30/2011	9:12:48 AM	Main Vac valve closed
10/30/2011	9:12:48 AM	Bubbler valve closed
10/30/2011	9:12:48 AM	Bypass valve opened
10/30/2011	9:12:48 AM	Helium MFC set to  0.000000
10/30/2011	9:12:48 AM	H2 MFC set to  0.000000
10/30/2011	9:12:48 AM	BCl3 MFC set to  0.000000
10/30/2011	9:12:48 AM	PHl3 MFC set to  0.000000
10/30/2011	9:12:48 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:12:48 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:12:48 AM	Tube furnace set to 0
10/30/2011	9:13:53 AM	Helium valve closed
10/30/2011	9:13:53 AM	H2 valve closed
10/30/2011	9:13:53 AM	BCl3 valve closed
10/30/2011	9:13:53 AM	PH3 valve closed
10/30/2011	9:13:53 AM	SiCl4 pre valve closed
10/30/2011	9:13:53 AM	SiCl4 post valve closed
10/30/2011	9:13:53 AM	Main Vac valve closed
10/30/2011	9:13:53 AM	Bubbler valve closed
10/30/2011	9:13:53 AM	Bypass valve opened
10/30/2011	9:13:53 AM	Helium MFC set to  0.000000
10/30/2011	9:13:53 AM	H2 MFC set to  0.000000
10/30/2011	9:13:53 AM	BCl3 MFC set to  0.000000
10/30/2011	9:13:53 AM	PHl3 MFC set to  0.000000
10/30/2011	9:13:53 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:13:53 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:13:54 AM	Tube furnace set to 0
10/30/2011	9:14:07 AM	Helium valve closed
10/30/2011	9:14:07 AM	H2 valve closed
10/30/2011	9:14:07 AM	BCl3 valve closed
10/30/2011	9:14:07 AM	PH3 valve closed
10/30/2011	9:14:07 AM	SiCl4 pre valve closed
10/30/2011	9:14:07 AM	SiCl4 post valve closed
10/30/2011	9:14:07 AM	Bypass valve closed
10/30/2011	9:14:07 AM	Bubbler valve closed
10/30/2011	9:14:07 AM	Main Vac valve opened
10/30/2011	9:14:07 AM	Helium MFC set to  0.000000
10/30/2011	9:14:07 AM	H2 MFC set to  0.000000
10/30/2011	9:14:07 AM	BCl3 MFC set to  0.000000
10/30/2011	9:14:07 AM	PHl3 MFC set to  0.000000
10/30/2011	9:14:07 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:14:07 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:14:07 AM	Tube furnace set to 0
10/30/2011	9:14:08 AM	Run finished at 9:14 AM
10/30/2011	9:14:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	9:14:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	9:14:59 AM	Recipe started at 9:14 AM
10/30/2011	9:14:59 AM	Helium valve closed
10/30/2011	9:14:59 AM	H2 valve closed
10/30/2011	9:14:59 AM	BCl3 valve closed
10/30/2011	9:14:59 AM	PH3 valve closed
10/30/2011	9:14:59 AM	SiCl4 pre valve closed
10/30/2011	9:14:59 AM	SiCl4 post valve closed
10/30/2011	9:14:59 AM	Main Vac valve closed
10/30/2011	9:14:59 AM	Bypass valve closed
10/30/2011	9:14:59 AM	Bubbler valve closed
10/30/2011	9:14:59 AM	Helium MFC set to  0.000000
10/30/2011	9:14:59 AM	H2 MFC set to  0.000000
10/30/2011	9:14:59 AM	BCl3 MFC set to  0.000000
10/30/2011	9:14:59 AM	PHl3 MFC set to  0.000000
10/30/2011	9:14:59 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:14:59 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:14:59 AM	Tube furnace set to 0
10/30/2011	9:15:02 AM	H2 valve closed
10/30/2011	9:15:02 AM	BCl3 valve closed
10/30/2011	9:15:02 AM	PH3 valve closed
10/30/2011	9:15:02 AM	SiCl4 pre valve closed
10/30/2011	9:15:02 AM	SiCl4 post valve closed
10/30/2011	9:15:02 AM	Main Vac valve closed
10/30/2011	9:15:02 AM	Bypass valve closed
10/30/2011	9:15:02 AM	Bubbler valve closed
10/30/2011	9:15:02 AM	Helium valve opened
10/30/2011	9:15:02 AM	Helium MFC set to  500.000000
10/30/2011	9:15:02 AM	H2 MFC set to  0.000000
10/30/2011	9:15:02 AM	BCl3 MFC set to  0.000000
10/30/2011	9:15:02 AM	PHl3 MFC set to  0.000000
10/30/2011	9:15:02 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:15:02 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:15:02 AM	Tube furnace set to 0
10/30/2011	9:15:50 AM	Helium valve closed
10/30/2011	9:15:50 AM	H2 valve closed
10/30/2011	9:15:50 AM	BCl3 valve closed
10/30/2011	9:15:50 AM	PH3 valve closed
10/30/2011	9:15:50 AM	SiCl4 pre valve closed
10/30/2011	9:15:50 AM	SiCl4 post valve closed
10/30/2011	9:15:50 AM	Main Vac valve closed
10/30/2011	9:15:50 AM	Bypass valve closed
10/30/2011	9:15:50 AM	Bubbler valve closed
10/30/2011	9:15:50 AM	Helium MFC set to  0.000000
10/30/2011	9:15:50 AM	H2 MFC set to  0.000000
10/30/2011	9:15:50 AM	BCl3 MFC set to  0.000000
10/30/2011	9:15:50 AM	PHl3 MFC set to  0.000000
10/30/2011	9:15:50 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:15:50 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:15:50 AM	Tube furnace set to 0
10/30/2011	9:15:51 AM	Run finished at 9:15 AM
10/30/2011	9:15:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	9:15:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	9:15:54 AM	Recipe started at 9:15 AM
10/30/2011	9:15:54 AM	Helium valve closed
10/30/2011	9:15:54 AM	H2 valve closed
10/30/2011	9:15:54 AM	BCl3 valve closed
10/30/2011	9:15:54 AM	PH3 valve closed
10/30/2011	9:15:54 AM	SiCl4 pre valve closed
10/30/2011	9:15:54 AM	SiCl4 post valve closed
10/30/2011	9:15:54 AM	Main Vac valve closed
10/30/2011	9:15:54 AM	Bubbler valve closed
10/30/2011	9:15:54 AM	Bypass valve opened
10/30/2011	9:15:54 AM	Helium MFC set to  0.000000
10/30/2011	9:15:54 AM	H2 MFC set to  0.000000
10/30/2011	9:15:54 AM	BCl3 MFC set to  0.000000
10/30/2011	9:15:54 AM	PHl3 MFC set to  0.000000
10/30/2011	9:15:54 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:15:54 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:15:54 AM	Tube furnace set to 0
10/30/2011	9:16:48 AM	Helium valve closed
10/30/2011	9:16:48 AM	H2 valve closed
10/30/2011	9:16:48 AM	BCl3 valve closed
10/30/2011	9:16:48 AM	PH3 valve closed
10/30/2011	9:16:48 AM	SiCl4 pre valve closed
10/30/2011	9:16:48 AM	SiCl4 post valve closed
10/30/2011	9:16:48 AM	Main Vac valve closed
10/30/2011	9:16:48 AM	Bubbler valve closed
10/30/2011	9:16:48 AM	Bypass valve opened
10/30/2011	9:16:48 AM	Helium MFC set to  0.000000
10/30/2011	9:16:48 AM	H2 MFC set to  0.000000
10/30/2011	9:16:48 AM	BCl3 MFC set to  0.000000
10/30/2011	9:16:48 AM	PHl3 MFC set to  0.000000
10/30/2011	9:16:48 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:16:48 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:16:48 AM	Tube furnace set to 0
10/30/2011	9:17:00 AM	Helium valve closed
10/30/2011	9:17:01 AM	H2 valve closed
10/30/2011	9:17:01 AM	BCl3 valve closed
10/30/2011	9:17:01 AM	PH3 valve closed
10/30/2011	9:17:01 AM	SiCl4 pre valve closed
10/30/2011	9:17:01 AM	SiCl4 post valve closed
10/30/2011	9:17:01 AM	Bypass valve closed
10/30/2011	9:17:01 AM	Bubbler valve closed
10/30/2011	9:17:01 AM	Main Vac valve opened
10/30/2011	9:17:01 AM	Helium MFC set to  0.000000
10/30/2011	9:17:01 AM	H2 MFC set to  0.000000
10/30/2011	9:17:01 AM	BCl3 MFC set to  0.000000
10/30/2011	9:17:01 AM	PHl3 MFC set to  0.000000
10/30/2011	9:17:01 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:17:01 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:17:01 AM	Tube furnace set to 0
10/30/2011	9:17:02 AM	Run finished at 9:17 AM
10/30/2011	9:17:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	9:18:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	9:18:09 AM	Recipe started at 9:18 AM
10/30/2011	9:18:09 AM	Helium valve closed
10/30/2011	9:18:09 AM	H2 valve closed
10/30/2011	9:18:09 AM	BCl3 valve closed
10/30/2011	9:18:09 AM	PH3 valve closed
10/30/2011	9:18:09 AM	SiCl4 pre valve closed
10/30/2011	9:18:09 AM	SiCl4 post valve closed
10/30/2011	9:18:09 AM	Main Vac valve closed
10/30/2011	9:18:09 AM	Bypass valve closed
10/30/2011	9:18:09 AM	Bubbler valve closed
10/30/2011	9:18:09 AM	Helium MFC set to  0.000000
10/30/2011	9:18:09 AM	H2 MFC set to  0.000000
10/30/2011	9:18:09 AM	BCl3 MFC set to  0.000000
10/30/2011	9:18:09 AM	PHl3 MFC set to  0.000000
10/30/2011	9:18:09 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:18:09 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:18:10 AM	Tube furnace set to 0
10/30/2011	9:18:13 AM	H2 valve closed
10/30/2011	9:18:13 AM	BCl3 valve closed
10/30/2011	9:18:13 AM	PH3 valve closed
10/30/2011	9:18:13 AM	SiCl4 pre valve closed
10/30/2011	9:18:13 AM	SiCl4 post valve closed
10/30/2011	9:18:13 AM	Main Vac valve closed
10/30/2011	9:18:13 AM	Bypass valve closed
10/30/2011	9:18:13 AM	Bubbler valve closed
10/30/2011	9:18:13 AM	Helium valve opened
10/30/2011	9:18:13 AM	Helium MFC set to  500.000000
10/30/2011	9:18:13 AM	H2 MFC set to  0.000000
10/30/2011	9:18:13 AM	BCl3 MFC set to  0.000000
10/30/2011	9:18:13 AM	PHl3 MFC set to  0.000000
10/30/2011	9:18:13 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:18:13 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:18:13 AM	Tube furnace set to 0
10/30/2011	9:19:03 AM	Helium valve closed
10/30/2011	9:19:03 AM	H2 valve closed
10/30/2011	9:19:03 AM	BCl3 valve closed
10/30/2011	9:19:03 AM	PH3 valve closed
10/30/2011	9:19:03 AM	SiCl4 pre valve closed
10/30/2011	9:19:03 AM	SiCl4 post valve closed
10/30/2011	9:19:03 AM	Main Vac valve closed
10/30/2011	9:19:03 AM	Bypass valve closed
10/30/2011	9:19:03 AM	Bubbler valve closed
10/30/2011	9:19:03 AM	Helium MFC set to  0.000000
10/30/2011	9:19:03 AM	H2 MFC set to  0.000000
10/30/2011	9:19:03 AM	BCl3 MFC set to  0.000000
10/30/2011	9:19:03 AM	PHl3 MFC set to  0.000000
10/30/2011	9:19:03 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:19:03 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:19:03 AM	Tube furnace set to 0
10/30/2011	9:19:04 AM	Run finished at 9:19 AM
10/30/2011	9:19:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	9:19:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	9:19:08 AM	Recipe started at 9:19 AM
10/30/2011	9:19:08 AM	Helium valve closed
10/30/2011	9:19:08 AM	H2 valve closed
10/30/2011	9:19:08 AM	BCl3 valve closed
10/30/2011	9:19:08 AM	PH3 valve closed
10/30/2011	9:19:08 AM	SiCl4 pre valve closed
10/30/2011	9:19:08 AM	SiCl4 post valve closed
10/30/2011	9:19:08 AM	Main Vac valve closed
10/30/2011	9:19:08 AM	Bubbler valve closed
10/30/2011	9:19:08 AM	Bypass valve opened
10/30/2011	9:19:08 AM	Helium MFC set to  0.000000
10/30/2011	9:19:08 AM	H2 MFC set to  0.000000
10/30/2011	9:19:08 AM	BCl3 MFC set to  0.000000
10/30/2011	9:19:08 AM	PHl3 MFC set to  0.000000
10/30/2011	9:19:08 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:19:08 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:19:08 AM	Tube furnace set to 0
10/30/2011	9:20:03 AM	Helium valve closed
10/30/2011	9:20:03 AM	H2 valve closed
10/30/2011	9:20:03 AM	BCl3 valve closed
10/30/2011	9:20:03 AM	PH3 valve closed
10/30/2011	9:20:03 AM	SiCl4 pre valve closed
10/30/2011	9:20:03 AM	SiCl4 post valve closed
10/30/2011	9:20:03 AM	Main Vac valve closed
10/30/2011	9:20:03 AM	Bubbler valve closed
10/30/2011	9:20:03 AM	Bypass valve opened
10/30/2011	9:20:03 AM	Helium MFC set to  0.000000
10/30/2011	9:20:03 AM	H2 MFC set to  0.000000
10/30/2011	9:20:03 AM	BCl3 MFC set to  0.000000
10/30/2011	9:20:03 AM	PHl3 MFC set to  0.000000
10/30/2011	9:20:03 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:20:03 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:20:04 AM	Tube furnace set to 0
10/30/2011	9:20:56 AM	Helium valve closed
10/30/2011	9:20:56 AM	H2 valve closed
10/30/2011	9:20:56 AM	BCl3 valve closed
10/30/2011	9:20:56 AM	PH3 valve closed
10/30/2011	9:20:56 AM	SiCl4 pre valve closed
10/30/2011	9:20:56 AM	SiCl4 post valve closed
10/30/2011	9:20:56 AM	Bypass valve closed
10/30/2011	9:20:56 AM	Bubbler valve closed
10/30/2011	9:20:56 AM	Main Vac valve opened
10/30/2011	9:20:56 AM	Helium MFC set to  0.000000
10/30/2011	9:20:56 AM	H2 MFC set to  0.000000
10/30/2011	9:20:56 AM	BCl3 MFC set to  0.000000
10/30/2011	9:20:56 AM	PHl3 MFC set to  0.000000
10/30/2011	9:20:56 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:20:56 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:20:56 AM	Tube furnace set to 0
10/30/2011	9:20:57 AM	Run finished at 9:20 AM
10/30/2011	9:20:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	9:22:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	9:22:45 AM	Recipe started at 9:22 AM
10/30/2011	9:22:45 AM	Helium valve closed
10/30/2011	9:22:45 AM	H2 valve closed
10/30/2011	9:22:45 AM	BCl3 valve closed
10/30/2011	9:22:45 AM	PH3 valve closed
10/30/2011	9:22:45 AM	SiCl4 pre valve closed
10/30/2011	9:22:45 AM	SiCl4 post valve closed
10/30/2011	9:22:45 AM	Main Vac valve closed
10/30/2011	9:22:45 AM	Bubbler valve closed
10/30/2011	9:22:45 AM	Bypass valve opened
10/30/2011	9:22:45 AM	Helium MFC set to  0.000000
10/30/2011	9:22:45 AM	H2 MFC set to  0.000000
10/30/2011	9:22:45 AM	BCl3 MFC set to  0.000000
10/30/2011	9:22:45 AM	PHl3 MFC set to  0.000000
10/30/2011	9:22:45 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:22:45 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:22:45 AM	Tube furnace set to 0
10/30/2011	9:22:45 AM	Helium valve closed
10/30/2011	9:22:45 AM	H2 valve closed
10/30/2011	9:22:45 AM	BCl3 valve closed
10/30/2011	9:22:45 AM	PH3 valve closed
10/30/2011	9:22:45 AM	SiCl4 pre valve closed
10/30/2011	9:22:45 AM	SiCl4 post valve closed
10/30/2011	9:22:45 AM	Main Vac valve closed
10/30/2011	9:22:45 AM	Bubbler valve closed
10/30/2011	9:22:45 AM	Bypass valve opened
10/30/2011	9:22:45 AM	Helium MFC set to  0.000000
10/30/2011	9:22:45 AM	H2 MFC set to  0.000000
10/30/2011	9:22:45 AM	BCl3 MFC set to  0.000000
10/30/2011	9:22:45 AM	PHl3 MFC set to  0.000000
10/30/2011	9:22:45 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:22:45 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:22:45 AM	Tube furnace set to 0
10/30/2011	9:22:46 AM	Helium valve closed
10/30/2011	9:22:46 AM	H2 valve closed
10/30/2011	9:22:46 AM	BCl3 valve closed
10/30/2011	9:22:46 AM	PH3 valve closed
10/30/2011	9:22:46 AM	SiCl4 pre valve closed
10/30/2011	9:22:46 AM	SiCl4 post valve closed
10/30/2011	9:22:46 AM	Bypass valve closed
10/30/2011	9:22:46 AM	Bubbler valve closed
10/30/2011	9:22:46 AM	Main Vac valve opened
10/30/2011	9:22:46 AM	Helium MFC set to  0.000000
10/30/2011	9:22:46 AM	H2 MFC set to  0.000000
10/30/2011	9:22:46 AM	BCl3 MFC set to  0.000000
10/30/2011	9:22:46 AM	PHl3 MFC set to  0.000000
10/30/2011	9:22:46 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:22:46 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:22:46 AM	Tube furnace set to 0
10/30/2011	9:22:53 AM	H2 valve closed
10/30/2011	9:22:53 AM	BCl3 valve closed
10/30/2011	9:22:53 AM	PH3 valve closed
10/30/2011	9:22:53 AM	SiCl4 pre valve closed
10/30/2011	9:22:53 AM	SiCl4 post valve closed
10/30/2011	9:22:53 AM	Bypass valve closed
10/30/2011	9:22:53 AM	Bubbler valve closed
10/30/2011	9:22:53 AM	Helium valve opened
10/30/2011	9:22:53 AM	Main Vac valve opened
10/30/2011	9:22:53 AM	Helium MFC set to  20.000000
10/30/2011	9:22:53 AM	H2 MFC set to  0.000000
10/30/2011	9:22:53 AM	BCl3 MFC set to  0.000000
10/30/2011	9:22:53 AM	PHl3 MFC set to  0.000000
10/30/2011	9:22:53 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:22:53 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:22:53 AM	Tube furnace set to 0
10/30/2011	9:23:23 AM	Helium valve closed
10/30/2011	9:23:23 AM	H2 valve closed
10/30/2011	9:23:23 AM	BCl3 valve closed
10/30/2011	9:23:23 AM	PH3 valve closed
10/30/2011	9:23:23 AM	SiCl4 pre valve closed
10/30/2011	9:23:23 AM	SiCl4 post valve closed
10/30/2011	9:23:23 AM	Bypass valve closed
10/30/2011	9:23:23 AM	Bubbler valve closed
10/30/2011	9:23:23 AM	Main Vac valve opened
10/30/2011	9:23:23 AM	Helium MFC set to  0.000000
10/30/2011	9:23:23 AM	H2 MFC set to  0.000000
10/30/2011	9:23:23 AM	BCl3 MFC set to  0.000000
10/30/2011	9:23:23 AM	PHl3 MFC set to  0.000000
10/30/2011	9:23:23 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:23:23 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:23:24 AM	Tube furnace set to 0
10/30/2011	9:23:54 AM	H2 valve closed
10/30/2011	9:23:54 AM	BCl3 valve closed
10/30/2011	9:23:54 AM	PH3 valve closed
10/30/2011	9:23:54 AM	SiCl4 pre valve closed
10/30/2011	9:23:54 AM	SiCl4 post valve closed
10/30/2011	9:23:54 AM	Bypass valve closed
10/30/2011	9:23:54 AM	Bubbler valve closed
10/30/2011	9:23:54 AM	Helium valve opened
10/30/2011	9:23:54 AM	Main Vac valve opened
10/30/2011	9:23:54 AM	Helium MFC set to  20.000000
10/30/2011	9:23:54 AM	H2 MFC set to  0.000000
10/30/2011	9:23:54 AM	BCl3 MFC set to  0.000000
10/30/2011	9:23:54 AM	PHl3 MFC set to  0.000000
10/30/2011	9:23:54 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:23:54 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:23:54 AM	Tube furnace set to 0
10/30/2011	9:24:24 AM	Helium valve closed
10/30/2011	9:24:24 AM	H2 valve closed
10/30/2011	9:24:24 AM	BCl3 valve closed
10/30/2011	9:24:24 AM	PH3 valve closed
10/30/2011	9:24:24 AM	SiCl4 pre valve closed
10/30/2011	9:24:24 AM	SiCl4 post valve closed
10/30/2011	9:24:24 AM	Bypass valve closed
10/30/2011	9:24:24 AM	Bubbler valve closed
10/30/2011	9:24:24 AM	Main Vac valve opened
10/30/2011	9:24:24 AM	Helium MFC set to  0.000000
10/30/2011	9:24:24 AM	H2 MFC set to  0.000000
10/30/2011	9:24:24 AM	BCl3 MFC set to  0.000000
10/30/2011	9:24:24 AM	PHl3 MFC set to  0.000000
10/30/2011	9:24:24 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:24:24 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:24:24 AM	Tube furnace set to 0
10/30/2011	9:24:54 AM	H2 valve closed
10/30/2011	9:24:54 AM	BCl3 valve closed
10/30/2011	9:24:54 AM	PH3 valve closed
10/30/2011	9:24:54 AM	SiCl4 pre valve closed
10/30/2011	9:24:54 AM	SiCl4 post valve closed
10/30/2011	9:24:54 AM	Bypass valve closed
10/30/2011	9:24:54 AM	Bubbler valve closed
10/30/2011	9:24:54 AM	Helium valve opened
10/30/2011	9:24:54 AM	Main Vac valve opened
10/30/2011	9:24:54 AM	Helium MFC set to  20.000000
10/30/2011	9:24:54 AM	H2 MFC set to  0.000000
10/30/2011	9:24:54 AM	BCl3 MFC set to  0.000000
10/30/2011	9:24:54 AM	PHl3 MFC set to  0.000000
10/30/2011	9:24:54 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:24:54 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:24:54 AM	Tube furnace set to 0
10/30/2011	9:25:24 AM	Helium valve closed
10/30/2011	9:25:24 AM	H2 valve closed
10/30/2011	9:25:24 AM	BCl3 valve closed
10/30/2011	9:25:24 AM	PH3 valve closed
10/30/2011	9:25:24 AM	SiCl4 pre valve closed
10/30/2011	9:25:24 AM	SiCl4 post valve closed
10/30/2011	9:25:24 AM	Bypass valve closed
10/30/2011	9:25:24 AM	Bubbler valve closed
10/30/2011	9:25:24 AM	Main Vac valve opened
10/30/2011	9:25:24 AM	Helium MFC set to  0.000000
10/30/2011	9:25:24 AM	H2 MFC set to  0.000000
10/30/2011	9:25:24 AM	BCl3 MFC set to  0.000000
10/30/2011	9:25:24 AM	PHl3 MFC set to  0.000000
10/30/2011	9:25:24 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:25:24 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:25:24 AM	Tube furnace set to 0
10/30/2011	9:25:54 AM	H2 valve closed
10/30/2011	9:25:54 AM	BCl3 valve closed
10/30/2011	9:25:54 AM	PH3 valve closed
10/30/2011	9:25:54 AM	SiCl4 pre valve closed
10/30/2011	9:25:54 AM	SiCl4 post valve closed
10/30/2011	9:25:54 AM	Bypass valve closed
10/30/2011	9:25:54 AM	Bubbler valve closed
10/30/2011	9:25:54 AM	Helium valve opened
10/30/2011	9:25:54 AM	Main Vac valve opened
10/30/2011	9:25:54 AM	Helium MFC set to  20.000000
10/30/2011	9:25:54 AM	H2 MFC set to  0.000000
10/30/2011	9:25:54 AM	BCl3 MFC set to  0.000000
10/30/2011	9:25:54 AM	PHl3 MFC set to  0.000000
10/30/2011	9:25:54 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:25:54 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:25:55 AM	Tube furnace set to 0
10/30/2011	9:26:25 AM	Helium valve closed
10/30/2011	9:26:25 AM	H2 valve closed
10/30/2011	9:26:25 AM	BCl3 valve closed
10/30/2011	9:26:25 AM	PH3 valve closed
10/30/2011	9:26:25 AM	SiCl4 pre valve closed
10/30/2011	9:26:25 AM	SiCl4 post valve closed
10/30/2011	9:26:25 AM	Bypass valve closed
10/30/2011	9:26:25 AM	Bubbler valve closed
10/30/2011	9:26:25 AM	Main Vac valve opened
10/30/2011	9:26:25 AM	Helium MFC set to  0.000000
10/30/2011	9:26:25 AM	H2 MFC set to  0.000000
10/30/2011	9:26:25 AM	BCl3 MFC set to  0.000000
10/30/2011	9:26:25 AM	PHl3 MFC set to  0.000000
10/30/2011	9:26:25 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:26:25 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:26:25 AM	Tube furnace set to 0
10/30/2011	9:26:55 AM	H2 valve closed
10/30/2011	9:26:55 AM	BCl3 valve closed
10/30/2011	9:26:55 AM	PH3 valve closed
10/30/2011	9:26:55 AM	SiCl4 pre valve closed
10/30/2011	9:26:55 AM	SiCl4 post valve closed
10/30/2011	9:26:55 AM	Bypass valve closed
10/30/2011	9:26:55 AM	Bubbler valve closed
10/30/2011	9:26:55 AM	Helium valve opened
10/30/2011	9:26:55 AM	Main Vac valve opened
10/30/2011	9:26:55 AM	Helium MFC set to  20.000000
10/30/2011	9:26:55 AM	H2 MFC set to  0.000000
10/30/2011	9:26:55 AM	BCl3 MFC set to  0.000000
10/30/2011	9:26:55 AM	PHl3 MFC set to  0.000000
10/30/2011	9:26:55 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:26:55 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:26:55 AM	Tube furnace set to 0
10/30/2011	9:27:25 AM	Helium valve closed
10/30/2011	9:27:25 AM	H2 valve closed
10/30/2011	9:27:25 AM	BCl3 valve closed
10/30/2011	9:27:25 AM	PH3 valve closed
10/30/2011	9:27:25 AM	SiCl4 pre valve closed
10/30/2011	9:27:25 AM	SiCl4 post valve closed
10/30/2011	9:27:25 AM	Bypass valve closed
10/30/2011	9:27:25 AM	Bubbler valve closed
10/30/2011	9:27:25 AM	Main Vac valve opened
10/30/2011	9:27:25 AM	Helium MFC set to  0.000000
10/30/2011	9:27:25 AM	H2 MFC set to  0.000000
10/30/2011	9:27:25 AM	BCl3 MFC set to  0.000000
10/30/2011	9:27:25 AM	PHl3 MFC set to  0.000000
10/30/2011	9:27:25 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:27:25 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:27:25 AM	Tube furnace set to 0
10/30/2011	9:27:55 AM	H2 valve closed
10/30/2011	9:27:55 AM	BCl3 valve closed
10/30/2011	9:27:55 AM	PH3 valve closed
10/30/2011	9:27:55 AM	SiCl4 pre valve closed
10/30/2011	9:27:55 AM	SiCl4 post valve closed
10/30/2011	9:27:55 AM	Bypass valve closed
10/30/2011	9:27:55 AM	Bubbler valve closed
10/30/2011	9:27:55 AM	Helium valve opened
10/30/2011	9:27:55 AM	Main Vac valve opened
10/30/2011	9:27:55 AM	Helium MFC set to  20.000000
10/30/2011	9:27:55 AM	H2 MFC set to  0.000000
10/30/2011	9:27:55 AM	BCl3 MFC set to  0.000000
10/30/2011	9:27:55 AM	PHl3 MFC set to  0.000000
10/30/2011	9:27:55 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:27:55 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:27:55 AM	Tube furnace set to 0
10/30/2011	9:28:25 AM	Helium valve closed
10/30/2011	9:28:25 AM	H2 valve closed
10/30/2011	9:28:25 AM	BCl3 valve closed
10/30/2011	9:28:25 AM	PH3 valve closed
10/30/2011	9:28:25 AM	SiCl4 pre valve closed
10/30/2011	9:28:25 AM	SiCl4 post valve closed
10/30/2011	9:28:25 AM	Bypass valve closed
10/30/2011	9:28:25 AM	Bubbler valve closed
10/30/2011	9:28:25 AM	Main Vac valve opened
10/30/2011	9:28:25 AM	Helium MFC set to  0.000000
10/30/2011	9:28:25 AM	H2 MFC set to  0.000000
10/30/2011	9:28:25 AM	BCl3 MFC set to  0.000000
10/30/2011	9:28:25 AM	PHl3 MFC set to  0.000000
10/30/2011	9:28:25 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:28:25 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:28:26 AM	Tube furnace set to 0
10/30/2011	9:28:56 AM	H2 valve closed
10/30/2011	9:28:56 AM	BCl3 valve closed
10/30/2011	9:28:56 AM	PH3 valve closed
10/30/2011	9:28:56 AM	SiCl4 pre valve closed
10/30/2011	9:28:56 AM	SiCl4 post valve closed
10/30/2011	9:28:56 AM	Bypass valve closed
10/30/2011	9:28:56 AM	Bubbler valve closed
10/30/2011	9:28:56 AM	Helium valve opened
10/30/2011	9:28:56 AM	Main Vac valve opened
10/30/2011	9:28:56 AM	Helium MFC set to  20.000000
10/30/2011	9:28:56 AM	H2 MFC set to  0.000000
10/30/2011	9:28:56 AM	BCl3 MFC set to  0.000000
10/30/2011	9:28:56 AM	PHl3 MFC set to  0.000000
10/30/2011	9:28:56 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:28:56 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:28:56 AM	Tube furnace set to 0
10/30/2011	9:29:26 AM	Helium valve closed
10/30/2011	9:29:26 AM	H2 valve closed
10/30/2011	9:29:26 AM	BCl3 valve closed
10/30/2011	9:29:26 AM	PH3 valve closed
10/30/2011	9:29:26 AM	SiCl4 pre valve closed
10/30/2011	9:29:26 AM	SiCl4 post valve closed
10/30/2011	9:29:26 AM	Bypass valve closed
10/30/2011	9:29:26 AM	Bubbler valve closed
10/30/2011	9:29:26 AM	Main Vac valve opened
10/30/2011	9:29:26 AM	Helium MFC set to  0.000000
10/30/2011	9:29:26 AM	H2 MFC set to  0.000000
10/30/2011	9:29:26 AM	BCl3 MFC set to  0.000000
10/30/2011	9:29:26 AM	PHl3 MFC set to  0.000000
10/30/2011	9:29:26 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:29:26 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:29:26 AM	Tube furnace set to 0
10/30/2011	9:29:56 AM	H2 valve closed
10/30/2011	9:29:56 AM	BCl3 valve closed
10/30/2011	9:29:56 AM	PH3 valve closed
10/30/2011	9:29:56 AM	SiCl4 pre valve closed
10/30/2011	9:29:56 AM	SiCl4 post valve closed
10/30/2011	9:29:56 AM	Bypass valve closed
10/30/2011	9:29:56 AM	Bubbler valve closed
10/30/2011	9:29:56 AM	Helium valve opened
10/30/2011	9:29:56 AM	Main Vac valve opened
10/30/2011	9:29:56 AM	Helium MFC set to  20.000000
10/30/2011	9:29:56 AM	H2 MFC set to  0.000000
10/30/2011	9:29:56 AM	BCl3 MFC set to  0.000000
10/30/2011	9:29:56 AM	PHl3 MFC set to  0.000000
10/30/2011	9:29:56 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:29:56 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:29:56 AM	Tube furnace set to 0
10/30/2011	9:30:26 AM	Helium valve closed
10/30/2011	9:30:26 AM	H2 valve closed
10/30/2011	9:30:26 AM	BCl3 valve closed
10/30/2011	9:30:26 AM	PH3 valve closed
10/30/2011	9:30:26 AM	SiCl4 pre valve closed
10/30/2011	9:30:26 AM	SiCl4 post valve closed
10/30/2011	9:30:26 AM	Bypass valve closed
10/30/2011	9:30:26 AM	Bubbler valve closed
10/30/2011	9:30:26 AM	Main Vac valve opened
10/30/2011	9:30:26 AM	Helium MFC set to  0.000000
10/30/2011	9:30:26 AM	H2 MFC set to  0.000000
10/30/2011	9:30:26 AM	BCl3 MFC set to  0.000000
10/30/2011	9:30:26 AM	PHl3 MFC set to  0.000000
10/30/2011	9:30:26 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:30:26 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:30:26 AM	Tube furnace set to 0
10/30/2011	9:30:56 AM	H2 valve closed
10/30/2011	9:30:56 AM	BCl3 valve closed
10/30/2011	9:30:56 AM	PH3 valve closed
10/30/2011	9:30:56 AM	SiCl4 pre valve closed
10/30/2011	9:30:56 AM	SiCl4 post valve closed
10/30/2011	9:30:56 AM	Bypass valve closed
10/30/2011	9:30:56 AM	Bubbler valve closed
10/30/2011	9:30:56 AM	Helium valve opened
10/30/2011	9:30:56 AM	Main Vac valve opened
10/30/2011	9:30:56 AM	Helium MFC set to  20.000000
10/30/2011	9:30:56 AM	H2 MFC set to  0.000000
10/30/2011	9:30:56 AM	BCl3 MFC set to  0.000000
10/30/2011	9:30:57 AM	PHl3 MFC set to  0.000000
10/30/2011	9:30:57 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:30:57 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:30:57 AM	Tube furnace set to 0
10/30/2011	9:31:27 AM	Helium valve closed
10/30/2011	9:31:27 AM	H2 valve closed
10/30/2011	9:31:27 AM	BCl3 valve closed
10/30/2011	9:31:27 AM	PH3 valve closed
10/30/2011	9:31:27 AM	SiCl4 pre valve closed
10/30/2011	9:31:27 AM	SiCl4 post valve closed
10/30/2011	9:31:27 AM	Bypass valve closed
10/30/2011	9:31:27 AM	Bubbler valve closed
10/30/2011	9:31:27 AM	Main Vac valve opened
10/30/2011	9:31:27 AM	Helium MFC set to  0.000000
10/30/2011	9:31:27 AM	H2 MFC set to  0.000000
10/30/2011	9:31:27 AM	BCl3 MFC set to  0.000000
10/30/2011	9:31:27 AM	PHl3 MFC set to  0.000000
10/30/2011	9:31:27 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:31:27 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:31:27 AM	Tube furnace set to 0
10/30/2011	9:31:57 AM	H2 valve closed
10/30/2011	9:31:57 AM	BCl3 valve closed
10/30/2011	9:31:57 AM	PH3 valve closed
10/30/2011	9:31:57 AM	SiCl4 pre valve closed
10/30/2011	9:31:57 AM	SiCl4 post valve closed
10/30/2011	9:31:57 AM	Bypass valve closed
10/30/2011	9:31:57 AM	Bubbler valve closed
10/30/2011	9:31:57 AM	Helium valve opened
10/30/2011	9:31:57 AM	Main Vac valve opened
10/30/2011	9:31:57 AM	Helium MFC set to  20.000000
10/30/2011	9:31:57 AM	H2 MFC set to  0.000000
10/30/2011	9:31:57 AM	BCl3 MFC set to  0.000000
10/30/2011	9:31:57 AM	PHl3 MFC set to  0.000000
10/30/2011	9:31:57 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:31:57 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:31:57 AM	Tube furnace set to 0
10/30/2011	9:32:27 AM	Helium valve closed
10/30/2011	9:32:27 AM	H2 valve closed
10/30/2011	9:32:27 AM	BCl3 valve closed
10/30/2011	9:32:27 AM	PH3 valve closed
10/30/2011	9:32:27 AM	SiCl4 pre valve closed
10/30/2011	9:32:27 AM	SiCl4 post valve closed
10/30/2011	9:32:27 AM	Bypass valve closed
10/30/2011	9:32:27 AM	Bubbler valve closed
10/30/2011	9:32:27 AM	Main Vac valve opened
10/30/2011	9:32:27 AM	Helium MFC set to  0.000000
10/30/2011	9:32:27 AM	H2 MFC set to  0.000000
10/30/2011	9:32:27 AM	BCl3 MFC set to  0.000000
10/30/2011	9:32:27 AM	PHl3 MFC set to  0.000000
10/30/2011	9:32:27 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:32:27 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:32:27 AM	Tube furnace set to 0
10/30/2011	9:32:28 AM	Run finished at 9:32 AM
10/30/2011	9:32:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	9:35:24 AM	Main Vac valve closed
10/30/2011	9:35:53 AM	Main Vac valve opened
10/30/2011	9:37:40 AM	Recipe started at 9:37 AM
10/30/2011	9:37:40 AM	Helium valve closed
10/30/2011	9:37:40 AM	H2 valve closed
10/30/2011	9:37:40 AM	BCl3 valve closed
10/30/2011	9:37:40 AM	PH3 valve closed
10/30/2011	9:37:40 AM	SiCl4 pre valve closed
10/30/2011	9:37:40 AM	SiCl4 post valve closed
10/30/2011	9:37:40 AM	Main Vac valve closed
10/30/2011	9:37:40 AM	Bypass valve closed
10/30/2011	9:37:40 AM	Bubbler valve closed
10/30/2011	9:37:40 AM	Helium MFC set to  0.000000
10/30/2011	9:37:40 AM	H2 MFC set to  0.000000
10/30/2011	9:37:40 AM	BCl3 MFC set to  0.000000
10/30/2011	9:37:40 AM	PHl3 MFC set to  0.000000
10/30/2011	9:37:40 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:37:40 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:37:41 AM	Tube furnace set to 0
10/30/2011	9:37:44 AM	Helium valve closed
10/30/2011	9:37:44 AM	BCl3 valve closed
10/30/2011	9:37:44 AM	PH3 valve closed
10/30/2011	9:37:44 AM	SiCl4 pre valve closed
10/30/2011	9:37:44 AM	SiCl4 post valve closed
10/30/2011	9:37:44 AM	Main Vac valve closed
10/30/2011	9:37:44 AM	Bypass valve closed
10/30/2011	9:37:44 AM	Bubbler valve closed
10/30/2011	9:37:44 AM	H2 valve opened
10/30/2011	9:37:44 AM	Helium MFC set to  0.000000
10/30/2011	9:37:44 AM	H2 MFC set to  500.000000
10/30/2011	9:37:44 AM	BCl3 MFC set to  0.000000
10/30/2011	9:37:44 AM	PHl3 MFC set to  0.000000
10/30/2011	9:37:44 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:37:44 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:37:44 AM	Tube furnace set to 0
10/30/2011	9:38:52 AM	Helium valve closed
10/30/2011	9:38:52 AM	BCl3 valve closed
10/30/2011	9:38:52 AM	PH3 valve closed
10/30/2011	9:38:52 AM	SiCl4 pre valve closed
10/30/2011	9:38:52 AM	SiCl4 post valve closed
10/30/2011	9:38:52 AM	Main Vac valve closed
10/30/2011	9:38:52 AM	Bypass valve closed
10/30/2011	9:38:52 AM	H2 valve opened
10/30/2011	9:38:52 AM	Bubbler valve opened
10/30/2011	9:38:52 AM	Helium MFC set to  0.000000
10/30/2011	9:38:52 AM	H2 MFC set to  500.000000
10/30/2011	9:38:52 AM	BCl3 MFC set to  0.000000
10/30/2011	9:38:52 AM	PHl3 MFC set to  0.000000
10/30/2011	9:38:52 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:38:52 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:38:52 AM	Tube furnace set to 0
10/30/2011	9:38:53 AM	Helium valve closed
10/30/2011	9:38:53 AM	BCl3 valve closed
10/30/2011	9:38:53 AM	PH3 valve closed
10/30/2011	9:38:53 AM	SiCl4 pre valve closed
10/30/2011	9:38:53 AM	SiCl4 post valve closed
10/30/2011	9:38:53 AM	Main Vac valve closed
10/30/2011	9:38:53 AM	Bypass valve closed
10/30/2011	9:38:53 AM	H2 valve opened
10/30/2011	9:38:53 AM	Bubbler valve opened
10/30/2011	9:38:53 AM	Helium MFC set to  0.000000
10/30/2011	9:38:53 AM	H2 MFC set to  500.000000
10/30/2011	9:38:53 AM	BCl3 MFC set to  0.000000
10/30/2011	9:38:53 AM	PHl3 MFC set to  0.000000
10/30/2011	9:38:53 AM	SiCl4 MFC set to  0.000000
10/30/2011	9:38:53 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:38:54 AM	Tube furnace set to 1040
10/30/2011	9:58:54 AM	Helium valve closed
10/30/2011	9:58:54 AM	PH3 valve closed
10/30/2011	9:58:54 AM	Main Vac valve closed
10/30/2011	9:58:54 AM	Bypass valve closed
10/30/2011	9:58:54 AM	H2 valve opened
10/30/2011	9:58:54 AM	BCl3 valve opened
10/30/2011	9:58:54 AM	SiCl4 pre valve opened
10/30/2011	9:58:54 AM	SiCl4 post valve opened
10/30/2011	9:58:54 AM	Bubbler valve opened
10/30/2011	9:58:54 AM	Helium MFC set to  0.000000
10/30/2011	9:58:54 AM	H2 MFC set to  500.000000
10/30/2011	9:58:54 AM	BCl3 MFC set to  2.500000
10/30/2011	9:58:54 AM	PHl3 MFC set to  0.000000
10/30/2011	9:58:54 AM	SiCl4 MFC set to  50.000000
10/30/2011	9:58:54 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	9:58:54 AM	Tube furnace set to 1040
10/30/2011	10:18:54 AM	Helium valve closed
10/30/2011	10:18:54 AM	BCl3 valve closed
10/30/2011	10:18:54 AM	PH3 valve closed
10/30/2011	10:18:54 AM	SiCl4 pre valve closed
10/30/2011	10:18:54 AM	SiCl4 post valve closed
10/30/2011	10:18:54 AM	Main Vac valve closed
10/30/2011	10:18:54 AM	Bypass valve closed
10/30/2011	10:18:54 AM	H2 valve opened
10/30/2011	10:18:54 AM	Bubbler valve opened
10/30/2011	10:18:54 AM	Helium MFC set to  0.000000
10/30/2011	10:18:54 AM	H2 MFC set to  500.000000
10/30/2011	10:18:54 AM	BCl3 MFC set to  0.000000
10/30/2011	10:18:54 AM	PHl3 MFC set to  0.000000
10/30/2011	10:18:54 AM	SiCl4 MFC set to  0.000000
10/30/2011	10:18:54 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	10:18:54 AM	Tube furnace set to 1048
10/30/2011	10:23:54 AM	H2 valve closed
10/30/2011	10:23:54 AM	BCl3 valve closed
10/30/2011	10:23:54 AM	PH3 valve closed
10/30/2011	10:23:54 AM	SiCl4 pre valve closed
10/30/2011	10:23:54 AM	SiCl4 post valve closed
10/30/2011	10:23:54 AM	Main Vac valve closed
10/30/2011	10:23:54 AM	Bypass valve closed
10/30/2011	10:23:54 AM	Helium valve opened
10/30/2011	10:23:54 AM	Bubbler valve opened
10/30/2011	10:23:54 AM	Helium MFC set to  500.000000
10/30/2011	10:23:54 AM	H2 MFC set to  0.000000
10/30/2011	10:23:54 AM	BCl3 MFC set to  0.000000
10/30/2011	10:23:54 AM	PHl3 MFC set to  0.000000
10/30/2011	10:23:54 AM	SiCl4 MFC set to  0.000000
10/30/2011	10:23:54 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	10:23:54 AM	Tube furnace set to 0
10/30/2011	10:40:35 AM	Helium valve closed
10/30/2011	10:40:35 AM	H2 valve closed
10/30/2011	10:40:35 AM	BCl3 valve closed
10/30/2011	10:40:35 AM	PH3 valve closed
10/30/2011	10:40:35 AM	SiCl4 pre valve closed
10/30/2011	10:40:35 AM	SiCl4 post valve closed
10/30/2011	10:40:35 AM	Main Vac valve closed
10/30/2011	10:40:35 AM	Bypass valve closed
10/30/2011	10:40:35 AM	Bubbler valve closed
10/30/2011	10:40:35 AM	Helium MFC set to  0.000000
10/30/2011	10:40:35 AM	H2 MFC set to  0.000000
10/30/2011	10:40:35 AM	BCl3 MFC set to  0.000000
10/30/2011	10:40:35 AM	PHl3 MFC set to  0.000000
10/30/2011	10:40:35 AM	SiCl4 MFC set to  0.000000
10/30/2011	10:40:35 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	10:40:35 AM	Tube furnace set to 0
10/30/2011	10:40:36 AM	Run finished at 10:40 AM
10/30/2011	10:48:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	10:48:17 AM	Recipe started at 10:48 AM
10/30/2011	10:48:17 AM	Helium valve closed
10/30/2011	10:48:17 AM	H2 valve closed
10/30/2011	10:48:17 AM	BCl3 valve closed
10/30/2011	10:48:17 AM	PH3 valve closed
10/30/2011	10:48:17 AM	SiCl4 pre valve closed
10/30/2011	10:48:17 AM	SiCl4 post valve closed
10/30/2011	10:48:17 AM	Main Vac valve closed
10/30/2011	10:48:17 AM	Bubbler valve closed
10/30/2011	10:48:17 AM	Bypass valve opened
10/30/2011	10:48:17 AM	Helium MFC set to  0.000000
10/30/2011	10:48:17 AM	H2 MFC set to  0.000000
10/30/2011	10:48:17 AM	BCl3 MFC set to  0.000000
10/30/2011	10:48:17 AM	PHl3 MFC set to  0.000000
10/30/2011	10:48:17 AM	SiCl4 MFC set to  0.000000
10/30/2011	10:48:17 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	10:48:17 AM	Tube furnace set to 0
10/30/2011	10:49:22 AM	Helium valve closed
10/30/2011	10:49:22 AM	H2 valve closed
10/30/2011	10:49:22 AM	BCl3 valve closed
10/30/2011	10:49:22 AM	PH3 valve closed
10/30/2011	10:49:22 AM	SiCl4 pre valve closed
10/30/2011	10:49:22 AM	SiCl4 post valve closed
10/30/2011	10:49:22 AM	Main Vac valve closed
10/30/2011	10:49:22 AM	Bubbler valve closed
10/30/2011	10:49:22 AM	Bypass valve opened
10/30/2011	10:49:22 AM	Helium MFC set to  0.000000
10/30/2011	10:49:22 AM	H2 MFC set to  0.000000
10/30/2011	10:49:22 AM	BCl3 MFC set to  0.000000
10/30/2011	10:49:22 AM	PHl3 MFC set to  0.000000
10/30/2011	10:49:22 AM	SiCl4 MFC set to  0.000000
10/30/2011	10:49:22 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	10:49:22 AM	Tube furnace set to 0
10/30/2011	10:50:22 AM	Helium valve closed
10/30/2011	10:50:22 AM	H2 valve closed
10/30/2011	10:50:22 AM	BCl3 valve closed
10/30/2011	10:50:22 AM	PH3 valve closed
10/30/2011	10:50:22 AM	SiCl4 pre valve closed
10/30/2011	10:50:22 AM	SiCl4 post valve closed
10/30/2011	10:50:22 AM	Bypass valve closed
10/30/2011	10:50:22 AM	Bubbler valve closed
10/30/2011	10:50:22 AM	Main Vac valve opened
10/30/2011	10:50:22 AM	Helium MFC set to  0.000000
10/30/2011	10:50:22 AM	H2 MFC set to  0.000000
10/30/2011	10:50:22 AM	BCl3 MFC set to  0.000000
10/30/2011	10:50:22 AM	PHl3 MFC set to  0.000000
10/30/2011	10:50:22 AM	SiCl4 MFC set to  0.000000
10/30/2011	10:50:22 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	10:50:22 AM	Tube furnace set to 0
10/30/2011	10:50:23 AM	Run finished at 10:50 AM
10/30/2011	10:50:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	10:59:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	10:59:17 AM	Recipe started at 10:59 AM
10/30/2011	10:59:17 AM	Helium valve closed
10/30/2011	10:59:17 AM	H2 valve closed
10/30/2011	10:59:17 AM	BCl3 valve closed
10/30/2011	10:59:17 AM	PH3 valve closed
10/30/2011	10:59:17 AM	SiCl4 pre valve closed
10/30/2011	10:59:17 AM	SiCl4 post valve closed
10/30/2011	10:59:17 AM	Main Vac valve closed
10/30/2011	10:59:17 AM	Bypass valve closed
10/30/2011	10:59:17 AM	Bubbler valve closed
10/30/2011	10:59:17 AM	Helium MFC set to  0.000000
10/30/2011	10:59:17 AM	H2 MFC set to  0.000000
10/30/2011	10:59:17 AM	BCl3 MFC set to  0.000000
10/30/2011	10:59:17 AM	PHl3 MFC set to  0.000000
10/30/2011	10:59:17 AM	SiCl4 MFC set to  0.000000
10/30/2011	10:59:17 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	10:59:17 AM	Tube furnace set to 0
10/30/2011	10:59:20 AM	H2 valve closed
10/30/2011	10:59:20 AM	BCl3 valve closed
10/30/2011	10:59:20 AM	PH3 valve closed
10/30/2011	10:59:20 AM	SiCl4 pre valve closed
10/30/2011	10:59:20 AM	SiCl4 post valve closed
10/30/2011	10:59:20 AM	Main Vac valve closed
10/30/2011	10:59:20 AM	Bypass valve closed
10/30/2011	10:59:20 AM	Bubbler valve closed
10/30/2011	10:59:20 AM	Helium valve opened
10/30/2011	10:59:20 AM	Helium MFC set to  500.000000
10/30/2011	10:59:20 AM	H2 MFC set to  0.000000
10/30/2011	10:59:20 AM	BCl3 MFC set to  0.000000
10/30/2011	10:59:20 AM	PHl3 MFC set to  0.000000
10/30/2011	10:59:20 AM	SiCl4 MFC set to  0.000000
10/30/2011	10:59:20 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	10:59:20 AM	Tube furnace set to 0
10/30/2011	11:00:09 AM	Helium valve closed
10/30/2011	11:00:09 AM	H2 valve closed
10/30/2011	11:00:09 AM	BCl3 valve closed
10/30/2011	11:00:09 AM	PH3 valve closed
10/30/2011	11:00:09 AM	SiCl4 pre valve closed
10/30/2011	11:00:09 AM	SiCl4 post valve closed
10/30/2011	11:00:09 AM	Main Vac valve closed
10/30/2011	11:00:09 AM	Bypass valve closed
10/30/2011	11:00:09 AM	Bubbler valve closed
10/30/2011	11:00:09 AM	Helium MFC set to  0.000000
10/30/2011	11:00:09 AM	H2 MFC set to  0.000000
10/30/2011	11:00:09 AM	BCl3 MFC set to  0.000000
10/30/2011	11:00:09 AM	PHl3 MFC set to  0.000000
10/30/2011	11:00:09 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:00:09 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:00:10 AM	Tube furnace set to 0
10/30/2011	11:00:11 AM	Run finished at 11:00 AM
10/30/2011	11:00:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	11:00:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	11:00:14 AM	Recipe started at 11:00 AM
10/30/2011	11:00:14 AM	Helium valve closed
10/30/2011	11:00:14 AM	H2 valve closed
10/30/2011	11:00:14 AM	BCl3 valve closed
10/30/2011	11:00:14 AM	PH3 valve closed
10/30/2011	11:00:14 AM	SiCl4 pre valve closed
10/30/2011	11:00:14 AM	SiCl4 post valve closed
10/30/2011	11:00:14 AM	Main Vac valve closed
10/30/2011	11:00:14 AM	Bubbler valve closed
10/30/2011	11:00:14 AM	Bypass valve opened
10/30/2011	11:00:14 AM	Helium MFC set to  0.000000
10/30/2011	11:00:14 AM	H2 MFC set to  0.000000
10/30/2011	11:00:14 AM	BCl3 MFC set to  0.000000
10/30/2011	11:00:14 AM	PHl3 MFC set to  0.000000
10/30/2011	11:00:14 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:00:14 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:00:14 AM	Tube furnace set to 0
10/30/2011	11:01:09 AM	Helium valve closed
10/30/2011	11:01:09 AM	H2 valve closed
10/30/2011	11:01:09 AM	BCl3 valve closed
10/30/2011	11:01:09 AM	PH3 valve closed
10/30/2011	11:01:09 AM	SiCl4 pre valve closed
10/30/2011	11:01:09 AM	SiCl4 post valve closed
10/30/2011	11:01:09 AM	Main Vac valve closed
10/30/2011	11:01:09 AM	Bubbler valve closed
10/30/2011	11:01:09 AM	Bypass valve opened
10/30/2011	11:01:09 AM	Helium MFC set to  0.000000
10/30/2011	11:01:09 AM	H2 MFC set to  0.000000
10/30/2011	11:01:09 AM	BCl3 MFC set to  0.000000
10/30/2011	11:01:09 AM	PHl3 MFC set to  0.000000
10/30/2011	11:01:09 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:01:09 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:01:09 AM	Tube furnace set to 0
10/30/2011	11:01:15 AM	Helium valve closed
10/30/2011	11:01:15 AM	H2 valve closed
10/30/2011	11:01:15 AM	BCl3 valve closed
10/30/2011	11:01:15 AM	PH3 valve closed
10/30/2011	11:01:15 AM	SiCl4 pre valve closed
10/30/2011	11:01:15 AM	SiCl4 post valve closed
10/30/2011	11:01:15 AM	Bypass valve closed
10/30/2011	11:01:15 AM	Bubbler valve closed
10/30/2011	11:01:15 AM	Main Vac valve opened
10/30/2011	11:01:15 AM	Helium MFC set to  0.000000
10/30/2011	11:01:15 AM	H2 MFC set to  0.000000
10/30/2011	11:01:15 AM	BCl3 MFC set to  0.000000
10/30/2011	11:01:15 AM	PHl3 MFC set to  0.000000
10/30/2011	11:01:15 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:01:15 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:01:15 AM	Tube furnace set to 0
10/30/2011	11:01:16 AM	Run finished at 11:01 AM
10/30/2011	11:01:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	11:02:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	11:02:29 AM	Recipe started at 11:02 AM
10/30/2011	11:02:29 AM	Helium valve closed
10/30/2011	11:02:29 AM	H2 valve closed
10/30/2011	11:02:29 AM	BCl3 valve closed
10/30/2011	11:02:29 AM	PH3 valve closed
10/30/2011	11:02:29 AM	SiCl4 pre valve closed
10/30/2011	11:02:29 AM	SiCl4 post valve closed
10/30/2011	11:02:29 AM	Main Vac valve closed
10/30/2011	11:02:29 AM	Bubbler valve closed
10/30/2011	11:02:29 AM	Bypass valve opened
10/30/2011	11:02:29 AM	Helium MFC set to  0.000000
10/30/2011	11:02:29 AM	H2 MFC set to  0.000000
10/30/2011	11:02:29 AM	BCl3 MFC set to  0.000000
10/30/2011	11:02:29 AM	PHl3 MFC set to  0.000000
10/30/2011	11:02:29 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:02:29 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:02:29 AM	Tube furnace set to 0
10/30/2011	11:02:29 AM	Helium valve closed
10/30/2011	11:02:29 AM	H2 valve closed
10/30/2011	11:02:29 AM	BCl3 valve closed
10/30/2011	11:02:29 AM	PH3 valve closed
10/30/2011	11:02:29 AM	SiCl4 pre valve closed
10/30/2011	11:02:29 AM	SiCl4 post valve closed
10/30/2011	11:02:29 AM	Main Vac valve closed
10/30/2011	11:02:29 AM	Bubbler valve closed
10/30/2011	11:02:29 AM	Bypass valve opened
10/30/2011	11:02:29 AM	Helium MFC set to  0.000000
10/30/2011	11:02:29 AM	H2 MFC set to  0.000000
10/30/2011	11:02:29 AM	BCl3 MFC set to  0.000000
10/30/2011	11:02:29 AM	PHl3 MFC set to  0.000000
10/30/2011	11:02:29 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:02:29 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:02:30 AM	Tube furnace set to 0
10/30/2011	11:02:30 AM	Helium valve closed
10/30/2011	11:02:30 AM	H2 valve closed
10/30/2011	11:02:30 AM	BCl3 valve closed
10/30/2011	11:02:30 AM	PH3 valve closed
10/30/2011	11:02:30 AM	SiCl4 pre valve closed
10/30/2011	11:02:30 AM	SiCl4 post valve closed
10/30/2011	11:02:30 AM	Bypass valve closed
10/30/2011	11:02:30 AM	Bubbler valve closed
10/30/2011	11:02:30 AM	Main Vac valve opened
10/30/2011	11:02:30 AM	Helium MFC set to  0.000000
10/30/2011	11:02:30 AM	H2 MFC set to  0.000000
10/30/2011	11:02:30 AM	BCl3 MFC set to  0.000000
10/30/2011	11:02:30 AM	PHl3 MFC set to  0.000000
10/30/2011	11:02:30 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:02:30 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:02:30 AM	Tube furnace set to 0
10/30/2011	11:02:33 AM	H2 valve closed
10/30/2011	11:02:33 AM	BCl3 valve closed
10/30/2011	11:02:33 AM	PH3 valve closed
10/30/2011	11:02:33 AM	SiCl4 pre valve closed
10/30/2011	11:02:33 AM	SiCl4 post valve closed
10/30/2011	11:02:33 AM	Bypass valve closed
10/30/2011	11:02:33 AM	Bubbler valve closed
10/30/2011	11:02:33 AM	Helium valve opened
10/30/2011	11:02:33 AM	Main Vac valve opened
10/30/2011	11:02:33 AM	Helium MFC set to  20.000000
10/30/2011	11:02:33 AM	H2 MFC set to  0.000000
10/30/2011	11:02:33 AM	BCl3 MFC set to  0.000000
10/30/2011	11:02:33 AM	PHl3 MFC set to  0.000000
10/30/2011	11:02:33 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:02:33 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:02:33 AM	Tube furnace set to 0
10/30/2011	11:03:03 AM	Helium valve closed
10/30/2011	11:03:03 AM	H2 valve closed
10/30/2011	11:03:03 AM	BCl3 valve closed
10/30/2011	11:03:03 AM	PH3 valve closed
10/30/2011	11:03:03 AM	SiCl4 pre valve closed
10/30/2011	11:03:03 AM	SiCl4 post valve closed
10/30/2011	11:03:03 AM	Bypass valve closed
10/30/2011	11:03:03 AM	Bubbler valve closed
10/30/2011	11:03:03 AM	Main Vac valve opened
10/30/2011	11:03:03 AM	Helium MFC set to  0.000000
10/30/2011	11:03:03 AM	H2 MFC set to  0.000000
10/30/2011	11:03:03 AM	BCl3 MFC set to  0.000000
10/30/2011	11:03:03 AM	PHl3 MFC set to  0.000000
10/30/2011	11:03:03 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:03:03 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:03:03 AM	Tube furnace set to 0
10/30/2011	11:03:34 AM	H2 valve closed
10/30/2011	11:03:34 AM	BCl3 valve closed
10/30/2011	11:03:34 AM	PH3 valve closed
10/30/2011	11:03:34 AM	SiCl4 pre valve closed
10/30/2011	11:03:34 AM	SiCl4 post valve closed
10/30/2011	11:03:34 AM	Bypass valve closed
10/30/2011	11:03:34 AM	Bubbler valve closed
10/30/2011	11:03:34 AM	Helium valve opened
10/30/2011	11:03:34 AM	Main Vac valve opened
10/30/2011	11:03:34 AM	Helium MFC set to  20.000000
10/30/2011	11:03:34 AM	H2 MFC set to  0.000000
10/30/2011	11:03:34 AM	BCl3 MFC set to  0.000000
10/30/2011	11:03:34 AM	PHl3 MFC set to  0.000000
10/30/2011	11:03:34 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:03:34 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:03:34 AM	Tube furnace set to 0
10/30/2011	11:04:04 AM	Helium valve closed
10/30/2011	11:04:04 AM	H2 valve closed
10/30/2011	11:04:04 AM	BCl3 valve closed
10/30/2011	11:04:04 AM	PH3 valve closed
10/30/2011	11:04:04 AM	SiCl4 pre valve closed
10/30/2011	11:04:04 AM	SiCl4 post valve closed
10/30/2011	11:04:04 AM	Bypass valve closed
10/30/2011	11:04:04 AM	Bubbler valve closed
10/30/2011	11:04:04 AM	Main Vac valve opened
10/30/2011	11:04:04 AM	Helium MFC set to  0.000000
10/30/2011	11:04:04 AM	H2 MFC set to  0.000000
10/30/2011	11:04:04 AM	BCl3 MFC set to  0.000000
10/30/2011	11:04:04 AM	PHl3 MFC set to  0.000000
10/30/2011	11:04:04 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:04:04 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:04:04 AM	Tube furnace set to 0
10/30/2011	11:04:34 AM	H2 valve closed
10/30/2011	11:04:34 AM	BCl3 valve closed
10/30/2011	11:04:34 AM	PH3 valve closed
10/30/2011	11:04:34 AM	SiCl4 pre valve closed
10/30/2011	11:04:34 AM	SiCl4 post valve closed
10/30/2011	11:04:34 AM	Bypass valve closed
10/30/2011	11:04:34 AM	Bubbler valve closed
10/30/2011	11:04:34 AM	Helium valve opened
10/30/2011	11:04:34 AM	Main Vac valve opened
10/30/2011	11:04:34 AM	Helium MFC set to  20.000000
10/30/2011	11:04:34 AM	H2 MFC set to  0.000000
10/30/2011	11:04:34 AM	BCl3 MFC set to  0.000000
10/30/2011	11:04:34 AM	PHl3 MFC set to  0.000000
10/30/2011	11:04:34 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:04:34 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:04:34 AM	Tube furnace set to 0
10/30/2011	11:05:04 AM	Helium valve closed
10/30/2011	11:05:04 AM	H2 valve closed
10/30/2011	11:05:04 AM	BCl3 valve closed
10/30/2011	11:05:04 AM	PH3 valve closed
10/30/2011	11:05:04 AM	SiCl4 pre valve closed
10/30/2011	11:05:04 AM	SiCl4 post valve closed
10/30/2011	11:05:04 AM	Bypass valve closed
10/30/2011	11:05:04 AM	Bubbler valve closed
10/30/2011	11:05:04 AM	Main Vac valve opened
10/30/2011	11:05:04 AM	Helium MFC set to  0.000000
10/30/2011	11:05:04 AM	H2 MFC set to  0.000000
10/30/2011	11:05:04 AM	BCl3 MFC set to  0.000000
10/30/2011	11:05:04 AM	PHl3 MFC set to  0.000000
10/30/2011	11:05:04 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:05:04 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:05:04 AM	Tube furnace set to 0
10/30/2011	11:05:34 AM	H2 valve closed
10/30/2011	11:05:34 AM	BCl3 valve closed
10/30/2011	11:05:34 AM	PH3 valve closed
10/30/2011	11:05:34 AM	SiCl4 pre valve closed
10/30/2011	11:05:34 AM	SiCl4 post valve closed
10/30/2011	11:05:34 AM	Bypass valve closed
10/30/2011	11:05:34 AM	Bubbler valve closed
10/30/2011	11:05:34 AM	Helium valve opened
10/30/2011	11:05:34 AM	Main Vac valve opened
10/30/2011	11:05:34 AM	Helium MFC set to  20.000000
10/30/2011	11:05:34 AM	H2 MFC set to  0.000000
10/30/2011	11:05:34 AM	BCl3 MFC set to  0.000000
10/30/2011	11:05:34 AM	PHl3 MFC set to  0.000000
10/30/2011	11:05:34 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:05:34 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:05:34 AM	Tube furnace set to 0
10/30/2011	11:06:04 AM	Helium valve closed
10/30/2011	11:06:04 AM	H2 valve closed
10/30/2011	11:06:04 AM	BCl3 valve closed
10/30/2011	11:06:04 AM	PH3 valve closed
10/30/2011	11:06:04 AM	SiCl4 pre valve closed
10/30/2011	11:06:04 AM	SiCl4 post valve closed
10/30/2011	11:06:04 AM	Bypass valve closed
10/30/2011	11:06:04 AM	Bubbler valve closed
10/30/2011	11:06:04 AM	Main Vac valve opened
10/30/2011	11:06:05 AM	Helium MFC set to  0.000000
10/30/2011	11:06:05 AM	H2 MFC set to  0.000000
10/30/2011	11:06:05 AM	BCl3 MFC set to  0.000000
10/30/2011	11:06:05 AM	PHl3 MFC set to  0.000000
10/30/2011	11:06:05 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:06:05 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:06:05 AM	Tube furnace set to 0
10/30/2011	11:06:35 AM	H2 valve closed
10/30/2011	11:06:35 AM	BCl3 valve closed
10/30/2011	11:06:35 AM	PH3 valve closed
10/30/2011	11:06:35 AM	SiCl4 pre valve closed
10/30/2011	11:06:35 AM	SiCl4 post valve closed
10/30/2011	11:06:35 AM	Bypass valve closed
10/30/2011	11:06:35 AM	Bubbler valve closed
10/30/2011	11:06:35 AM	Helium valve opened
10/30/2011	11:06:35 AM	Main Vac valve opened
10/30/2011	11:06:35 AM	Helium MFC set to  20.000000
10/30/2011	11:06:35 AM	H2 MFC set to  0.000000
10/30/2011	11:06:35 AM	BCl3 MFC set to  0.000000
10/30/2011	11:06:35 AM	PHl3 MFC set to  0.000000
10/30/2011	11:06:35 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:06:35 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:06:35 AM	Tube furnace set to 0
10/30/2011	11:07:05 AM	Helium valve closed
10/30/2011	11:07:05 AM	H2 valve closed
10/30/2011	11:07:05 AM	BCl3 valve closed
10/30/2011	11:07:05 AM	PH3 valve closed
10/30/2011	11:07:05 AM	SiCl4 pre valve closed
10/30/2011	11:07:05 AM	SiCl4 post valve closed
10/30/2011	11:07:05 AM	Bypass valve closed
10/30/2011	11:07:05 AM	Bubbler valve closed
10/30/2011	11:07:05 AM	Main Vac valve opened
10/30/2011	11:07:05 AM	Helium MFC set to  0.000000
10/30/2011	11:07:05 AM	H2 MFC set to  0.000000
10/30/2011	11:07:05 AM	BCl3 MFC set to  0.000000
10/30/2011	11:07:05 AM	PHl3 MFC set to  0.000000
10/30/2011	11:07:05 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:07:05 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:07:05 AM	Tube furnace set to 0
10/30/2011	11:07:35 AM	H2 valve closed
10/30/2011	11:07:35 AM	BCl3 valve closed
10/30/2011	11:07:35 AM	PH3 valve closed
10/30/2011	11:07:35 AM	SiCl4 pre valve closed
10/30/2011	11:07:35 AM	SiCl4 post valve closed
10/30/2011	11:07:35 AM	Bypass valve closed
10/30/2011	11:07:35 AM	Bubbler valve closed
10/30/2011	11:07:35 AM	Helium valve opened
10/30/2011	11:07:35 AM	Main Vac valve opened
10/30/2011	11:07:35 AM	Helium MFC set to  20.000000
10/30/2011	11:07:35 AM	H2 MFC set to  0.000000
10/30/2011	11:07:35 AM	BCl3 MFC set to  0.000000
10/30/2011	11:07:35 AM	PHl3 MFC set to  0.000000
10/30/2011	11:07:35 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:07:35 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:07:35 AM	Tube furnace set to 0
10/30/2011	11:08:05 AM	Helium valve closed
10/30/2011	11:08:05 AM	H2 valve closed
10/30/2011	11:08:05 AM	BCl3 valve closed
10/30/2011	11:08:05 AM	PH3 valve closed
10/30/2011	11:08:05 AM	SiCl4 pre valve closed
10/30/2011	11:08:05 AM	SiCl4 post valve closed
10/30/2011	11:08:05 AM	Bypass valve closed
10/30/2011	11:08:05 AM	Bubbler valve closed
10/30/2011	11:08:05 AM	Main Vac valve opened
10/30/2011	11:08:05 AM	Helium MFC set to  0.000000
10/30/2011	11:08:05 AM	H2 MFC set to  0.000000
10/30/2011	11:08:05 AM	BCl3 MFC set to  0.000000
10/30/2011	11:08:05 AM	PHl3 MFC set to  0.000000
10/30/2011	11:08:05 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:08:05 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:08:05 AM	Tube furnace set to 0
10/30/2011	11:08:35 AM	H2 valve closed
10/30/2011	11:08:35 AM	BCl3 valve closed
10/30/2011	11:08:35 AM	PH3 valve closed
10/30/2011	11:08:35 AM	SiCl4 pre valve closed
10/30/2011	11:08:35 AM	SiCl4 post valve closed
10/30/2011	11:08:35 AM	Bypass valve closed
10/30/2011	11:08:35 AM	Bubbler valve closed
10/30/2011	11:08:35 AM	Helium valve opened
10/30/2011	11:08:35 AM	Main Vac valve opened
10/30/2011	11:08:35 AM	Helium MFC set to  20.000000
10/30/2011	11:08:35 AM	H2 MFC set to  0.000000
10/30/2011	11:08:35 AM	BCl3 MFC set to  0.000000
10/30/2011	11:08:35 AM	PHl3 MFC set to  0.000000
10/30/2011	11:08:35 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:08:35 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:08:36 AM	Tube furnace set to 0
10/30/2011	11:09:06 AM	Helium valve closed
10/30/2011	11:09:06 AM	H2 valve closed
10/30/2011	11:09:06 AM	BCl3 valve closed
10/30/2011	11:09:06 AM	PH3 valve closed
10/30/2011	11:09:06 AM	SiCl4 pre valve closed
10/30/2011	11:09:06 AM	SiCl4 post valve closed
10/30/2011	11:09:06 AM	Bypass valve closed
10/30/2011	11:09:06 AM	Bubbler valve closed
10/30/2011	11:09:06 AM	Main Vac valve opened
10/30/2011	11:09:06 AM	Helium MFC set to  0.000000
10/30/2011	11:09:06 AM	H2 MFC set to  0.000000
10/30/2011	11:09:06 AM	BCl3 MFC set to  0.000000
10/30/2011	11:09:06 AM	PHl3 MFC set to  0.000000
10/30/2011	11:09:06 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:09:06 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:09:06 AM	Tube furnace set to 0
10/30/2011	11:09:36 AM	H2 valve closed
10/30/2011	11:09:36 AM	BCl3 valve closed
10/30/2011	11:09:36 AM	PH3 valve closed
10/30/2011	11:09:36 AM	SiCl4 pre valve closed
10/30/2011	11:09:36 AM	SiCl4 post valve closed
10/30/2011	11:09:36 AM	Bypass valve closed
10/30/2011	11:09:36 AM	Bubbler valve closed
10/30/2011	11:09:36 AM	Helium valve opened
10/30/2011	11:09:36 AM	Main Vac valve opened
10/30/2011	11:09:36 AM	Helium MFC set to  20.000000
10/30/2011	11:09:36 AM	H2 MFC set to  0.000000
10/30/2011	11:09:36 AM	BCl3 MFC set to  0.000000
10/30/2011	11:09:36 AM	PHl3 MFC set to  0.000000
10/30/2011	11:09:36 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:09:36 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:09:36 AM	Tube furnace set to 0
10/30/2011	11:10:06 AM	Helium valve closed
10/30/2011	11:10:06 AM	H2 valve closed
10/30/2011	11:10:06 AM	BCl3 valve closed
10/30/2011	11:10:06 AM	PH3 valve closed
10/30/2011	11:10:06 AM	SiCl4 pre valve closed
10/30/2011	11:10:06 AM	SiCl4 post valve closed
10/30/2011	11:10:06 AM	Bypass valve closed
10/30/2011	11:10:06 AM	Bubbler valve closed
10/30/2011	11:10:06 AM	Main Vac valve opened
10/30/2011	11:10:06 AM	Helium MFC set to  0.000000
10/30/2011	11:10:06 AM	H2 MFC set to  0.000000
10/30/2011	11:10:06 AM	BCl3 MFC set to  0.000000
10/30/2011	11:10:06 AM	PHl3 MFC set to  0.000000
10/30/2011	11:10:06 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:10:06 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:10:06 AM	Tube furnace set to 0
10/30/2011	11:10:36 AM	H2 valve closed
10/30/2011	11:10:36 AM	BCl3 valve closed
10/30/2011	11:10:36 AM	PH3 valve closed
10/30/2011	11:10:36 AM	SiCl4 pre valve closed
10/30/2011	11:10:36 AM	SiCl4 post valve closed
10/30/2011	11:10:36 AM	Bypass valve closed
10/30/2011	11:10:36 AM	Bubbler valve closed
10/30/2011	11:10:36 AM	Helium valve opened
10/30/2011	11:10:36 AM	Main Vac valve opened
10/30/2011	11:10:36 AM	Helium MFC set to  20.000000
10/30/2011	11:10:36 AM	H2 MFC set to  0.000000
10/30/2011	11:10:36 AM	BCl3 MFC set to  0.000000
10/30/2011	11:10:36 AM	PHl3 MFC set to  0.000000
10/30/2011	11:10:36 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:10:36 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:10:36 AM	Tube furnace set to 0
10/30/2011	11:11:06 AM	Helium valve closed
10/30/2011	11:11:06 AM	H2 valve closed
10/30/2011	11:11:06 AM	BCl3 valve closed
10/30/2011	11:11:06 AM	PH3 valve closed
10/30/2011	11:11:06 AM	SiCl4 pre valve closed
10/30/2011	11:11:06 AM	SiCl4 post valve closed
10/30/2011	11:11:06 AM	Bypass valve closed
10/30/2011	11:11:06 AM	Bubbler valve closed
10/30/2011	11:11:06 AM	Main Vac valve opened
10/30/2011	11:11:06 AM	Helium MFC set to  0.000000
10/30/2011	11:11:06 AM	H2 MFC set to  0.000000
10/30/2011	11:11:06 AM	BCl3 MFC set to  0.000000
10/30/2011	11:11:06 AM	PHl3 MFC set to  0.000000
10/30/2011	11:11:06 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:11:06 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:11:07 AM	Tube furnace set to 0
10/30/2011	11:11:37 AM	H2 valve closed
10/30/2011	11:11:37 AM	BCl3 valve closed
10/30/2011	11:11:37 AM	PH3 valve closed
10/30/2011	11:11:37 AM	SiCl4 pre valve closed
10/30/2011	11:11:37 AM	SiCl4 post valve closed
10/30/2011	11:11:37 AM	Bypass valve closed
10/30/2011	11:11:37 AM	Bubbler valve closed
10/30/2011	11:11:37 AM	Helium valve opened
10/30/2011	11:11:37 AM	Main Vac valve opened
10/30/2011	11:11:37 AM	Helium MFC set to  20.000000
10/30/2011	11:11:37 AM	H2 MFC set to  0.000000
10/30/2011	11:11:37 AM	BCl3 MFC set to  0.000000
10/30/2011	11:11:37 AM	PHl3 MFC set to  0.000000
10/30/2011	11:11:37 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:11:37 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:11:37 AM	Tube furnace set to 0
10/30/2011	11:12:07 AM	Helium valve closed
10/30/2011	11:12:07 AM	H2 valve closed
10/30/2011	11:12:07 AM	BCl3 valve closed
10/30/2011	11:12:07 AM	PH3 valve closed
10/30/2011	11:12:07 AM	SiCl4 pre valve closed
10/30/2011	11:12:07 AM	SiCl4 post valve closed
10/30/2011	11:12:07 AM	Bypass valve closed
10/30/2011	11:12:07 AM	Bubbler valve closed
10/30/2011	11:12:07 AM	Main Vac valve opened
10/30/2011	11:12:07 AM	Helium MFC set to  0.000000
10/30/2011	11:12:07 AM	H2 MFC set to  0.000000
10/30/2011	11:12:07 AM	BCl3 MFC set to  0.000000
10/30/2011	11:12:07 AM	PHl3 MFC set to  0.000000
10/30/2011	11:12:07 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:12:07 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:12:07 AM	Tube furnace set to 0
10/30/2011	11:12:08 AM	Run finished at 11:12 AM
10/30/2011	11:12:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	11:15:18 AM	Main Vac valve closed
10/30/2011	11:15:44 AM	Main Vac valve opened
10/30/2011	11:19:48 AM	Recipe started at 11:19 AM
10/30/2011	11:19:48 AM	Helium valve closed
10/30/2011	11:19:48 AM	H2 valve closed
10/30/2011	11:19:48 AM	BCl3 valve closed
10/30/2011	11:19:48 AM	PH3 valve closed
10/30/2011	11:19:48 AM	SiCl4 pre valve closed
10/30/2011	11:19:48 AM	SiCl4 post valve closed
10/30/2011	11:19:48 AM	Main Vac valve closed
10/30/2011	11:19:48 AM	Bypass valve closed
10/30/2011	11:19:48 AM	Bubbler valve closed
10/30/2011	11:19:48 AM	Helium MFC set to  0.000000
10/30/2011	11:19:48 AM	H2 MFC set to  0.000000
10/30/2011	11:19:48 AM	BCl3 MFC set to  0.000000
10/30/2011	11:19:48 AM	PHl3 MFC set to  0.000000
10/30/2011	11:19:48 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:19:48 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:19:48 AM	Tube furnace set to 0
10/30/2011	11:19:51 AM	Helium valve closed
10/30/2011	11:19:51 AM	BCl3 valve closed
10/30/2011	11:19:51 AM	PH3 valve closed
10/30/2011	11:19:51 AM	SiCl4 pre valve closed
10/30/2011	11:19:51 AM	SiCl4 post valve closed
10/30/2011	11:19:51 AM	Main Vac valve closed
10/30/2011	11:19:51 AM	Bypass valve closed
10/30/2011	11:19:51 AM	Bubbler valve closed
10/30/2011	11:19:51 AM	H2 valve opened
10/30/2011	11:19:51 AM	Helium MFC set to  0.000000
10/30/2011	11:19:51 AM	H2 MFC set to  500.000000
10/30/2011	11:19:51 AM	BCl3 MFC set to  0.000000
10/30/2011	11:19:51 AM	PHl3 MFC set to  0.000000
10/30/2011	11:19:51 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:19:51 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:19:51 AM	Tube furnace set to 0
10/30/2011	11:20:57 AM	Helium valve closed
10/30/2011	11:20:57 AM	BCl3 valve closed
10/30/2011	11:20:57 AM	PH3 valve closed
10/30/2011	11:20:57 AM	SiCl4 pre valve closed
10/30/2011	11:20:57 AM	SiCl4 post valve closed
10/30/2011	11:20:57 AM	Main Vac valve closed
10/30/2011	11:20:57 AM	Bypass valve closed
10/30/2011	11:20:57 AM	H2 valve opened
10/30/2011	11:20:57 AM	Bubbler valve opened
10/30/2011	11:20:57 AM	Helium MFC set to  0.000000
10/30/2011	11:20:57 AM	H2 MFC set to  500.000000
10/30/2011	11:20:57 AM	BCl3 MFC set to  0.000000
10/30/2011	11:20:57 AM	PHl3 MFC set to  0.000000
10/30/2011	11:20:57 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:20:57 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:20:57 AM	Tube furnace set to 0
10/30/2011	11:20:58 AM	Helium valve closed
10/30/2011	11:20:58 AM	BCl3 valve closed
10/30/2011	11:20:58 AM	PH3 valve closed
10/30/2011	11:20:58 AM	SiCl4 pre valve closed
10/30/2011	11:20:58 AM	SiCl4 post valve closed
10/30/2011	11:20:58 AM	Main Vac valve closed
10/30/2011	11:20:58 AM	Bypass valve closed
10/30/2011	11:20:58 AM	H2 valve opened
10/30/2011	11:20:58 AM	Bubbler valve opened
10/30/2011	11:20:58 AM	Helium MFC set to  0.000000
10/30/2011	11:20:58 AM	H2 MFC set to  500.000000
10/30/2011	11:20:58 AM	BCl3 MFC set to  0.000000
10/30/2011	11:20:58 AM	PHl3 MFC set to  0.000000
10/30/2011	11:20:58 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:20:58 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:20:58 AM	Tube furnace set to 1030
10/30/2011	11:40:58 AM	Helium valve closed
10/30/2011	11:40:58 AM	PH3 valve closed
10/30/2011	11:40:58 AM	Main Vac valve closed
10/30/2011	11:40:58 AM	Bypass valve closed
10/30/2011	11:40:58 AM	H2 valve opened
10/30/2011	11:40:58 AM	BCl3 valve opened
10/30/2011	11:40:58 AM	SiCl4 pre valve opened
10/30/2011	11:40:58 AM	SiCl4 post valve opened
10/30/2011	11:40:58 AM	Bubbler valve opened
10/30/2011	11:40:58 AM	Helium MFC set to  0.000000
10/30/2011	11:40:58 AM	H2 MFC set to  500.000000
10/30/2011	11:40:58 AM	BCl3 MFC set to  2.500000
10/30/2011	11:40:58 AM	PHl3 MFC set to  0.000000
10/30/2011	11:40:58 AM	SiCl4 MFC set to  50.000000
10/30/2011	11:40:58 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:40:58 AM	Tube furnace set to 1030
10/30/2011	11:56:58 AM	Helium valve closed
10/30/2011	11:56:58 AM	BCl3 valve closed
10/30/2011	11:56:58 AM	PH3 valve closed
10/30/2011	11:56:58 AM	SiCl4 pre valve closed
10/30/2011	11:56:58 AM	SiCl4 post valve closed
10/30/2011	11:56:58 AM	Main Vac valve closed
10/30/2011	11:56:58 AM	Bypass valve closed
10/30/2011	11:56:58 AM	H2 valve opened
10/30/2011	11:56:58 AM	Bubbler valve opened
10/30/2011	11:56:58 AM	Helium MFC set to  0.000000
10/30/2011	11:56:58 AM	H2 MFC set to  500.000000
10/30/2011	11:56:58 AM	BCl3 MFC set to  0.000000
10/30/2011	11:56:58 AM	PHl3 MFC set to  0.000000
10/30/2011	11:56:58 AM	SiCl4 MFC set to  0.000000
10/30/2011	11:56:58 AM	Bypass solenoid MFC set to  0.000000
10/30/2011	11:56:58 AM	Tube furnace set to 1048
10/30/2011	12:01:58 PM	H2 valve closed
10/30/2011	12:01:58 PM	BCl3 valve closed
10/30/2011	12:01:58 PM	PH3 valve closed
10/30/2011	12:01:58 PM	SiCl4 pre valve closed
10/30/2011	12:01:58 PM	SiCl4 post valve closed
10/30/2011	12:01:58 PM	Main Vac valve closed
10/30/2011	12:01:58 PM	Bypass valve closed
10/30/2011	12:01:58 PM	Helium valve opened
10/30/2011	12:01:58 PM	Bubbler valve opened
10/30/2011	12:01:58 PM	Helium MFC set to  500.000000
10/30/2011	12:01:58 PM	H2 MFC set to  0.000000
10/30/2011	12:01:58 PM	BCl3 MFC set to  0.000000
10/30/2011	12:01:58 PM	PHl3 MFC set to  0.000000
10/30/2011	12:01:58 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:01:58 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:01:59 PM	Tube furnace set to 0
10/30/2011	12:21:59 PM	Helium valve closed
10/30/2011	12:21:59 PM	H2 valve closed
10/30/2011	12:21:59 PM	BCl3 valve closed
10/30/2011	12:21:59 PM	PH3 valve closed
10/30/2011	12:21:59 PM	SiCl4 pre valve closed
10/30/2011	12:21:59 PM	SiCl4 post valve closed
10/30/2011	12:21:59 PM	Main Vac valve closed
10/30/2011	12:21:59 PM	Bypass valve closed
10/30/2011	12:21:59 PM	Bubbler valve closed
10/30/2011	12:21:59 PM	Helium MFC set to  0.000000
10/30/2011	12:21:59 PM	H2 MFC set to  0.000000
10/30/2011	12:21:59 PM	BCl3 MFC set to  0.000000
10/30/2011	12:21:59 PM	PHl3 MFC set to  0.000000
10/30/2011	12:21:59 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:21:59 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:21:59 PM	Tube furnace set to 0
10/30/2011	12:22:00 PM	Run finished at 12:22 PM
10/30/2011	12:28:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	12:28:49 PM	Recipe started at 12:28 PM
10/30/2011	12:28:49 PM	Helium valve closed
10/30/2011	12:28:49 PM	H2 valve closed
10/30/2011	12:28:49 PM	BCl3 valve closed
10/30/2011	12:28:49 PM	PH3 valve closed
10/30/2011	12:28:49 PM	SiCl4 pre valve closed
10/30/2011	12:28:49 PM	SiCl4 post valve closed
10/30/2011	12:28:49 PM	Main Vac valve closed
10/30/2011	12:28:49 PM	Bubbler valve closed
10/30/2011	12:28:49 PM	Bypass valve opened
10/30/2011	12:28:49 PM	Helium MFC set to  0.000000
10/30/2011	12:28:49 PM	H2 MFC set to  0.000000
10/30/2011	12:28:49 PM	BCl3 MFC set to  0.000000
10/30/2011	12:28:49 PM	PHl3 MFC set to  0.000000
10/30/2011	12:28:49 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:28:49 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:28:49 PM	Tube furnace set to 0
10/30/2011	12:29:53 PM	Helium valve closed
10/30/2011	12:29:53 PM	H2 valve closed
10/30/2011	12:29:53 PM	BCl3 valve closed
10/30/2011	12:29:53 PM	PH3 valve closed
10/30/2011	12:29:53 PM	SiCl4 pre valve closed
10/30/2011	12:29:53 PM	SiCl4 post valve closed
10/30/2011	12:29:53 PM	Main Vac valve closed
10/30/2011	12:29:53 PM	Bubbler valve closed
10/30/2011	12:29:53 PM	Bypass valve opened
10/30/2011	12:29:53 PM	Helium MFC set to  0.000000
10/30/2011	12:29:53 PM	H2 MFC set to  0.000000
10/30/2011	12:29:53 PM	BCl3 MFC set to  0.000000
10/30/2011	12:29:53 PM	PHl3 MFC set to  0.000000
10/30/2011	12:29:53 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:29:53 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:29:53 PM	Tube furnace set to 0
10/30/2011	12:29:59 PM	Helium valve closed
10/30/2011	12:29:59 PM	H2 valve closed
10/30/2011	12:29:59 PM	BCl3 valve closed
10/30/2011	12:29:59 PM	PH3 valve closed
10/30/2011	12:29:59 PM	SiCl4 pre valve closed
10/30/2011	12:29:59 PM	SiCl4 post valve closed
10/30/2011	12:29:59 PM	Bypass valve closed
10/30/2011	12:29:59 PM	Bubbler valve closed
10/30/2011	12:29:59 PM	Main Vac valve opened
10/30/2011	12:29:59 PM	Helium MFC set to  0.000000
10/30/2011	12:29:59 PM	H2 MFC set to  0.000000
10/30/2011	12:29:59 PM	BCl3 MFC set to  0.000000
10/30/2011	12:29:59 PM	PHl3 MFC set to  0.000000
10/30/2011	12:29:59 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:29:59 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:29:59 PM	Tube furnace set to 0
10/30/2011	12:30:00 PM	Run finished at 12:30 PM
10/30/2011	12:30:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	12:30:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	12:30:44 PM	Recipe started at 12:30 PM
10/30/2011	12:30:44 PM	Helium valve closed
10/30/2011	12:30:44 PM	H2 valve closed
10/30/2011	12:30:44 PM	BCl3 valve closed
10/30/2011	12:30:44 PM	PH3 valve closed
10/30/2011	12:30:44 PM	SiCl4 pre valve closed
10/30/2011	12:30:44 PM	SiCl4 post valve closed
10/30/2011	12:30:44 PM	Main Vac valve closed
10/30/2011	12:30:44 PM	Bypass valve closed
10/30/2011	12:30:44 PM	Bubbler valve closed
10/30/2011	12:30:44 PM	Helium MFC set to  0.000000
10/30/2011	12:30:44 PM	H2 MFC set to  0.000000
10/30/2011	12:30:44 PM	BCl3 MFC set to  0.000000
10/30/2011	12:30:44 PM	PHl3 MFC set to  0.000000
10/30/2011	12:30:44 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:30:44 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:30:44 PM	Tube furnace set to 0
10/30/2011	12:30:47 PM	H2 valve closed
10/30/2011	12:30:47 PM	BCl3 valve closed
10/30/2011	12:30:47 PM	PH3 valve closed
10/30/2011	12:30:47 PM	SiCl4 pre valve closed
10/30/2011	12:30:47 PM	SiCl4 post valve closed
10/30/2011	12:30:47 PM	Main Vac valve closed
10/30/2011	12:30:47 PM	Bypass valve closed
10/30/2011	12:30:47 PM	Bubbler valve closed
10/30/2011	12:30:47 PM	Helium valve opened
10/30/2011	12:30:47 PM	Helium MFC set to  500.000000
10/30/2011	12:30:47 PM	H2 MFC set to  0.000000
10/30/2011	12:30:47 PM	BCl3 MFC set to  0.000000
10/30/2011	12:30:47 PM	PHl3 MFC set to  0.000000
10/30/2011	12:30:47 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:30:47 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:30:47 PM	Tube furnace set to 0
10/30/2011	12:31:34 PM	Helium valve closed
10/30/2011	12:31:34 PM	H2 valve closed
10/30/2011	12:31:34 PM	BCl3 valve closed
10/30/2011	12:31:34 PM	PH3 valve closed
10/30/2011	12:31:34 PM	SiCl4 pre valve closed
10/30/2011	12:31:34 PM	SiCl4 post valve closed
10/30/2011	12:31:34 PM	Main Vac valve closed
10/30/2011	12:31:34 PM	Bypass valve closed
10/30/2011	12:31:34 PM	Bubbler valve closed
10/30/2011	12:31:34 PM	Helium MFC set to  0.000000
10/30/2011	12:31:34 PM	H2 MFC set to  0.000000
10/30/2011	12:31:34 PM	BCl3 MFC set to  0.000000
10/30/2011	12:31:34 PM	PHl3 MFC set to  0.000000
10/30/2011	12:31:34 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:31:34 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:31:35 PM	Tube furnace set to 0
10/30/2011	12:31:36 PM	Run finished at 12:31 PM
10/30/2011	12:31:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	12:31:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	12:31:38 PM	Recipe started at 12:31 PM
10/30/2011	12:31:38 PM	Helium valve closed
10/30/2011	12:31:38 PM	H2 valve closed
10/30/2011	12:31:38 PM	BCl3 valve closed
10/30/2011	12:31:38 PM	PH3 valve closed
10/30/2011	12:31:38 PM	SiCl4 pre valve closed
10/30/2011	12:31:38 PM	SiCl4 post valve closed
10/30/2011	12:31:38 PM	Main Vac valve closed
10/30/2011	12:31:38 PM	Bubbler valve closed
10/30/2011	12:31:38 PM	Bypass valve opened
10/30/2011	12:31:38 PM	Helium MFC set to  0.000000
10/30/2011	12:31:38 PM	H2 MFC set to  0.000000
10/30/2011	12:31:38 PM	BCl3 MFC set to  0.000000
10/30/2011	12:31:38 PM	PHl3 MFC set to  0.000000
10/30/2011	12:31:38 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:31:38 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:31:39 PM	Tube furnace set to 0
10/30/2011	12:32:32 PM	Helium valve closed
10/30/2011	12:32:32 PM	H2 valve closed
10/30/2011	12:32:32 PM	BCl3 valve closed
10/30/2011	12:32:32 PM	PH3 valve closed
10/30/2011	12:32:32 PM	SiCl4 pre valve closed
10/30/2011	12:32:32 PM	SiCl4 post valve closed
10/30/2011	12:32:32 PM	Main Vac valve closed
10/30/2011	12:32:32 PM	Bubbler valve closed
10/30/2011	12:32:32 PM	Bypass valve opened
10/30/2011	12:32:32 PM	Helium MFC set to  0.000000
10/30/2011	12:32:32 PM	H2 MFC set to  0.000000
10/30/2011	12:32:32 PM	BCl3 MFC set to  0.000000
10/30/2011	12:32:32 PM	PHl3 MFC set to  0.000000
10/30/2011	12:32:32 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:32:32 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:32:32 PM	Tube furnace set to 0
10/30/2011	12:32:40 PM	Helium valve closed
10/30/2011	12:32:40 PM	H2 valve closed
10/30/2011	12:32:40 PM	BCl3 valve closed
10/30/2011	12:32:40 PM	PH3 valve closed
10/30/2011	12:32:40 PM	SiCl4 pre valve closed
10/30/2011	12:32:40 PM	SiCl4 post valve closed
10/30/2011	12:32:40 PM	Bypass valve closed
10/30/2011	12:32:40 PM	Bubbler valve closed
10/30/2011	12:32:40 PM	Main Vac valve opened
10/30/2011	12:32:40 PM	Helium MFC set to  0.000000
10/30/2011	12:32:40 PM	H2 MFC set to  0.000000
10/30/2011	12:32:40 PM	BCl3 MFC set to  0.000000
10/30/2011	12:32:40 PM	PHl3 MFC set to  0.000000
10/30/2011	12:32:40 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:32:40 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:32:40 PM	Tube furnace set to 0
10/30/2011	12:32:41 PM	Run finished at 12:32 PM
10/30/2011	12:32:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	12:33:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	12:33:28 PM	Recipe started at 12:33 PM
10/30/2011	12:33:28 PM	Helium valve closed
10/30/2011	12:33:28 PM	H2 valve closed
10/30/2011	12:33:28 PM	BCl3 valve closed
10/30/2011	12:33:28 PM	PH3 valve closed
10/30/2011	12:33:28 PM	SiCl4 pre valve closed
10/30/2011	12:33:28 PM	SiCl4 post valve closed
10/30/2011	12:33:28 PM	Main Vac valve closed
10/30/2011	12:33:28 PM	Bypass valve closed
10/30/2011	12:33:28 PM	Bubbler valve closed
10/30/2011	12:33:28 PM	Helium MFC set to  0.000000
10/30/2011	12:33:28 PM	H2 MFC set to  0.000000
10/30/2011	12:33:28 PM	BCl3 MFC set to  0.000000
10/30/2011	12:33:28 PM	PHl3 MFC set to  0.000000
10/30/2011	12:33:28 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:33:28 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:33:28 PM	Tube furnace set to 0
10/30/2011	12:33:31 PM	H2 valve closed
10/30/2011	12:33:31 PM	BCl3 valve closed
10/30/2011	12:33:31 PM	PH3 valve closed
10/30/2011	12:33:31 PM	SiCl4 pre valve closed
10/30/2011	12:33:31 PM	SiCl4 post valve closed
10/30/2011	12:33:31 PM	Main Vac valve closed
10/30/2011	12:33:31 PM	Bypass valve closed
10/30/2011	12:33:31 PM	Bubbler valve closed
10/30/2011	12:33:31 PM	Helium valve opened
10/30/2011	12:33:31 PM	Helium MFC set to  500.000000
10/30/2011	12:33:31 PM	H2 MFC set to  0.000000
10/30/2011	12:33:31 PM	BCl3 MFC set to  0.000000
10/30/2011	12:33:31 PM	PHl3 MFC set to  0.000000
10/30/2011	12:33:31 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:33:31 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:33:32 PM	Tube furnace set to 0
10/30/2011	12:34:19 PM	Helium valve closed
10/30/2011	12:34:19 PM	H2 valve closed
10/30/2011	12:34:19 PM	BCl3 valve closed
10/30/2011	12:34:19 PM	PH3 valve closed
10/30/2011	12:34:19 PM	SiCl4 pre valve closed
10/30/2011	12:34:19 PM	SiCl4 post valve closed
10/30/2011	12:34:19 PM	Main Vac valve closed
10/30/2011	12:34:19 PM	Bypass valve closed
10/30/2011	12:34:19 PM	Bubbler valve closed
10/30/2011	12:34:19 PM	Helium MFC set to  0.000000
10/30/2011	12:34:19 PM	H2 MFC set to  0.000000
10/30/2011	12:34:19 PM	BCl3 MFC set to  0.000000
10/30/2011	12:34:19 PM	PHl3 MFC set to  0.000000
10/30/2011	12:34:19 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:34:19 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:34:19 PM	Tube furnace set to 0
10/30/2011	12:34:20 PM	Run finished at 12:34 PM
10/30/2011	12:34:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	12:34:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	12:34:23 PM	Recipe started at 12:34 PM
10/30/2011	12:34:23 PM	Helium valve closed
10/30/2011	12:34:23 PM	H2 valve closed
10/30/2011	12:34:23 PM	BCl3 valve closed
10/30/2011	12:34:23 PM	PH3 valve closed
10/30/2011	12:34:23 PM	SiCl4 pre valve closed
10/30/2011	12:34:23 PM	SiCl4 post valve closed
10/30/2011	12:34:23 PM	Main Vac valve closed
10/30/2011	12:34:23 PM	Bubbler valve closed
10/30/2011	12:34:23 PM	Bypass valve opened
10/30/2011	12:34:23 PM	Helium MFC set to  0.000000
10/30/2011	12:34:23 PM	H2 MFC set to  0.000000
10/30/2011	12:34:23 PM	BCl3 MFC set to  0.000000
10/30/2011	12:34:23 PM	PHl3 MFC set to  0.000000
10/30/2011	12:34:23 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:34:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:34:23 PM	Tube furnace set to 0
10/30/2011	12:35:17 PM	Helium valve closed
10/30/2011	12:35:17 PM	H2 valve closed
10/30/2011	12:35:17 PM	BCl3 valve closed
10/30/2011	12:35:17 PM	PH3 valve closed
10/30/2011	12:35:17 PM	SiCl4 pre valve closed
10/30/2011	12:35:17 PM	SiCl4 post valve closed
10/30/2011	12:35:17 PM	Main Vac valve closed
10/30/2011	12:35:17 PM	Bubbler valve closed
10/30/2011	12:35:17 PM	Bypass valve opened
10/30/2011	12:35:17 PM	Helium MFC set to  0.000000
10/30/2011	12:35:17 PM	H2 MFC set to  0.000000
10/30/2011	12:35:17 PM	BCl3 MFC set to  0.000000
10/30/2011	12:35:17 PM	PHl3 MFC set to  0.000000
10/30/2011	12:35:17 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:35:17 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:35:17 PM	Tube furnace set to 0
10/30/2011	12:35:23 PM	Helium valve closed
10/30/2011	12:35:23 PM	H2 valve closed
10/30/2011	12:35:23 PM	BCl3 valve closed
10/30/2011	12:35:23 PM	PH3 valve closed
10/30/2011	12:35:23 PM	SiCl4 pre valve closed
10/30/2011	12:35:23 PM	SiCl4 post valve closed
10/30/2011	12:35:23 PM	Bypass valve closed
10/30/2011	12:35:23 PM	Bubbler valve closed
10/30/2011	12:35:23 PM	Main Vac valve opened
10/30/2011	12:35:23 PM	Helium MFC set to  0.000000
10/30/2011	12:35:23 PM	H2 MFC set to  0.000000
10/30/2011	12:35:23 PM	BCl3 MFC set to  0.000000
10/30/2011	12:35:23 PM	PHl3 MFC set to  0.000000
10/30/2011	12:35:23 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:35:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:35:24 PM	Tube furnace set to 0
10/30/2011	12:35:25 PM	Run finished at 12:35 PM
10/30/2011	12:35:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	12:37:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	12:37:33 PM	Recipe started at 12:37 PM
10/30/2011	12:37:33 PM	Helium valve closed
10/30/2011	12:37:33 PM	H2 valve closed
10/30/2011	12:37:33 PM	BCl3 valve closed
10/30/2011	12:37:33 PM	PH3 valve closed
10/30/2011	12:37:33 PM	SiCl4 pre valve closed
10/30/2011	12:37:33 PM	SiCl4 post valve closed
10/30/2011	12:37:33 PM	Main Vac valve closed
10/30/2011	12:37:33 PM	Bubbler valve closed
10/30/2011	12:37:33 PM	Bypass valve opened
10/30/2011	12:37:33 PM	Helium MFC set to  0.000000
10/30/2011	12:37:33 PM	H2 MFC set to  0.000000
10/30/2011	12:37:33 PM	BCl3 MFC set to  0.000000
10/30/2011	12:37:33 PM	PHl3 MFC set to  0.000000
10/30/2011	12:37:33 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:37:33 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:37:33 PM	Tube furnace set to 0
10/30/2011	12:37:33 PM	Helium valve closed
10/30/2011	12:37:33 PM	H2 valve closed
10/30/2011	12:37:33 PM	BCl3 valve closed
10/30/2011	12:37:33 PM	PH3 valve closed
10/30/2011	12:37:33 PM	SiCl4 pre valve closed
10/30/2011	12:37:33 PM	SiCl4 post valve closed
10/30/2011	12:37:33 PM	Main Vac valve closed
10/30/2011	12:37:33 PM	Bubbler valve closed
10/30/2011	12:37:33 PM	Bypass valve opened
10/30/2011	12:37:33 PM	Helium MFC set to  0.000000
10/30/2011	12:37:33 PM	H2 MFC set to  0.000000
10/30/2011	12:37:33 PM	BCl3 MFC set to  0.000000
10/30/2011	12:37:33 PM	PHl3 MFC set to  0.000000
10/30/2011	12:37:33 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:37:33 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:37:34 PM	Tube furnace set to 0
10/30/2011	12:37:34 PM	Helium valve closed
10/30/2011	12:37:34 PM	H2 valve closed
10/30/2011	12:37:34 PM	BCl3 valve closed
10/30/2011	12:37:34 PM	PH3 valve closed
10/30/2011	12:37:34 PM	SiCl4 pre valve closed
10/30/2011	12:37:34 PM	SiCl4 post valve closed
10/30/2011	12:37:34 PM	Bypass valve closed
10/30/2011	12:37:34 PM	Bubbler valve closed
10/30/2011	12:37:34 PM	Main Vac valve opened
10/30/2011	12:37:34 PM	Helium MFC set to  0.000000
10/30/2011	12:37:34 PM	H2 MFC set to  0.000000
10/30/2011	12:37:34 PM	BCl3 MFC set to  0.000000
10/30/2011	12:37:34 PM	PHl3 MFC set to  0.000000
10/30/2011	12:37:34 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:37:34 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:37:34 PM	Tube furnace set to 0
10/30/2011	12:37:34 PM	H2 valve closed
10/30/2011	12:37:34 PM	BCl3 valve closed
10/30/2011	12:37:34 PM	PH3 valve closed
10/30/2011	12:37:34 PM	SiCl4 pre valve closed
10/30/2011	12:37:34 PM	SiCl4 post valve closed
10/30/2011	12:37:34 PM	Bypass valve closed
10/30/2011	12:37:34 PM	Bubbler valve closed
10/30/2011	12:37:34 PM	Helium valve opened
10/30/2011	12:37:34 PM	Main Vac valve opened
10/30/2011	12:37:34 PM	Helium MFC set to  20.000000
10/30/2011	12:37:34 PM	H2 MFC set to  0.000000
10/30/2011	12:37:34 PM	BCl3 MFC set to  0.000000
10/30/2011	12:37:34 PM	PHl3 MFC set to  0.000000
10/30/2011	12:37:35 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:37:35 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:37:35 PM	Tube furnace set to 0
10/30/2011	12:38:05 PM	Helium valve closed
10/30/2011	12:38:05 PM	H2 valve closed
10/30/2011	12:38:05 PM	BCl3 valve closed
10/30/2011	12:38:05 PM	PH3 valve closed
10/30/2011	12:38:05 PM	SiCl4 pre valve closed
10/30/2011	12:38:05 PM	SiCl4 post valve closed
10/30/2011	12:38:05 PM	Bypass valve closed
10/30/2011	12:38:05 PM	Bubbler valve closed
10/30/2011	12:38:05 PM	Main Vac valve opened
10/30/2011	12:38:05 PM	Helium MFC set to  0.000000
10/30/2011	12:38:05 PM	H2 MFC set to  0.000000
10/30/2011	12:38:05 PM	BCl3 MFC set to  0.000000
10/30/2011	12:38:05 PM	PHl3 MFC set to  0.000000
10/30/2011	12:38:05 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:38:05 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:38:05 PM	Tube furnace set to 0
10/30/2011	12:38:35 PM	H2 valve closed
10/30/2011	12:38:35 PM	BCl3 valve closed
10/30/2011	12:38:35 PM	PH3 valve closed
10/30/2011	12:38:35 PM	SiCl4 pre valve closed
10/30/2011	12:38:35 PM	SiCl4 post valve closed
10/30/2011	12:38:35 PM	Bypass valve closed
10/30/2011	12:38:35 PM	Bubbler valve closed
10/30/2011	12:38:35 PM	Helium valve opened
10/30/2011	12:38:35 PM	Main Vac valve opened
10/30/2011	12:38:35 PM	Helium MFC set to  20.000000
10/30/2011	12:38:35 PM	H2 MFC set to  0.000000
10/30/2011	12:38:35 PM	BCl3 MFC set to  0.000000
10/30/2011	12:38:35 PM	PHl3 MFC set to  0.000000
10/30/2011	12:38:35 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:38:35 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:38:35 PM	Tube furnace set to 0
10/30/2011	12:39:05 PM	Helium valve closed
10/30/2011	12:39:05 PM	H2 valve closed
10/30/2011	12:39:05 PM	BCl3 valve closed
10/30/2011	12:39:05 PM	PH3 valve closed
10/30/2011	12:39:05 PM	SiCl4 pre valve closed
10/30/2011	12:39:05 PM	SiCl4 post valve closed
10/30/2011	12:39:05 PM	Bypass valve closed
10/30/2011	12:39:05 PM	Bubbler valve closed
10/30/2011	12:39:05 PM	Main Vac valve opened
10/30/2011	12:39:05 PM	Helium MFC set to  0.000000
10/30/2011	12:39:05 PM	H2 MFC set to  0.000000
10/30/2011	12:39:05 PM	BCl3 MFC set to  0.000000
10/30/2011	12:39:05 PM	PHl3 MFC set to  0.000000
10/30/2011	12:39:05 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:39:05 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:39:05 PM	Tube furnace set to 0
10/30/2011	12:39:35 PM	H2 valve closed
10/30/2011	12:39:35 PM	BCl3 valve closed
10/30/2011	12:39:35 PM	PH3 valve closed
10/30/2011	12:39:35 PM	SiCl4 pre valve closed
10/30/2011	12:39:35 PM	SiCl4 post valve closed
10/30/2011	12:39:35 PM	Bypass valve closed
10/30/2011	12:39:35 PM	Bubbler valve closed
10/30/2011	12:39:35 PM	Helium valve opened
10/30/2011	12:39:35 PM	Main Vac valve opened
10/30/2011	12:39:35 PM	Helium MFC set to  20.000000
10/30/2011	12:39:35 PM	H2 MFC set to  0.000000
10/30/2011	12:39:35 PM	BCl3 MFC set to  0.000000
10/30/2011	12:39:35 PM	PHl3 MFC set to  0.000000
10/30/2011	12:39:35 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:39:35 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:39:35 PM	Tube furnace set to 0
10/30/2011	12:40:05 PM	Helium valve closed
10/30/2011	12:40:05 PM	H2 valve closed
10/30/2011	12:40:05 PM	BCl3 valve closed
10/30/2011	12:40:05 PM	PH3 valve closed
10/30/2011	12:40:05 PM	SiCl4 pre valve closed
10/30/2011	12:40:05 PM	SiCl4 post valve closed
10/30/2011	12:40:05 PM	Bypass valve closed
10/30/2011	12:40:05 PM	Bubbler valve closed
10/30/2011	12:40:05 PM	Main Vac valve opened
10/30/2011	12:40:05 PM	Helium MFC set to  0.000000
10/30/2011	12:40:05 PM	H2 MFC set to  0.000000
10/30/2011	12:40:05 PM	BCl3 MFC set to  0.000000
10/30/2011	12:40:05 PM	PHl3 MFC set to  0.000000
10/30/2011	12:40:05 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:40:05 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:40:06 PM	Tube furnace set to 0
10/30/2011	12:40:36 PM	H2 valve closed
10/30/2011	12:40:36 PM	BCl3 valve closed
10/30/2011	12:40:36 PM	PH3 valve closed
10/30/2011	12:40:36 PM	SiCl4 pre valve closed
10/30/2011	12:40:36 PM	SiCl4 post valve closed
10/30/2011	12:40:36 PM	Bypass valve closed
10/30/2011	12:40:36 PM	Bubbler valve closed
10/30/2011	12:40:36 PM	Helium valve opened
10/30/2011	12:40:36 PM	Main Vac valve opened
10/30/2011	12:40:36 PM	Helium MFC set to  20.000000
10/30/2011	12:40:36 PM	H2 MFC set to  0.000000
10/30/2011	12:40:36 PM	BCl3 MFC set to  0.000000
10/30/2011	12:40:36 PM	PHl3 MFC set to  0.000000
10/30/2011	12:40:36 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:40:36 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:40:36 PM	Tube furnace set to 0
10/30/2011	12:41:06 PM	Helium valve closed
10/30/2011	12:41:06 PM	H2 valve closed
10/30/2011	12:41:06 PM	BCl3 valve closed
10/30/2011	12:41:06 PM	PH3 valve closed
10/30/2011	12:41:06 PM	SiCl4 pre valve closed
10/30/2011	12:41:06 PM	SiCl4 post valve closed
10/30/2011	12:41:06 PM	Bypass valve closed
10/30/2011	12:41:06 PM	Bubbler valve closed
10/30/2011	12:41:06 PM	Main Vac valve opened
10/30/2011	12:41:06 PM	Helium MFC set to  0.000000
10/30/2011	12:41:06 PM	H2 MFC set to  0.000000
10/30/2011	12:41:06 PM	BCl3 MFC set to  0.000000
10/30/2011	12:41:06 PM	PHl3 MFC set to  0.000000
10/30/2011	12:41:06 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:41:06 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:41:06 PM	Tube furnace set to 0
10/30/2011	12:41:36 PM	H2 valve closed
10/30/2011	12:41:36 PM	BCl3 valve closed
10/30/2011	12:41:36 PM	PH3 valve closed
10/30/2011	12:41:36 PM	SiCl4 pre valve closed
10/30/2011	12:41:36 PM	SiCl4 post valve closed
10/30/2011	12:41:36 PM	Bypass valve closed
10/30/2011	12:41:36 PM	Bubbler valve closed
10/30/2011	12:41:36 PM	Helium valve opened
10/30/2011	12:41:36 PM	Main Vac valve opened
10/30/2011	12:41:36 PM	Helium MFC set to  20.000000
10/30/2011	12:41:36 PM	H2 MFC set to  0.000000
10/30/2011	12:41:36 PM	BCl3 MFC set to  0.000000
10/30/2011	12:41:36 PM	PHl3 MFC set to  0.000000
10/30/2011	12:41:36 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:41:36 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:41:36 PM	Tube furnace set to 0
10/30/2011	12:42:06 PM	Helium valve closed
10/30/2011	12:42:06 PM	H2 valve closed
10/30/2011	12:42:06 PM	BCl3 valve closed
10/30/2011	12:42:06 PM	PH3 valve closed
10/30/2011	12:42:06 PM	SiCl4 pre valve closed
10/30/2011	12:42:06 PM	SiCl4 post valve closed
10/30/2011	12:42:06 PM	Bypass valve closed
10/30/2011	12:42:06 PM	Bubbler valve closed
10/30/2011	12:42:06 PM	Main Vac valve opened
10/30/2011	12:42:06 PM	Helium MFC set to  0.000000
10/30/2011	12:42:06 PM	H2 MFC set to  0.000000
10/30/2011	12:42:06 PM	BCl3 MFC set to  0.000000
10/30/2011	12:42:06 PM	PHl3 MFC set to  0.000000
10/30/2011	12:42:06 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:42:06 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:42:06 PM	Tube furnace set to 0
10/30/2011	12:42:36 PM	H2 valve closed
10/30/2011	12:42:36 PM	BCl3 valve closed
10/30/2011	12:42:36 PM	PH3 valve closed
10/30/2011	12:42:36 PM	SiCl4 pre valve closed
10/30/2011	12:42:37 PM	SiCl4 post valve closed
10/30/2011	12:42:37 PM	Bypass valve closed
10/30/2011	12:42:37 PM	Bubbler valve closed
10/30/2011	12:42:37 PM	Helium valve opened
10/30/2011	12:42:37 PM	Main Vac valve opened
10/30/2011	12:42:37 PM	Helium MFC set to  20.000000
10/30/2011	12:42:37 PM	H2 MFC set to  0.000000
10/30/2011	12:42:37 PM	BCl3 MFC set to  0.000000
10/30/2011	12:42:37 PM	PHl3 MFC set to  0.000000
10/30/2011	12:42:37 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:42:37 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:42:37 PM	Tube furnace set to 0
10/30/2011	12:43:07 PM	Helium valve closed
10/30/2011	12:43:07 PM	H2 valve closed
10/30/2011	12:43:07 PM	BCl3 valve closed
10/30/2011	12:43:07 PM	PH3 valve closed
10/30/2011	12:43:07 PM	SiCl4 pre valve closed
10/30/2011	12:43:07 PM	SiCl4 post valve closed
10/30/2011	12:43:07 PM	Bypass valve closed
10/30/2011	12:43:07 PM	Bubbler valve closed
10/30/2011	12:43:07 PM	Main Vac valve opened
10/30/2011	12:43:07 PM	Helium MFC set to  0.000000
10/30/2011	12:43:07 PM	H2 MFC set to  0.000000
10/30/2011	12:43:07 PM	BCl3 MFC set to  0.000000
10/30/2011	12:43:07 PM	PHl3 MFC set to  0.000000
10/30/2011	12:43:07 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:43:07 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:43:07 PM	Tube furnace set to 0
10/30/2011	12:43:37 PM	H2 valve closed
10/30/2011	12:43:37 PM	BCl3 valve closed
10/30/2011	12:43:37 PM	PH3 valve closed
10/30/2011	12:43:37 PM	SiCl4 pre valve closed
10/30/2011	12:43:37 PM	SiCl4 post valve closed
10/30/2011	12:43:37 PM	Bypass valve closed
10/30/2011	12:43:37 PM	Bubbler valve closed
10/30/2011	12:43:37 PM	Helium valve opened
10/30/2011	12:43:37 PM	Main Vac valve opened
10/30/2011	12:43:37 PM	Helium MFC set to  20.000000
10/30/2011	12:43:37 PM	H2 MFC set to  0.000000
10/30/2011	12:43:37 PM	BCl3 MFC set to  0.000000
10/30/2011	12:43:37 PM	PHl3 MFC set to  0.000000
10/30/2011	12:43:37 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:43:37 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:43:37 PM	Tube furnace set to 0
10/30/2011	12:44:07 PM	Helium valve closed
10/30/2011	12:44:07 PM	H2 valve closed
10/30/2011	12:44:07 PM	BCl3 valve closed
10/30/2011	12:44:07 PM	PH3 valve closed
10/30/2011	12:44:07 PM	SiCl4 pre valve closed
10/30/2011	12:44:07 PM	SiCl4 post valve closed
10/30/2011	12:44:07 PM	Bypass valve closed
10/30/2011	12:44:07 PM	Bubbler valve closed
10/30/2011	12:44:07 PM	Main Vac valve opened
10/30/2011	12:44:07 PM	Helium MFC set to  0.000000
10/30/2011	12:44:07 PM	H2 MFC set to  0.000000
10/30/2011	12:44:07 PM	BCl3 MFC set to  0.000000
10/30/2011	12:44:07 PM	PHl3 MFC set to  0.000000
10/30/2011	12:44:07 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:44:07 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:44:07 PM	Tube furnace set to 0
10/30/2011	12:44:37 PM	H2 valve closed
10/30/2011	12:44:37 PM	BCl3 valve closed
10/30/2011	12:44:37 PM	PH3 valve closed
10/30/2011	12:44:37 PM	SiCl4 pre valve closed
10/30/2011	12:44:37 PM	SiCl4 post valve closed
10/30/2011	12:44:37 PM	Bypass valve closed
10/30/2011	12:44:37 PM	Bubbler valve closed
10/30/2011	12:44:37 PM	Helium valve opened
10/30/2011	12:44:37 PM	Main Vac valve opened
10/30/2011	12:44:37 PM	Helium MFC set to  20.000000
10/30/2011	12:44:37 PM	H2 MFC set to  0.000000
10/30/2011	12:44:37 PM	BCl3 MFC set to  0.000000
10/30/2011	12:44:37 PM	PHl3 MFC set to  0.000000
10/30/2011	12:44:37 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:44:37 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:44:38 PM	Tube furnace set to 0
10/30/2011	12:45:08 PM	Helium valve closed
10/30/2011	12:45:08 PM	H2 valve closed
10/30/2011	12:45:08 PM	BCl3 valve closed
10/30/2011	12:45:08 PM	PH3 valve closed
10/30/2011	12:45:08 PM	SiCl4 pre valve closed
10/30/2011	12:45:08 PM	SiCl4 post valve closed
10/30/2011	12:45:08 PM	Bypass valve closed
10/30/2011	12:45:08 PM	Bubbler valve closed
10/30/2011	12:45:08 PM	Main Vac valve opened
10/30/2011	12:45:08 PM	Helium MFC set to  0.000000
10/30/2011	12:45:08 PM	H2 MFC set to  0.000000
10/30/2011	12:45:08 PM	BCl3 MFC set to  0.000000
10/30/2011	12:45:08 PM	PHl3 MFC set to  0.000000
10/30/2011	12:45:08 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:45:08 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:45:08 PM	Tube furnace set to 0
10/30/2011	12:45:38 PM	H2 valve closed
10/30/2011	12:45:38 PM	BCl3 valve closed
10/30/2011	12:45:38 PM	PH3 valve closed
10/30/2011	12:45:38 PM	SiCl4 pre valve closed
10/30/2011	12:45:38 PM	SiCl4 post valve closed
10/30/2011	12:45:38 PM	Bypass valve closed
10/30/2011	12:45:38 PM	Bubbler valve closed
10/30/2011	12:45:38 PM	Helium valve opened
10/30/2011	12:45:38 PM	Main Vac valve opened
10/30/2011	12:45:38 PM	Helium MFC set to  20.000000
10/30/2011	12:45:38 PM	H2 MFC set to  0.000000
10/30/2011	12:45:38 PM	BCl3 MFC set to  0.000000
10/30/2011	12:45:38 PM	PHl3 MFC set to  0.000000
10/30/2011	12:45:38 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:45:38 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:45:38 PM	Tube furnace set to 0
10/30/2011	12:46:08 PM	Helium valve closed
10/30/2011	12:46:08 PM	H2 valve closed
10/30/2011	12:46:08 PM	BCl3 valve closed
10/30/2011	12:46:08 PM	PH3 valve closed
10/30/2011	12:46:08 PM	SiCl4 pre valve closed
10/30/2011	12:46:08 PM	SiCl4 post valve closed
10/30/2011	12:46:08 PM	Bypass valve closed
10/30/2011	12:46:08 PM	Bubbler valve closed
10/30/2011	12:46:08 PM	Main Vac valve opened
10/30/2011	12:46:08 PM	Helium MFC set to  0.000000
10/30/2011	12:46:08 PM	H2 MFC set to  0.000000
10/30/2011	12:46:08 PM	BCl3 MFC set to  0.000000
10/30/2011	12:46:08 PM	PHl3 MFC set to  0.000000
10/30/2011	12:46:08 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:46:08 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:46:08 PM	Tube furnace set to 0
10/30/2011	12:46:38 PM	H2 valve closed
10/30/2011	12:46:38 PM	BCl3 valve closed
10/30/2011	12:46:38 PM	PH3 valve closed
10/30/2011	12:46:38 PM	SiCl4 pre valve closed
10/30/2011	12:46:38 PM	SiCl4 post valve closed
10/30/2011	12:46:38 PM	Bypass valve closed
10/30/2011	12:46:38 PM	Bubbler valve closed
10/30/2011	12:46:38 PM	Helium valve opened
10/30/2011	12:46:38 PM	Main Vac valve opened
10/30/2011	12:46:38 PM	Helium MFC set to  20.000000
10/30/2011	12:46:38 PM	H2 MFC set to  0.000000
10/30/2011	12:46:38 PM	BCl3 MFC set to  0.000000
10/30/2011	12:46:38 PM	PHl3 MFC set to  0.000000
10/30/2011	12:46:38 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:46:38 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:46:38 PM	Tube furnace set to 0
10/30/2011	12:47:08 PM	Helium valve closed
10/30/2011	12:47:08 PM	H2 valve closed
10/30/2011	12:47:08 PM	BCl3 valve closed
10/30/2011	12:47:08 PM	PH3 valve closed
10/30/2011	12:47:08 PM	SiCl4 pre valve closed
10/30/2011	12:47:08 PM	SiCl4 post valve closed
10/30/2011	12:47:08 PM	Bypass valve closed
10/30/2011	12:47:08 PM	Bubbler valve closed
10/30/2011	12:47:08 PM	Main Vac valve opened
10/30/2011	12:47:08 PM	Helium MFC set to  0.000000
10/30/2011	12:47:08 PM	H2 MFC set to  0.000000
10/30/2011	12:47:08 PM	BCl3 MFC set to  0.000000
10/30/2011	12:47:08 PM	PHl3 MFC set to  0.000000
10/30/2011	12:47:08 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:47:08 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:47:09 PM	Tube furnace set to 0
10/30/2011	12:47:10 PM	Run finished at 12:47 PM
10/30/2011	12:47:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	12:49:23 PM	Main Vac valve closed
10/30/2011	12:49:41 PM	Main Vac valve opened
10/30/2011	12:50:50 PM	Recipe started at 12:50 PM
10/30/2011	12:50:50 PM	Helium valve closed
10/30/2011	12:50:50 PM	H2 valve closed
10/30/2011	12:50:50 PM	BCl3 valve closed
10/30/2011	12:50:50 PM	PH3 valve closed
10/30/2011	12:50:50 PM	SiCl4 pre valve closed
10/30/2011	12:50:50 PM	SiCl4 post valve closed
10/30/2011	12:50:50 PM	Main Vac valve closed
10/30/2011	12:50:50 PM	Bypass valve closed
10/30/2011	12:50:50 PM	Bubbler valve closed
10/30/2011	12:50:50 PM	Helium MFC set to  0.000000
10/30/2011	12:50:50 PM	H2 MFC set to  0.000000
10/30/2011	12:50:50 PM	BCl3 MFC set to  0.000000
10/30/2011	12:50:50 PM	PHl3 MFC set to  0.000000
10/30/2011	12:50:50 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:50:50 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:50:50 PM	Tube furnace set to 0
10/30/2011	12:50:53 PM	Helium valve closed
10/30/2011	12:50:53 PM	BCl3 valve closed
10/30/2011	12:50:53 PM	PH3 valve closed
10/30/2011	12:50:53 PM	SiCl4 pre valve closed
10/30/2011	12:50:53 PM	SiCl4 post valve closed
10/30/2011	12:50:53 PM	Main Vac valve closed
10/30/2011	12:50:53 PM	Bypass valve closed
10/30/2011	12:50:53 PM	Bubbler valve closed
10/30/2011	12:50:53 PM	H2 valve opened
10/30/2011	12:50:53 PM	Helium MFC set to  0.000000
10/30/2011	12:50:53 PM	H2 MFC set to  500.000000
10/30/2011	12:50:53 PM	BCl3 MFC set to  0.000000
10/30/2011	12:50:53 PM	PHl3 MFC set to  0.000000
10/30/2011	12:50:53 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:50:53 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:50:54 PM	Tube furnace set to 0
10/30/2011	12:51:59 PM	Helium valve closed
10/30/2011	12:51:59 PM	BCl3 valve closed
10/30/2011	12:51:59 PM	PH3 valve closed
10/30/2011	12:51:59 PM	SiCl4 pre valve closed
10/30/2011	12:51:59 PM	SiCl4 post valve closed
10/30/2011	12:51:59 PM	Main Vac valve closed
10/30/2011	12:51:59 PM	Bypass valve closed
10/30/2011	12:51:59 PM	H2 valve opened
10/30/2011	12:51:59 PM	Bubbler valve opened
10/30/2011	12:51:59 PM	Helium MFC set to  0.000000
10/30/2011	12:51:59 PM	H2 MFC set to  500.000000
10/30/2011	12:51:59 PM	BCl3 MFC set to  0.000000
10/30/2011	12:51:59 PM	PHl3 MFC set to  0.000000
10/30/2011	12:51:59 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:51:59 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:51:59 PM	Tube furnace set to 0
10/30/2011	12:52:00 PM	Helium valve closed
10/30/2011	12:52:00 PM	BCl3 valve closed
10/30/2011	12:52:00 PM	PH3 valve closed
10/30/2011	12:52:00 PM	SiCl4 pre valve closed
10/30/2011	12:52:00 PM	SiCl4 post valve closed
10/30/2011	12:52:00 PM	Main Vac valve closed
10/30/2011	12:52:00 PM	Bypass valve closed
10/30/2011	12:52:00 PM	H2 valve opened
10/30/2011	12:52:00 PM	Bubbler valve opened
10/30/2011	12:52:00 PM	Helium MFC set to  0.000000
10/30/2011	12:52:00 PM	H2 MFC set to  500.000000
10/30/2011	12:52:00 PM	BCl3 MFC set to  0.000000
10/30/2011	12:52:00 PM	PHl3 MFC set to  0.000000
10/30/2011	12:52:00 PM	SiCl4 MFC set to  0.000000
10/30/2011	12:52:00 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	12:52:01 PM	Tube furnace set to 1010
10/30/2011	1:12:00 PM	Helium valve closed
10/30/2011	1:12:00 PM	PH3 valve closed
10/30/2011	1:12:00 PM	Main Vac valve closed
10/30/2011	1:12:00 PM	Bypass valve closed
10/30/2011	1:12:00 PM	H2 valve opened
10/30/2011	1:12:00 PM	BCl3 valve opened
10/30/2011	1:12:00 PM	SiCl4 pre valve opened
10/30/2011	1:12:01 PM	SiCl4 post valve opened
10/30/2011	1:12:01 PM	Bubbler valve opened
10/30/2011	1:12:01 PM	Helium MFC set to  0.000000
10/30/2011	1:12:01 PM	H2 MFC set to  500.000000
10/30/2011	1:12:01 PM	BCl3 MFC set to  2.500000
10/30/2011	1:12:01 PM	PHl3 MFC set to  0.000000
10/30/2011	1:12:01 PM	SiCl4 MFC set to  50.000000
10/30/2011	1:12:01 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:12:01 PM	Tube furnace set to 1010
10/30/2011	1:28:01 PM	Helium valve closed
10/30/2011	1:28:01 PM	BCl3 valve closed
10/30/2011	1:28:01 PM	PH3 valve closed
10/30/2011	1:28:01 PM	SiCl4 pre valve closed
10/30/2011	1:28:01 PM	SiCl4 post valve closed
10/30/2011	1:28:01 PM	Main Vac valve closed
10/30/2011	1:28:01 PM	Bypass valve closed
10/30/2011	1:28:01 PM	H2 valve opened
10/30/2011	1:28:01 PM	Bubbler valve opened
10/30/2011	1:28:01 PM	Helium MFC set to  0.000000
10/30/2011	1:28:01 PM	H2 MFC set to  500.000000
10/30/2011	1:28:01 PM	BCl3 MFC set to  0.000000
10/30/2011	1:28:01 PM	PHl3 MFC set to  0.000000
10/30/2011	1:28:01 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:28:01 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:28:01 PM	Tube furnace set to 750
10/30/2011	1:33:01 PM	H2 valve closed
10/30/2011	1:33:01 PM	BCl3 valve closed
10/30/2011	1:33:01 PM	PH3 valve closed
10/30/2011	1:33:01 PM	SiCl4 pre valve closed
10/30/2011	1:33:01 PM	SiCl4 post valve closed
10/30/2011	1:33:01 PM	Main Vac valve closed
10/30/2011	1:33:01 PM	Bypass valve closed
10/30/2011	1:33:01 PM	Helium valve opened
10/30/2011	1:33:01 PM	Bubbler valve opened
10/30/2011	1:33:01 PM	Helium MFC set to  500.000000
10/30/2011	1:33:01 PM	H2 MFC set to  0.000000
10/30/2011	1:33:01 PM	BCl3 MFC set to  0.000000
10/30/2011	1:33:01 PM	PHl3 MFC set to  0.000000
10/30/2011	1:33:01 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:33:01 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:33:01 PM	Tube furnace set to 0
10/30/2011	1:48:26 PM	Helium valve closed
10/30/2011	1:48:26 PM	H2 valve closed
10/30/2011	1:48:26 PM	BCl3 valve closed
10/30/2011	1:48:26 PM	PH3 valve closed
10/30/2011	1:48:26 PM	SiCl4 pre valve closed
10/30/2011	1:48:26 PM	SiCl4 post valve closed
10/30/2011	1:48:26 PM	Main Vac valve closed
10/30/2011	1:48:26 PM	Bypass valve closed
10/30/2011	1:48:26 PM	Bubbler valve closed
10/30/2011	1:48:26 PM	Helium MFC set to  0.000000
10/30/2011	1:48:26 PM	H2 MFC set to  0.000000
10/30/2011	1:48:26 PM	BCl3 MFC set to  0.000000
10/30/2011	1:48:26 PM	PHl3 MFC set to  0.000000
10/30/2011	1:48:26 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:48:26 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:48:26 PM	Tube furnace set to 0
10/30/2011	1:48:27 PM	Run finished at 1:48 PM
10/30/2011	1:53:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	1:53:51 PM	Recipe started at 1:53 PM
10/30/2011	1:53:51 PM	Helium valve closed
10/30/2011	1:53:51 PM	H2 valve closed
10/30/2011	1:53:51 PM	BCl3 valve closed
10/30/2011	1:53:51 PM	PH3 valve closed
10/30/2011	1:53:51 PM	SiCl4 pre valve closed
10/30/2011	1:53:51 PM	SiCl4 post valve closed
10/30/2011	1:53:51 PM	Main Vac valve closed
10/30/2011	1:53:51 PM	Bubbler valve closed
10/30/2011	1:53:51 PM	Bypass valve opened
10/30/2011	1:53:51 PM	Helium MFC set to  0.000000
10/30/2011	1:53:51 PM	H2 MFC set to  0.000000
10/30/2011	1:53:51 PM	BCl3 MFC set to  0.000000
10/30/2011	1:53:51 PM	PHl3 MFC set to  0.000000
10/30/2011	1:53:51 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:53:51 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:53:51 PM	Tube furnace set to 0
10/30/2011	1:54:56 PM	Helium valve closed
10/30/2011	1:54:56 PM	H2 valve closed
10/30/2011	1:54:56 PM	BCl3 valve closed
10/30/2011	1:54:56 PM	PH3 valve closed
10/30/2011	1:54:56 PM	SiCl4 pre valve closed
10/30/2011	1:54:56 PM	SiCl4 post valve closed
10/30/2011	1:54:56 PM	Main Vac valve closed
10/30/2011	1:54:56 PM	Bubbler valve closed
10/30/2011	1:54:56 PM	Bypass valve opened
10/30/2011	1:54:56 PM	Helium MFC set to  0.000000
10/30/2011	1:54:56 PM	H2 MFC set to  0.000000
10/30/2011	1:54:56 PM	BCl3 MFC set to  0.000000
10/30/2011	1:54:56 PM	PHl3 MFC set to  0.000000
10/30/2011	1:54:56 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:54:56 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:54:56 PM	Tube furnace set to 0
10/30/2011	1:55:04 PM	Helium valve closed
10/30/2011	1:55:04 PM	H2 valve closed
10/30/2011	1:55:04 PM	BCl3 valve closed
10/30/2011	1:55:04 PM	PH3 valve closed
10/30/2011	1:55:04 PM	SiCl4 pre valve closed
10/30/2011	1:55:04 PM	SiCl4 post valve closed
10/30/2011	1:55:04 PM	Bypass valve closed
10/30/2011	1:55:04 PM	Bubbler valve closed
10/30/2011	1:55:04 PM	Main Vac valve opened
10/30/2011	1:55:04 PM	Helium MFC set to  0.000000
10/30/2011	1:55:04 PM	H2 MFC set to  0.000000
10/30/2011	1:55:04 PM	BCl3 MFC set to  0.000000
10/30/2011	1:55:04 PM	PHl3 MFC set to  0.000000
10/30/2011	1:55:04 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:55:04 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:55:04 PM	Tube furnace set to 0
10/30/2011	1:55:05 PM	Run finished at 1:55 PM
10/30/2011	1:55:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	1:56:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	1:56:18 PM	Recipe started at 1:56 PM
10/30/2011	1:56:19 PM	Helium valve closed
10/30/2011	1:56:19 PM	H2 valve closed
10/30/2011	1:56:19 PM	BCl3 valve closed
10/30/2011	1:56:19 PM	PH3 valve closed
10/30/2011	1:56:19 PM	SiCl4 pre valve closed
10/30/2011	1:56:19 PM	SiCl4 post valve closed
10/30/2011	1:56:19 PM	Main Vac valve closed
10/30/2011	1:56:19 PM	Bypass valve closed
10/30/2011	1:56:19 PM	Bubbler valve closed
10/30/2011	1:56:19 PM	Helium MFC set to  0.000000
10/30/2011	1:56:19 PM	H2 MFC set to  0.000000
10/30/2011	1:56:19 PM	BCl3 MFC set to  0.000000
10/30/2011	1:56:19 PM	PHl3 MFC set to  0.000000
10/30/2011	1:56:19 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:56:19 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:56:19 PM	Tube furnace set to 0
10/30/2011	1:56:22 PM	H2 valve closed
10/30/2011	1:56:22 PM	BCl3 valve closed
10/30/2011	1:56:22 PM	PH3 valve closed
10/30/2011	1:56:22 PM	SiCl4 pre valve closed
10/30/2011	1:56:22 PM	SiCl4 post valve closed
10/30/2011	1:56:22 PM	Main Vac valve closed
10/30/2011	1:56:22 PM	Bypass valve closed
10/30/2011	1:56:22 PM	Bubbler valve closed
10/30/2011	1:56:22 PM	Helium valve opened
10/30/2011	1:56:22 PM	Helium MFC set to  500.000000
10/30/2011	1:56:22 PM	H2 MFC set to  0.000000
10/30/2011	1:56:22 PM	BCl3 MFC set to  0.000000
10/30/2011	1:56:22 PM	PHl3 MFC set to  0.000000
10/30/2011	1:56:22 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:56:22 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:56:22 PM	Tube furnace set to 0
10/30/2011	1:57:08 PM	Helium valve closed
10/30/2011	1:57:08 PM	H2 valve closed
10/30/2011	1:57:08 PM	BCl3 valve closed
10/30/2011	1:57:08 PM	PH3 valve closed
10/30/2011	1:57:08 PM	SiCl4 pre valve closed
10/30/2011	1:57:08 PM	SiCl4 post valve closed
10/30/2011	1:57:08 PM	Main Vac valve closed
10/30/2011	1:57:08 PM	Bypass valve closed
10/30/2011	1:57:08 PM	Bubbler valve closed
10/30/2011	1:57:08 PM	Helium MFC set to  0.000000
10/30/2011	1:57:08 PM	H2 MFC set to  0.000000
10/30/2011	1:57:08 PM	BCl3 MFC set to  0.000000
10/30/2011	1:57:08 PM	PHl3 MFC set to  0.000000
10/30/2011	1:57:08 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:57:08 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:57:08 PM	Tube furnace set to 0
10/30/2011	1:57:09 PM	Run finished at 1:57 PM
10/30/2011	1:57:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	1:57:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	1:57:11 PM	Recipe started at 1:57 PM
10/30/2011	1:57:11 PM	Helium valve closed
10/30/2011	1:57:11 PM	H2 valve closed
10/30/2011	1:57:11 PM	BCl3 valve closed
10/30/2011	1:57:11 PM	PH3 valve closed
10/30/2011	1:57:11 PM	SiCl4 pre valve closed
10/30/2011	1:57:11 PM	SiCl4 post valve closed
10/30/2011	1:57:11 PM	Main Vac valve closed
10/30/2011	1:57:11 PM	Bubbler valve closed
10/30/2011	1:57:11 PM	Bypass valve opened
10/30/2011	1:57:12 PM	Helium MFC set to  0.000000
10/30/2011	1:57:12 PM	H2 MFC set to  0.000000
10/30/2011	1:57:12 PM	BCl3 MFC set to  0.000000
10/30/2011	1:57:12 PM	PHl3 MFC set to  0.000000
10/30/2011	1:57:12 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:57:12 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:57:12 PM	Tube furnace set to 0
10/30/2011	1:58:04 PM	Helium valve closed
10/30/2011	1:58:04 PM	H2 valve closed
10/30/2011	1:58:04 PM	BCl3 valve closed
10/30/2011	1:58:04 PM	PH3 valve closed
10/30/2011	1:58:04 PM	SiCl4 pre valve closed
10/30/2011	1:58:04 PM	SiCl4 post valve closed
10/30/2011	1:58:04 PM	Main Vac valve closed
10/30/2011	1:58:04 PM	Bubbler valve closed
10/30/2011	1:58:04 PM	Bypass valve opened
10/30/2011	1:58:04 PM	Helium MFC set to  0.000000
10/30/2011	1:58:04 PM	H2 MFC set to  0.000000
10/30/2011	1:58:04 PM	BCl3 MFC set to  0.000000
10/30/2011	1:58:04 PM	PHl3 MFC set to  0.000000
10/30/2011	1:58:04 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:58:04 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:58:04 PM	Tube furnace set to 0
10/30/2011	1:58:24 PM	Helium valve closed
10/30/2011	1:58:24 PM	H2 valve closed
10/30/2011	1:58:24 PM	BCl3 valve closed
10/30/2011	1:58:24 PM	PH3 valve closed
10/30/2011	1:58:24 PM	SiCl4 pre valve closed
10/30/2011	1:58:24 PM	SiCl4 post valve closed
10/30/2011	1:58:24 PM	Bypass valve closed
10/30/2011	1:58:24 PM	Bubbler valve closed
10/30/2011	1:58:24 PM	Main Vac valve opened
10/30/2011	1:58:24 PM	Helium MFC set to  0.000000
10/30/2011	1:58:24 PM	H2 MFC set to  0.000000
10/30/2011	1:58:24 PM	BCl3 MFC set to  0.000000
10/30/2011	1:58:24 PM	PHl3 MFC set to  0.000000
10/30/2011	1:58:24 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:58:24 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:58:24 PM	Tube furnace set to 0
10/30/2011	1:58:25 PM	Run finished at 1:58 PM
10/30/2011	1:58:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	1:59:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	1:59:46 PM	Recipe started at 1:59 PM
10/30/2011	1:59:46 PM	Helium valve closed
10/30/2011	1:59:46 PM	H2 valve closed
10/30/2011	1:59:46 PM	BCl3 valve closed
10/30/2011	1:59:46 PM	PH3 valve closed
10/30/2011	1:59:46 PM	SiCl4 pre valve closed
10/30/2011	1:59:46 PM	SiCl4 post valve closed
10/30/2011	1:59:46 PM	Main Vac valve closed
10/30/2011	1:59:46 PM	Bypass valve closed
10/30/2011	1:59:46 PM	Bubbler valve closed
10/30/2011	1:59:46 PM	Helium MFC set to  0.000000
10/30/2011	1:59:46 PM	H2 MFC set to  0.000000
10/30/2011	1:59:46 PM	BCl3 MFC set to  0.000000
10/30/2011	1:59:46 PM	PHl3 MFC set to  0.000000
10/30/2011	1:59:46 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:59:46 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:59:47 PM	Tube furnace set to 0
10/30/2011	1:59:50 PM	H2 valve closed
10/30/2011	1:59:50 PM	BCl3 valve closed
10/30/2011	1:59:50 PM	PH3 valve closed
10/30/2011	1:59:50 PM	SiCl4 pre valve closed
10/30/2011	1:59:50 PM	SiCl4 post valve closed
10/30/2011	1:59:50 PM	Main Vac valve closed
10/30/2011	1:59:50 PM	Bypass valve closed
10/30/2011	1:59:50 PM	Bubbler valve closed
10/30/2011	1:59:50 PM	Helium valve opened
10/30/2011	1:59:50 PM	Helium MFC set to  500.000000
10/30/2011	1:59:50 PM	H2 MFC set to  0.000000
10/30/2011	1:59:50 PM	BCl3 MFC set to  0.000000
10/30/2011	1:59:50 PM	PHl3 MFC set to  0.000000
10/30/2011	1:59:50 PM	SiCl4 MFC set to  0.000000
10/30/2011	1:59:50 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	1:59:50 PM	Tube furnace set to 0
10/30/2011	2:00:37 PM	Helium valve closed
10/30/2011	2:00:37 PM	H2 valve closed
10/30/2011	2:00:37 PM	BCl3 valve closed
10/30/2011	2:00:37 PM	PH3 valve closed
10/30/2011	2:00:37 PM	SiCl4 pre valve closed
10/30/2011	2:00:37 PM	SiCl4 post valve closed
10/30/2011	2:00:37 PM	Main Vac valve closed
10/30/2011	2:00:37 PM	Bypass valve closed
10/30/2011	2:00:37 PM	Bubbler valve closed
10/30/2011	2:00:37 PM	Helium MFC set to  0.000000
10/30/2011	2:00:37 PM	H2 MFC set to  0.000000
10/30/2011	2:00:37 PM	BCl3 MFC set to  0.000000
10/30/2011	2:00:37 PM	PHl3 MFC set to  0.000000
10/30/2011	2:00:37 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:00:37 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:00:37 PM	Tube furnace set to 0
10/30/2011	2:00:38 PM	Run finished at 2:00 PM
10/30/2011	2:00:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	2:00:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	2:00:41 PM	Recipe started at 2:00 PM
10/30/2011	2:00:41 PM	Helium valve closed
10/30/2011	2:00:41 PM	H2 valve closed
10/30/2011	2:00:41 PM	BCl3 valve closed
10/30/2011	2:00:41 PM	PH3 valve closed
10/30/2011	2:00:41 PM	SiCl4 pre valve closed
10/30/2011	2:00:41 PM	SiCl4 post valve closed
10/30/2011	2:00:41 PM	Main Vac valve closed
10/30/2011	2:00:41 PM	Bubbler valve closed
10/30/2011	2:00:41 PM	Bypass valve opened
10/30/2011	2:00:41 PM	Helium MFC set to  0.000000
10/30/2011	2:00:41 PM	H2 MFC set to  0.000000
10/30/2011	2:00:41 PM	BCl3 MFC set to  0.000000
10/30/2011	2:00:41 PM	PHl3 MFC set to  0.000000
10/30/2011	2:00:41 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:00:41 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:00:41 PM	Tube furnace set to 0
10/30/2011	2:01:34 PM	Helium valve closed
10/30/2011	2:01:34 PM	H2 valve closed
10/30/2011	2:01:34 PM	BCl3 valve closed
10/30/2011	2:01:34 PM	PH3 valve closed
10/30/2011	2:01:34 PM	SiCl4 pre valve closed
10/30/2011	2:01:34 PM	SiCl4 post valve closed
10/30/2011	2:01:34 PM	Main Vac valve closed
10/30/2011	2:01:34 PM	Bubbler valve closed
10/30/2011	2:01:34 PM	Bypass valve opened
10/30/2011	2:01:34 PM	Helium MFC set to  0.000000
10/30/2011	2:01:34 PM	H2 MFC set to  0.000000
10/30/2011	2:01:34 PM	BCl3 MFC set to  0.000000
10/30/2011	2:01:34 PM	PHl3 MFC set to  0.000000
10/30/2011	2:01:34 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:01:34 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:01:34 PM	Tube furnace set to 0
10/30/2011	2:01:44 PM	Helium valve closed
10/30/2011	2:01:44 PM	H2 valve closed
10/30/2011	2:01:44 PM	BCl3 valve closed
10/30/2011	2:01:44 PM	PH3 valve closed
10/30/2011	2:01:44 PM	SiCl4 pre valve closed
10/30/2011	2:01:44 PM	SiCl4 post valve closed
10/30/2011	2:01:44 PM	Bypass valve closed
10/30/2011	2:01:44 PM	Bubbler valve closed
10/30/2011	2:01:44 PM	Main Vac valve opened
10/30/2011	2:01:44 PM	Helium MFC set to  0.000000
10/30/2011	2:01:44 PM	H2 MFC set to  0.000000
10/30/2011	2:01:44 PM	BCl3 MFC set to  0.000000
10/30/2011	2:01:44 PM	PHl3 MFC set to  0.000000
10/30/2011	2:01:44 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:01:44 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:01:44 PM	Tube furnace set to 0
10/30/2011	2:01:45 PM	Run finished at 2:01 PM
10/30/2011	2:01:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	2:03:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	2:03:45 PM	Recipe started at 2:03 PM
10/30/2011	2:03:45 PM	Helium valve closed
10/30/2011	2:03:45 PM	H2 valve closed
10/30/2011	2:03:45 PM	BCl3 valve closed
10/30/2011	2:03:45 PM	PH3 valve closed
10/30/2011	2:03:45 PM	SiCl4 pre valve closed
10/30/2011	2:03:45 PM	SiCl4 post valve closed
10/30/2011	2:03:45 PM	Main Vac valve closed
10/30/2011	2:03:45 PM	Bubbler valve closed
10/30/2011	2:03:45 PM	Bypass valve opened
10/30/2011	2:03:45 PM	Helium MFC set to  0.000000
10/30/2011	2:03:45 PM	H2 MFC set to  0.000000
10/30/2011	2:03:45 PM	BCl3 MFC set to  0.000000
10/30/2011	2:03:45 PM	PHl3 MFC set to  0.000000
10/30/2011	2:03:45 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:03:45 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:03:46 PM	Tube furnace set to 0
10/30/2011	2:03:46 PM	Helium valve closed
10/30/2011	2:03:46 PM	H2 valve closed
10/30/2011	2:03:46 PM	BCl3 valve closed
10/30/2011	2:03:46 PM	PH3 valve closed
10/30/2011	2:03:46 PM	SiCl4 pre valve closed
10/30/2011	2:03:46 PM	SiCl4 post valve closed
10/30/2011	2:03:46 PM	Main Vac valve closed
10/30/2011	2:03:46 PM	Bubbler valve closed
10/30/2011	2:03:46 PM	Bypass valve opened
10/30/2011	2:03:46 PM	Helium MFC set to  0.000000
10/30/2011	2:03:46 PM	H2 MFC set to  0.000000
10/30/2011	2:03:46 PM	BCl3 MFC set to  0.000000
10/30/2011	2:03:46 PM	PHl3 MFC set to  0.000000
10/30/2011	2:03:46 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:03:46 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:03:46 PM	Tube furnace set to 0
10/30/2011	2:03:47 PM	Helium valve closed
10/30/2011	2:03:47 PM	H2 valve closed
10/30/2011	2:03:47 PM	BCl3 valve closed
10/30/2011	2:03:47 PM	PH3 valve closed
10/30/2011	2:03:47 PM	SiCl4 pre valve closed
10/30/2011	2:03:47 PM	SiCl4 post valve closed
10/30/2011	2:03:47 PM	Bypass valve closed
10/30/2011	2:03:47 PM	Bubbler valve closed
10/30/2011	2:03:47 PM	Main Vac valve opened
10/30/2011	2:03:47 PM	Helium MFC set to  0.000000
10/30/2011	2:03:47 PM	H2 MFC set to  0.000000
10/30/2011	2:03:47 PM	BCl3 MFC set to  0.000000
10/30/2011	2:03:47 PM	PHl3 MFC set to  0.000000
10/30/2011	2:03:47 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:03:47 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:03:47 PM	Tube furnace set to 0
10/30/2011	2:03:53 PM	H2 valve closed
10/30/2011	2:03:53 PM	BCl3 valve closed
10/30/2011	2:03:53 PM	PH3 valve closed
10/30/2011	2:03:53 PM	SiCl4 pre valve closed
10/30/2011	2:03:53 PM	SiCl4 post valve closed
10/30/2011	2:03:53 PM	Bypass valve closed
10/30/2011	2:03:53 PM	Bubbler valve closed
10/30/2011	2:03:53 PM	Helium valve opened
10/30/2011	2:03:53 PM	Main Vac valve opened
10/30/2011	2:03:53 PM	Helium MFC set to  20.000000
10/30/2011	2:03:53 PM	H2 MFC set to  0.000000
10/30/2011	2:03:53 PM	BCl3 MFC set to  0.000000
10/30/2011	2:03:53 PM	PHl3 MFC set to  0.000000
10/30/2011	2:03:53 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:03:53 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:03:53 PM	Tube furnace set to 0
10/30/2011	2:04:23 PM	Helium valve closed
10/30/2011	2:04:23 PM	H2 valve closed
10/30/2011	2:04:23 PM	BCl3 valve closed
10/30/2011	2:04:23 PM	PH3 valve closed
10/30/2011	2:04:23 PM	SiCl4 pre valve closed
10/30/2011	2:04:23 PM	SiCl4 post valve closed
10/30/2011	2:04:23 PM	Bypass valve closed
10/30/2011	2:04:23 PM	Bubbler valve closed
10/30/2011	2:04:23 PM	Main Vac valve opened
10/30/2011	2:04:23 PM	Helium MFC set to  0.000000
10/30/2011	2:04:23 PM	H2 MFC set to  0.000000
10/30/2011	2:04:23 PM	BCl3 MFC set to  0.000000
10/30/2011	2:04:23 PM	PHl3 MFC set to  0.000000
10/30/2011	2:04:23 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:04:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:04:23 PM	Tube furnace set to 0
10/30/2011	2:04:53 PM	H2 valve closed
10/30/2011	2:04:53 PM	BCl3 valve closed
10/30/2011	2:04:53 PM	PH3 valve closed
10/30/2011	2:04:53 PM	SiCl4 pre valve closed
10/30/2011	2:04:53 PM	SiCl4 post valve closed
10/30/2011	2:04:53 PM	Bypass valve closed
10/30/2011	2:04:53 PM	Bubbler valve closed
10/30/2011	2:04:53 PM	Helium valve opened
10/30/2011	2:04:53 PM	Main Vac valve opened
10/30/2011	2:04:53 PM	Helium MFC set to  20.000000
10/30/2011	2:04:53 PM	H2 MFC set to  0.000000
10/30/2011	2:04:53 PM	BCl3 MFC set to  0.000000
10/30/2011	2:04:53 PM	PHl3 MFC set to  0.000000
10/30/2011	2:04:53 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:04:53 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:04:53 PM	Tube furnace set to 0
10/30/2011	2:05:23 PM	Helium valve closed
10/30/2011	2:05:23 PM	H2 valve closed
10/30/2011	2:05:23 PM	BCl3 valve closed
10/30/2011	2:05:23 PM	PH3 valve closed
10/30/2011	2:05:23 PM	SiCl4 pre valve closed
10/30/2011	2:05:23 PM	SiCl4 post valve closed
10/30/2011	2:05:23 PM	Bypass valve closed
10/30/2011	2:05:23 PM	Bubbler valve closed
10/30/2011	2:05:23 PM	Main Vac valve opened
10/30/2011	2:05:23 PM	Helium MFC set to  0.000000
10/30/2011	2:05:23 PM	H2 MFC set to  0.000000
10/30/2011	2:05:23 PM	BCl3 MFC set to  0.000000
10/30/2011	2:05:23 PM	PHl3 MFC set to  0.000000
10/30/2011	2:05:23 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:05:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:05:24 PM	Tube furnace set to 0
10/30/2011	2:05:54 PM	H2 valve closed
10/30/2011	2:05:54 PM	BCl3 valve closed
10/30/2011	2:05:54 PM	PH3 valve closed
10/30/2011	2:05:54 PM	SiCl4 pre valve closed
10/30/2011	2:05:54 PM	SiCl4 post valve closed
10/30/2011	2:05:54 PM	Bypass valve closed
10/30/2011	2:05:54 PM	Bubbler valve closed
10/30/2011	2:05:54 PM	Helium valve opened
10/30/2011	2:05:54 PM	Main Vac valve opened
10/30/2011	2:05:54 PM	Helium MFC set to  20.000000
10/30/2011	2:05:54 PM	H2 MFC set to  0.000000
10/30/2011	2:05:54 PM	BCl3 MFC set to  0.000000
10/30/2011	2:05:54 PM	PHl3 MFC set to  0.000000
10/30/2011	2:05:54 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:05:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:05:54 PM	Tube furnace set to 0
10/30/2011	2:06:24 PM	Helium valve closed
10/30/2011	2:06:24 PM	H2 valve closed
10/30/2011	2:06:24 PM	BCl3 valve closed
10/30/2011	2:06:24 PM	PH3 valve closed
10/30/2011	2:06:24 PM	SiCl4 pre valve closed
10/30/2011	2:06:24 PM	SiCl4 post valve closed
10/30/2011	2:06:24 PM	Bypass valve closed
10/30/2011	2:06:24 PM	Bubbler valve closed
10/30/2011	2:06:24 PM	Main Vac valve opened
10/30/2011	2:06:24 PM	Helium MFC set to  0.000000
10/30/2011	2:06:24 PM	H2 MFC set to  0.000000
10/30/2011	2:06:24 PM	BCl3 MFC set to  0.000000
10/30/2011	2:06:24 PM	PHl3 MFC set to  0.000000
10/30/2011	2:06:24 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:06:24 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:06:24 PM	Tube furnace set to 0
10/30/2011	2:06:54 PM	H2 valve closed
10/30/2011	2:06:54 PM	BCl3 valve closed
10/30/2011	2:06:54 PM	PH3 valve closed
10/30/2011	2:06:54 PM	SiCl4 pre valve closed
10/30/2011	2:06:54 PM	SiCl4 post valve closed
10/30/2011	2:06:54 PM	Bypass valve closed
10/30/2011	2:06:54 PM	Bubbler valve closed
10/30/2011	2:06:54 PM	Helium valve opened
10/30/2011	2:06:54 PM	Main Vac valve opened
10/30/2011	2:06:54 PM	Helium MFC set to  20.000000
10/30/2011	2:06:54 PM	H2 MFC set to  0.000000
10/30/2011	2:06:54 PM	BCl3 MFC set to  0.000000
10/30/2011	2:06:54 PM	PHl3 MFC set to  0.000000
10/30/2011	2:06:54 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:06:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:06:54 PM	Tube furnace set to 0
10/30/2011	2:07:24 PM	Helium valve closed
10/30/2011	2:07:24 PM	H2 valve closed
10/30/2011	2:07:24 PM	BCl3 valve closed
10/30/2011	2:07:24 PM	PH3 valve closed
10/30/2011	2:07:24 PM	SiCl4 pre valve closed
10/30/2011	2:07:24 PM	SiCl4 post valve closed
10/30/2011	2:07:24 PM	Bypass valve closed
10/30/2011	2:07:24 PM	Bubbler valve closed
10/30/2011	2:07:24 PM	Main Vac valve opened
10/30/2011	2:07:24 PM	Helium MFC set to  0.000000
10/30/2011	2:07:24 PM	H2 MFC set to  0.000000
10/30/2011	2:07:24 PM	BCl3 MFC set to  0.000000
10/30/2011	2:07:24 PM	PHl3 MFC set to  0.000000
10/30/2011	2:07:24 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:07:24 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:07:24 PM	Tube furnace set to 0
10/30/2011	2:07:54 PM	H2 valve closed
10/30/2011	2:07:54 PM	BCl3 valve closed
10/30/2011	2:07:54 PM	PH3 valve closed
10/30/2011	2:07:54 PM	SiCl4 pre valve closed
10/30/2011	2:07:54 PM	SiCl4 post valve closed
10/30/2011	2:07:54 PM	Bypass valve closed
10/30/2011	2:07:54 PM	Bubbler valve closed
10/30/2011	2:07:54 PM	Helium valve opened
10/30/2011	2:07:54 PM	Main Vac valve opened
10/30/2011	2:07:54 PM	Helium MFC set to  20.000000
10/30/2011	2:07:54 PM	H2 MFC set to  0.000000
10/30/2011	2:07:54 PM	BCl3 MFC set to  0.000000
10/30/2011	2:07:54 PM	PHl3 MFC set to  0.000000
10/30/2011	2:07:54 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:07:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:07:55 PM	Tube furnace set to 0
10/30/2011	2:08:25 PM	Helium valve closed
10/30/2011	2:08:25 PM	H2 valve closed
10/30/2011	2:08:25 PM	BCl3 valve closed
10/30/2011	2:08:25 PM	PH3 valve closed
10/30/2011	2:08:25 PM	SiCl4 pre valve closed
10/30/2011	2:08:25 PM	SiCl4 post valve closed
10/30/2011	2:08:25 PM	Bypass valve closed
10/30/2011	2:08:25 PM	Bubbler valve closed
10/30/2011	2:08:25 PM	Main Vac valve opened
10/30/2011	2:08:25 PM	Helium MFC set to  0.000000
10/30/2011	2:08:25 PM	H2 MFC set to  0.000000
10/30/2011	2:08:25 PM	BCl3 MFC set to  0.000000
10/30/2011	2:08:25 PM	PHl3 MFC set to  0.000000
10/30/2011	2:08:25 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:08:25 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:08:25 PM	Tube furnace set to 0
10/30/2011	2:08:55 PM	H2 valve closed
10/30/2011	2:08:55 PM	BCl3 valve closed
10/30/2011	2:08:55 PM	PH3 valve closed
10/30/2011	2:08:55 PM	SiCl4 pre valve closed
10/30/2011	2:08:55 PM	SiCl4 post valve closed
10/30/2011	2:08:55 PM	Bypass valve closed
10/30/2011	2:08:55 PM	Bubbler valve closed
10/30/2011	2:08:55 PM	Helium valve opened
10/30/2011	2:08:55 PM	Main Vac valve opened
10/30/2011	2:08:55 PM	Helium MFC set to  20.000000
10/30/2011	2:08:55 PM	H2 MFC set to  0.000000
10/30/2011	2:08:55 PM	BCl3 MFC set to  0.000000
10/30/2011	2:08:55 PM	PHl3 MFC set to  0.000000
10/30/2011	2:08:55 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:08:55 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:08:55 PM	Tube furnace set to 0
10/30/2011	2:09:25 PM	Helium valve closed
10/30/2011	2:09:25 PM	H2 valve closed
10/30/2011	2:09:25 PM	BCl3 valve closed
10/30/2011	2:09:25 PM	PH3 valve closed
10/30/2011	2:09:25 PM	SiCl4 pre valve closed
10/30/2011	2:09:25 PM	SiCl4 post valve closed
10/30/2011	2:09:25 PM	Bypass valve closed
10/30/2011	2:09:25 PM	Bubbler valve closed
10/30/2011	2:09:25 PM	Main Vac valve opened
10/30/2011	2:09:25 PM	Helium MFC set to  0.000000
10/30/2011	2:09:25 PM	H2 MFC set to  0.000000
10/30/2011	2:09:25 PM	BCl3 MFC set to  0.000000
10/30/2011	2:09:25 PM	PHl3 MFC set to  0.000000
10/30/2011	2:09:25 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:09:25 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:09:25 PM	Tube furnace set to 0
10/30/2011	2:09:55 PM	H2 valve closed
10/30/2011	2:09:55 PM	BCl3 valve closed
10/30/2011	2:09:55 PM	PH3 valve closed
10/30/2011	2:09:55 PM	SiCl4 pre valve closed
10/30/2011	2:09:55 PM	SiCl4 post valve closed
10/30/2011	2:09:55 PM	Bypass valve closed
10/30/2011	2:09:55 PM	Bubbler valve closed
10/30/2011	2:09:55 PM	Helium valve opened
10/30/2011	2:09:55 PM	Main Vac valve opened
10/30/2011	2:09:55 PM	Helium MFC set to  20.000000
10/30/2011	2:09:55 PM	H2 MFC set to  0.000000
10/30/2011	2:09:55 PM	BCl3 MFC set to  0.000000
10/30/2011	2:09:55 PM	PHl3 MFC set to  0.000000
10/30/2011	2:09:55 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:09:55 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:09:55 PM	Tube furnace set to 0
10/30/2011	2:10:25 PM	Helium valve closed
10/30/2011	2:10:25 PM	H2 valve closed
10/30/2011	2:10:25 PM	BCl3 valve closed
10/30/2011	2:10:25 PM	PH3 valve closed
10/30/2011	2:10:25 PM	SiCl4 pre valve closed
10/30/2011	2:10:25 PM	SiCl4 post valve closed
10/30/2011	2:10:25 PM	Bypass valve closed
10/30/2011	2:10:25 PM	Bubbler valve closed
10/30/2011	2:10:25 PM	Main Vac valve opened
10/30/2011	2:10:25 PM	Helium MFC set to  0.000000
10/30/2011	2:10:25 PM	H2 MFC set to  0.000000
10/30/2011	2:10:25 PM	BCl3 MFC set to  0.000000
10/30/2011	2:10:25 PM	PHl3 MFC set to  0.000000
10/30/2011	2:10:25 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:10:25 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:10:26 PM	Tube furnace set to 0
10/30/2011	2:10:56 PM	H2 valve closed
10/30/2011	2:10:56 PM	BCl3 valve closed
10/30/2011	2:10:56 PM	PH3 valve closed
10/30/2011	2:10:56 PM	SiCl4 pre valve closed
10/30/2011	2:10:56 PM	SiCl4 post valve closed
10/30/2011	2:10:56 PM	Bypass valve closed
10/30/2011	2:10:56 PM	Bubbler valve closed
10/30/2011	2:10:56 PM	Helium valve opened
10/30/2011	2:10:56 PM	Main Vac valve opened
10/30/2011	2:10:56 PM	Helium MFC set to  20.000000
10/30/2011	2:10:56 PM	H2 MFC set to  0.000000
10/30/2011	2:10:56 PM	BCl3 MFC set to  0.000000
10/30/2011	2:10:56 PM	PHl3 MFC set to  0.000000
10/30/2011	2:10:56 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:10:56 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:10:56 PM	Tube furnace set to 0
10/30/2011	2:11:26 PM	Helium valve closed
10/30/2011	2:11:26 PM	H2 valve closed
10/30/2011	2:11:26 PM	BCl3 valve closed
10/30/2011	2:11:26 PM	PH3 valve closed
10/30/2011	2:11:26 PM	SiCl4 pre valve closed
10/30/2011	2:11:26 PM	SiCl4 post valve closed
10/30/2011	2:11:26 PM	Bypass valve closed
10/30/2011	2:11:26 PM	Bubbler valve closed
10/30/2011	2:11:26 PM	Main Vac valve opened
10/30/2011	2:11:26 PM	Helium MFC set to  0.000000
10/30/2011	2:11:26 PM	H2 MFC set to  0.000000
10/30/2011	2:11:26 PM	BCl3 MFC set to  0.000000
10/30/2011	2:11:26 PM	PHl3 MFC set to  0.000000
10/30/2011	2:11:26 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:11:26 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:11:26 PM	Tube furnace set to 0
10/30/2011	2:11:56 PM	H2 valve closed
10/30/2011	2:11:56 PM	BCl3 valve closed
10/30/2011	2:11:56 PM	PH3 valve closed
10/30/2011	2:11:56 PM	SiCl4 pre valve closed
10/30/2011	2:11:56 PM	SiCl4 post valve closed
10/30/2011	2:11:56 PM	Bypass valve closed
10/30/2011	2:11:56 PM	Bubbler valve closed
10/30/2011	2:11:56 PM	Helium valve opened
10/30/2011	2:11:56 PM	Main Vac valve opened
10/30/2011	2:11:56 PM	Helium MFC set to  20.000000
10/30/2011	2:11:56 PM	H2 MFC set to  0.000000
10/30/2011	2:11:56 PM	BCl3 MFC set to  0.000000
10/30/2011	2:11:56 PM	PHl3 MFC set to  0.000000
10/30/2011	2:11:56 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:11:56 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:11:56 PM	Tube furnace set to 0
10/30/2011	2:12:26 PM	Helium valve closed
10/30/2011	2:12:26 PM	H2 valve closed
10/30/2011	2:12:26 PM	BCl3 valve closed
10/30/2011	2:12:26 PM	PH3 valve closed
10/30/2011	2:12:26 PM	SiCl4 pre valve closed
10/30/2011	2:12:26 PM	SiCl4 post valve closed
10/30/2011	2:12:26 PM	Bypass valve closed
10/30/2011	2:12:26 PM	Bubbler valve closed
10/30/2011	2:12:26 PM	Main Vac valve opened
10/30/2011	2:12:26 PM	Helium MFC set to  0.000000
10/30/2011	2:12:26 PM	H2 MFC set to  0.000000
10/30/2011	2:12:26 PM	BCl3 MFC set to  0.000000
10/30/2011	2:12:26 PM	PHl3 MFC set to  0.000000
10/30/2011	2:12:26 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:12:26 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:12:26 PM	Tube furnace set to 0
10/30/2011	2:12:56 PM	H2 valve closed
10/30/2011	2:12:56 PM	BCl3 valve closed
10/30/2011	2:12:56 PM	PH3 valve closed
10/30/2011	2:12:56 PM	SiCl4 pre valve closed
10/30/2011	2:12:56 PM	SiCl4 post valve closed
10/30/2011	2:12:56 PM	Bypass valve closed
10/30/2011	2:12:56 PM	Bubbler valve closed
10/30/2011	2:12:56 PM	Helium valve opened
10/30/2011	2:12:56 PM	Main Vac valve opened
10/30/2011	2:12:56 PM	Helium MFC set to  20.000000
10/30/2011	2:12:56 PM	H2 MFC set to  0.000000
10/30/2011	2:12:56 PM	BCl3 MFC set to  0.000000
10/30/2011	2:12:56 PM	PHl3 MFC set to  0.000000
10/30/2011	2:12:56 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:12:56 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:12:57 PM	Tube furnace set to 0
10/30/2011	2:13:27 PM	Helium valve closed
10/30/2011	2:13:27 PM	H2 valve closed
10/30/2011	2:13:27 PM	BCl3 valve closed
10/30/2011	2:13:27 PM	PH3 valve closed
10/30/2011	2:13:27 PM	SiCl4 pre valve closed
10/30/2011	2:13:27 PM	SiCl4 post valve closed
10/30/2011	2:13:27 PM	Bypass valve closed
10/30/2011	2:13:27 PM	Bubbler valve closed
10/30/2011	2:13:27 PM	Main Vac valve opened
10/30/2011	2:13:27 PM	Helium MFC set to  0.000000
10/30/2011	2:13:27 PM	H2 MFC set to  0.000000
10/30/2011	2:13:27 PM	BCl3 MFC set to  0.000000
10/30/2011	2:13:27 PM	PHl3 MFC set to  0.000000
10/30/2011	2:13:27 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:13:27 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:13:27 PM	Tube furnace set to 0
10/30/2011	2:13:28 PM	Run finished at 2:13 PM
10/30/2011	2:13:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	2:16:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/30/2011	2:16:25 PM	Recipe started at 2:16 PM
10/30/2011	2:16:25 PM	Helium valve closed
10/30/2011	2:16:25 PM	H2 valve closed
10/30/2011	2:16:25 PM	BCl3 valve closed
10/30/2011	2:16:25 PM	PH3 valve closed
10/30/2011	2:16:25 PM	SiCl4 pre valve closed
10/30/2011	2:16:25 PM	SiCl4 post valve closed
10/30/2011	2:16:25 PM	Main Vac valve closed
10/30/2011	2:16:25 PM	Bypass valve closed
10/30/2011	2:16:25 PM	Bubbler valve closed
10/30/2011	2:16:25 PM	Helium MFC set to  0.000000
10/30/2011	2:16:25 PM	H2 MFC set to  0.000000
10/30/2011	2:16:25 PM	BCl3 MFC set to  0.000000
10/30/2011	2:16:25 PM	PHl3 MFC set to  0.000000
10/30/2011	2:16:25 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:16:25 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:16:25 PM	Tube furnace set to 0
10/30/2011	2:16:25 PM	Run finished at 2:16 PM
10/30/2011	2:16:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/30/2011	2:16:31 PM	Main Vac valve opened
10/30/2011	2:16:56 PM	Main Vac valve closed
10/30/2011	2:17:18 PM	Main Vac valve opened
10/30/2011	2:18:15 PM	Recipe started at 2:18 PM
10/30/2011	2:18:15 PM	Helium valve closed
10/30/2011	2:18:15 PM	H2 valve closed
10/30/2011	2:18:15 PM	BCl3 valve closed
10/30/2011	2:18:15 PM	PH3 valve closed
10/30/2011	2:18:15 PM	SiCl4 pre valve closed
10/30/2011	2:18:15 PM	SiCl4 post valve closed
10/30/2011	2:18:15 PM	Main Vac valve closed
10/30/2011	2:18:15 PM	Bypass valve closed
10/30/2011	2:18:15 PM	Bubbler valve closed
10/30/2011	2:18:15 PM	Helium MFC set to  0.000000
10/30/2011	2:18:15 PM	H2 MFC set to  0.000000
10/30/2011	2:18:15 PM	BCl3 MFC set to  0.000000
10/30/2011	2:18:15 PM	PHl3 MFC set to  0.000000
10/30/2011	2:18:15 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:18:15 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:18:15 PM	Tube furnace set to 0
10/30/2011	2:18:18 PM	Helium valve closed
10/30/2011	2:18:18 PM	BCl3 valve closed
10/30/2011	2:18:18 PM	PH3 valve closed
10/30/2011	2:18:18 PM	SiCl4 pre valve closed
10/30/2011	2:18:18 PM	SiCl4 post valve closed
10/30/2011	2:18:18 PM	Main Vac valve closed
10/30/2011	2:18:18 PM	Bypass valve closed
10/30/2011	2:18:18 PM	Bubbler valve closed
10/30/2011	2:18:18 PM	H2 valve opened
10/30/2011	2:18:18 PM	Helium MFC set to  0.000000
10/30/2011	2:18:18 PM	H2 MFC set to  500.000000
10/30/2011	2:18:18 PM	BCl3 MFC set to  0.000000
10/30/2011	2:18:18 PM	PHl3 MFC set to  0.000000
10/30/2011	2:18:18 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:18:18 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:18:18 PM	Tube furnace set to 0
10/30/2011	2:19:26 PM	Helium valve closed
10/30/2011	2:19:26 PM	BCl3 valve closed
10/30/2011	2:19:26 PM	PH3 valve closed
10/30/2011	2:19:26 PM	SiCl4 pre valve closed
10/30/2011	2:19:26 PM	SiCl4 post valve closed
10/30/2011	2:19:26 PM	Main Vac valve closed
10/30/2011	2:19:26 PM	Bypass valve closed
10/30/2011	2:19:26 PM	H2 valve opened
10/30/2011	2:19:26 PM	Bubbler valve opened
10/30/2011	2:19:26 PM	Helium MFC set to  0.000000
10/30/2011	2:19:26 PM	H2 MFC set to  500.000000
10/30/2011	2:19:26 PM	BCl3 MFC set to  0.000000
10/30/2011	2:19:26 PM	PHl3 MFC set to  0.000000
10/30/2011	2:19:26 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:19:26 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:19:26 PM	Tube furnace set to 0
10/30/2011	2:19:27 PM	Helium valve closed
10/30/2011	2:19:27 PM	BCl3 valve closed
10/30/2011	2:19:27 PM	PH3 valve closed
10/30/2011	2:19:27 PM	SiCl4 pre valve closed
10/30/2011	2:19:27 PM	SiCl4 post valve closed
10/30/2011	2:19:27 PM	Main Vac valve closed
10/30/2011	2:19:27 PM	Bypass valve closed
10/30/2011	2:19:27 PM	H2 valve opened
10/30/2011	2:19:27 PM	Bubbler valve opened
10/30/2011	2:19:27 PM	Helium MFC set to  0.000000
10/30/2011	2:19:27 PM	H2 MFC set to  500.000000
10/30/2011	2:19:27 PM	BCl3 MFC set to  0.000000
10/30/2011	2:19:27 PM	PHl3 MFC set to  0.000000
10/30/2011	2:19:27 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:19:27 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:19:27 PM	Tube furnace set to 1030
10/30/2011	2:39:27 PM	Helium valve closed
10/30/2011	2:39:27 PM	PH3 valve closed
10/30/2011	2:39:27 PM	Main Vac valve closed
10/30/2011	2:39:27 PM	Bypass valve closed
10/30/2011	2:39:27 PM	H2 valve opened
10/30/2011	2:39:27 PM	BCl3 valve opened
10/30/2011	2:39:27 PM	SiCl4 pre valve opened
10/30/2011	2:39:27 PM	SiCl4 post valve opened
10/30/2011	2:39:27 PM	Bubbler valve opened
10/30/2011	2:39:27 PM	Helium MFC set to  0.000000
10/30/2011	2:39:27 PM	H2 MFC set to  500.000000
10/30/2011	2:39:27 PM	BCl3 MFC set to  2.500000
10/30/2011	2:39:27 PM	PHl3 MFC set to  0.000000
10/30/2011	2:39:27 PM	SiCl4 MFC set to  50.000000
10/30/2011	2:39:27 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:39:28 PM	Tube furnace set to 1030
10/30/2011	2:45:41 PM	Helium valve closed
10/30/2011	2:45:41 PM	BCl3 valve closed
10/30/2011	2:45:41 PM	PH3 valve closed
10/30/2011	2:45:41 PM	SiCl4 pre valve closed
10/30/2011	2:45:41 PM	SiCl4 post valve closed
10/30/2011	2:45:41 PM	Main Vac valve closed
10/30/2011	2:45:41 PM	Bypass valve closed
10/30/2011	2:45:41 PM	H2 valve opened
10/30/2011	2:45:41 PM	Bubbler valve opened
10/30/2011	2:45:41 PM	Helium MFC set to  0.000000
10/30/2011	2:45:41 PM	H2 MFC set to  500.000000
10/30/2011	2:45:41 PM	BCl3 MFC set to  0.000000
10/30/2011	2:45:41 PM	PHl3 MFC set to  0.000000
10/30/2011	2:45:41 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:45:41 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:45:41 PM	Tube furnace set to 750
10/30/2011	2:46:50 PM	H2 valve closed
10/30/2011	2:46:50 PM	BCl3 valve closed
10/30/2011	2:46:50 PM	PH3 valve closed
10/30/2011	2:46:50 PM	SiCl4 pre valve closed
10/30/2011	2:46:50 PM	SiCl4 post valve closed
10/30/2011	2:46:50 PM	Main Vac valve closed
10/30/2011	2:46:50 PM	Bypass valve closed
10/30/2011	2:46:50 PM	Helium valve opened
10/30/2011	2:46:50 PM	Bubbler valve opened
10/30/2011	2:46:50 PM	Helium MFC set to  500.000000
10/30/2011	2:46:50 PM	H2 MFC set to  0.000000
10/30/2011	2:46:50 PM	BCl3 MFC set to  0.000000
10/30/2011	2:46:50 PM	PHl3 MFC set to  0.000000
10/30/2011	2:46:50 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:46:50 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:46:50 PM	Tube furnace set to 0
10/30/2011	2:48:38 PM	Helium valve closed
10/30/2011	2:48:38 PM	H2 valve closed
10/30/2011	2:48:38 PM	BCl3 valve closed
10/30/2011	2:48:38 PM	PH3 valve closed
10/30/2011	2:48:38 PM	SiCl4 pre valve closed
10/30/2011	2:48:38 PM	SiCl4 post valve closed
10/30/2011	2:48:38 PM	Main Vac valve closed
10/30/2011	2:48:38 PM	Bypass valve closed
10/30/2011	2:48:38 PM	Bubbler valve closed
10/30/2011	2:48:38 PM	Helium MFC set to  0.000000
10/30/2011	2:48:38 PM	H2 MFC set to  0.000000
10/30/2011	2:48:38 PM	BCl3 MFC set to  0.000000
10/30/2011	2:48:38 PM	PHl3 MFC set to  0.000000
10/30/2011	2:48:38 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:48:38 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:48:38 PM	Tube furnace set to 0
10/30/2011	2:48:39 PM	Run finished at 2:48 PM
10/30/2011	2:48:49 PM	Recipe started at 2:48 PM
10/30/2011	2:48:49 PM	Helium valve closed
10/30/2011	2:48:49 PM	H2 valve closed
10/30/2011	2:48:49 PM	BCl3 valve closed
10/30/2011	2:48:49 PM	PH3 valve closed
10/30/2011	2:48:49 PM	SiCl4 pre valve closed
10/30/2011	2:48:49 PM	SiCl4 post valve closed
10/30/2011	2:48:49 PM	Main Vac valve closed
10/30/2011	2:48:49 PM	Bypass valve closed
10/30/2011	2:48:49 PM	Bubbler valve closed
10/30/2011	2:48:49 PM	Helium MFC set to  0.000000
10/30/2011	2:48:49 PM	H2 MFC set to  0.000000
10/30/2011	2:48:49 PM	BCl3 MFC set to  0.000000
10/30/2011	2:48:49 PM	PHl3 MFC set to  0.000000
10/30/2011	2:48:49 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:48:49 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:48:49 PM	Tube furnace set to 0
10/30/2011	2:48:52 PM	Helium valve closed
10/30/2011	2:48:52 PM	BCl3 valve closed
10/30/2011	2:48:52 PM	PH3 valve closed
10/30/2011	2:48:52 PM	SiCl4 pre valve closed
10/30/2011	2:48:52 PM	SiCl4 post valve closed
10/30/2011	2:48:52 PM	Main Vac valve closed
10/30/2011	2:48:52 PM	Bypass valve closed
10/30/2011	2:48:52 PM	Bubbler valve closed
10/30/2011	2:48:52 PM	H2 valve opened
10/30/2011	2:48:52 PM	Helium MFC set to  0.000000
10/30/2011	2:48:52 PM	H2 MFC set to  500.000000
10/30/2011	2:48:52 PM	BCl3 MFC set to  0.000000
10/30/2011	2:48:52 PM	PHl3 MFC set to  0.000000
10/30/2011	2:48:52 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:48:52 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:48:53 PM	Tube furnace set to 0
10/30/2011	2:48:54 PM	Helium valve closed
10/30/2011	2:48:54 PM	BCl3 valve closed
10/30/2011	2:48:54 PM	PH3 valve closed
10/30/2011	2:48:54 PM	SiCl4 pre valve closed
10/30/2011	2:48:54 PM	SiCl4 post valve closed
10/30/2011	2:48:54 PM	Main Vac valve closed
10/30/2011	2:48:54 PM	Bypass valve closed
10/30/2011	2:48:54 PM	H2 valve opened
10/30/2011	2:48:54 PM	Bubbler valve opened
10/30/2011	2:48:54 PM	Helium MFC set to  0.000000
10/30/2011	2:48:54 PM	H2 MFC set to  500.000000
10/30/2011	2:48:54 PM	BCl3 MFC set to  0.000000
10/30/2011	2:48:54 PM	PHl3 MFC set to  0.000000
10/30/2011	2:48:54 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:48:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:48:54 PM	Tube furnace set to 0
10/30/2011	2:48:55 PM	Helium valve closed
10/30/2011	2:48:55 PM	BCl3 valve closed
10/30/2011	2:48:55 PM	PH3 valve closed
10/30/2011	2:48:55 PM	SiCl4 pre valve closed
10/30/2011	2:48:55 PM	SiCl4 post valve closed
10/30/2011	2:48:55 PM	Main Vac valve closed
10/30/2011	2:48:55 PM	Bypass valve closed
10/30/2011	2:48:55 PM	H2 valve opened
10/30/2011	2:48:55 PM	Bubbler valve opened
10/30/2011	2:48:55 PM	Helium MFC set to  0.000000
10/30/2011	2:48:55 PM	H2 MFC set to  500.000000
10/30/2011	2:48:55 PM	BCl3 MFC set to  0.000000
10/30/2011	2:48:55 PM	PHl3 MFC set to  0.000000
10/30/2011	2:48:55 PM	SiCl4 MFC set to  0.000000
10/30/2011	2:48:55 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	2:48:55 PM	Tube furnace set to 1030
10/30/2011	3:08:55 PM	Helium valve closed
10/30/2011	3:08:55 PM	PH3 valve closed
10/30/2011	3:08:55 PM	Main Vac valve closed
10/30/2011	3:08:55 PM	Bypass valve closed
10/30/2011	3:08:55 PM	H2 valve opened
10/30/2011	3:08:55 PM	BCl3 valve opened
10/30/2011	3:08:55 PM	SiCl4 pre valve opened
10/30/2011	3:08:55 PM	SiCl4 post valve opened
10/30/2011	3:08:55 PM	Bubbler valve opened
10/30/2011	3:08:55 PM	Helium MFC set to  0.000000
10/30/2011	3:08:55 PM	H2 MFC set to  500.000000
10/30/2011	3:08:55 PM	BCl3 MFC set to  2.500000
10/30/2011	3:08:55 PM	PHl3 MFC set to  0.000000
10/30/2011	3:08:55 PM	SiCl4 MFC set to  50.000000
10/30/2011	3:08:55 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:08:55 PM	Tube furnace set to 1030
10/30/2011	3:24:55 PM	Helium valve closed
10/30/2011	3:24:55 PM	BCl3 valve closed
10/30/2011	3:24:55 PM	PH3 valve closed
10/30/2011	3:24:55 PM	SiCl4 pre valve closed
10/30/2011	3:24:55 PM	SiCl4 post valve closed
10/30/2011	3:24:55 PM	Main Vac valve closed
10/30/2011	3:24:55 PM	Bypass valve closed
10/30/2011	3:24:55 PM	H2 valve opened
10/30/2011	3:24:55 PM	Bubbler valve opened
10/30/2011	3:24:55 PM	Helium MFC set to  0.000000
10/30/2011	3:24:55 PM	H2 MFC set to  500.000000
10/30/2011	3:24:55 PM	BCl3 MFC set to  0.000000
10/30/2011	3:24:55 PM	PHl3 MFC set to  0.000000
10/30/2011	3:24:55 PM	SiCl4 MFC set to  0.000000
10/30/2011	3:24:55 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:24:56 PM	Tube furnace set to 750
10/30/2011	3:29:56 PM	H2 valve closed
10/30/2011	3:29:56 PM	BCl3 valve closed
10/30/2011	3:29:56 PM	PH3 valve closed
10/30/2011	3:29:56 PM	SiCl4 pre valve closed
10/30/2011	3:29:56 PM	SiCl4 post valve closed
10/30/2011	3:29:56 PM	Main Vac valve closed
10/30/2011	3:29:56 PM	Bypass valve closed
10/30/2011	3:29:56 PM	Helium valve opened
10/30/2011	3:29:56 PM	Bubbler valve opened
10/30/2011	3:29:56 PM	Helium MFC set to  500.000000
10/30/2011	3:29:56 PM	H2 MFC set to  0.000000
10/30/2011	3:29:56 PM	BCl3 MFC set to  0.000000
10/30/2011	3:29:56 PM	PHl3 MFC set to  0.000000
10/30/2011	3:29:56 PM	SiCl4 MFC set to  0.000000
10/30/2011	3:29:56 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:29:56 PM	Tube furnace set to 0
10/30/2011	3:46:31 PM	Helium valve closed
10/30/2011	3:46:31 PM	H2 valve closed
10/30/2011	3:46:31 PM	BCl3 valve closed
10/30/2011	3:46:31 PM	PH3 valve closed
10/30/2011	3:46:31 PM	SiCl4 pre valve closed
10/30/2011	3:46:31 PM	SiCl4 post valve closed
10/30/2011	3:46:31 PM	Main Vac valve closed
10/30/2011	3:46:31 PM	Bypass valve closed
10/30/2011	3:46:31 PM	Bubbler valve closed
10/30/2011	3:46:31 PM	Helium MFC set to  0.000000
10/30/2011	3:46:31 PM	H2 MFC set to  0.000000
10/30/2011	3:46:31 PM	BCl3 MFC set to  0.000000
10/30/2011	3:46:31 PM	PHl3 MFC set to  0.000000
10/30/2011	3:46:31 PM	SiCl4 MFC set to  0.000000
10/30/2011	3:46:31 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:46:31 PM	Tube furnace set to 0
10/30/2011	3:46:32 PM	Run finished at 3:46 PM
10/30/2011	3:57:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	3:57:38 PM	Recipe started at 3:57 PM
10/30/2011	3:57:38 PM	Helium valve closed
10/30/2011	3:57:38 PM	H2 valve closed
10/30/2011	3:57:38 PM	BCl3 valve closed
10/30/2011	3:57:38 PM	PH3 valve closed
10/30/2011	3:57:38 PM	SiCl4 pre valve closed
10/30/2011	3:57:38 PM	SiCl4 post valve closed
10/30/2011	3:57:38 PM	Main Vac valve closed
10/30/2011	3:57:38 PM	Bubbler valve closed
10/30/2011	3:57:38 PM	Bypass valve opened
10/30/2011	3:57:38 PM	Helium MFC set to  0.000000
10/30/2011	3:57:38 PM	H2 MFC set to  0.000000
10/30/2011	3:57:38 PM	BCl3 MFC set to  0.000000
10/30/2011	3:57:38 PM	PHl3 MFC set to  0.000000
10/30/2011	3:57:38 PM	SiCl4 MFC set to  0.000000
10/30/2011	3:57:38 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:57:38 PM	Tube furnace set to 0
10/30/2011	3:58:46 PM	Helium valve closed
10/30/2011	3:58:46 PM	H2 valve closed
10/30/2011	3:58:46 PM	BCl3 valve closed
10/30/2011	3:58:46 PM	PH3 valve closed
10/30/2011	3:58:46 PM	SiCl4 pre valve closed
10/30/2011	3:58:46 PM	SiCl4 post valve closed
10/30/2011	3:58:46 PM	Main Vac valve closed
10/30/2011	3:58:46 PM	Bubbler valve closed
10/30/2011	3:58:46 PM	Bypass valve opened
10/30/2011	3:58:46 PM	Helium MFC set to  0.000000
10/30/2011	3:58:46 PM	H2 MFC set to  0.000000
10/30/2011	3:58:46 PM	BCl3 MFC set to  0.000000
10/30/2011	3:58:46 PM	PHl3 MFC set to  0.000000
10/30/2011	3:58:46 PM	SiCl4 MFC set to  0.000000
10/30/2011	3:58:46 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:58:46 PM	Tube furnace set to 0
10/30/2011	3:58:52 PM	Helium valve closed
10/30/2011	3:58:52 PM	H2 valve closed
10/30/2011	3:58:52 PM	BCl3 valve closed
10/30/2011	3:58:52 PM	PH3 valve closed
10/30/2011	3:58:52 PM	SiCl4 pre valve closed
10/30/2011	3:58:52 PM	SiCl4 post valve closed
10/30/2011	3:58:52 PM	Bypass valve closed
10/30/2011	3:58:52 PM	Bubbler valve closed
10/30/2011	3:58:52 PM	Main Vac valve opened
10/30/2011	3:58:52 PM	Helium MFC set to  0.000000
10/30/2011	3:58:52 PM	H2 MFC set to  0.000000
10/30/2011	3:58:52 PM	BCl3 MFC set to  0.000000
10/30/2011	3:58:52 PM	PHl3 MFC set to  0.000000
10/30/2011	3:58:52 PM	SiCl4 MFC set to  0.000000
10/30/2011	3:58:52 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:58:52 PM	Tube furnace set to 0
10/30/2011	3:58:53 PM	Run finished at 3:58 PM
10/30/2011	3:58:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	3:59:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	3:59:31 PM	Recipe started at 3:59 PM
10/30/2011	3:59:31 PM	Helium valve closed
10/30/2011	3:59:31 PM	H2 valve closed
10/30/2011	3:59:31 PM	BCl3 valve closed
10/30/2011	3:59:31 PM	PH3 valve closed
10/30/2011	3:59:31 PM	SiCl4 pre valve closed
10/30/2011	3:59:31 PM	SiCl4 post valve closed
10/30/2011	3:59:31 PM	Main Vac valve closed
10/30/2011	3:59:31 PM	Bypass valve closed
10/30/2011	3:59:31 PM	Bubbler valve closed
10/30/2011	3:59:31 PM	Helium MFC set to  0.000000
10/30/2011	3:59:31 PM	H2 MFC set to  0.000000
10/30/2011	3:59:31 PM	BCl3 MFC set to  0.000000
10/30/2011	3:59:31 PM	PHl3 MFC set to  0.000000
10/30/2011	3:59:31 PM	SiCl4 MFC set to  0.000000
10/30/2011	3:59:31 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:59:31 PM	Tube furnace set to 0
10/30/2011	3:59:34 PM	H2 valve closed
10/30/2011	3:59:34 PM	BCl3 valve closed
10/30/2011	3:59:34 PM	PH3 valve closed
10/30/2011	3:59:34 PM	SiCl4 pre valve closed
10/30/2011	3:59:34 PM	SiCl4 post valve closed
10/30/2011	3:59:34 PM	Main Vac valve closed
10/30/2011	3:59:34 PM	Bypass valve closed
10/30/2011	3:59:34 PM	Bubbler valve closed
10/30/2011	3:59:34 PM	Helium valve opened
10/30/2011	3:59:34 PM	Helium MFC set to  500.000000
10/30/2011	3:59:34 PM	H2 MFC set to  0.000000
10/30/2011	3:59:34 PM	BCl3 MFC set to  0.000000
10/30/2011	3:59:34 PM	PHl3 MFC set to  0.000000
10/30/2011	3:59:34 PM	SiCl4 MFC set to  0.000000
10/30/2011	3:59:34 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	3:59:34 PM	Tube furnace set to 0
10/30/2011	4:00:18 PM	Helium valve closed
10/30/2011	4:00:18 PM	H2 valve closed
10/30/2011	4:00:18 PM	BCl3 valve closed
10/30/2011	4:00:18 PM	PH3 valve closed
10/30/2011	4:00:18 PM	SiCl4 pre valve closed
10/30/2011	4:00:18 PM	SiCl4 post valve closed
10/30/2011	4:00:18 PM	Main Vac valve closed
10/30/2011	4:00:18 PM	Bypass valve closed
10/30/2011	4:00:18 PM	Bubbler valve closed
10/30/2011	4:00:18 PM	Helium MFC set to  0.000000
10/30/2011	4:00:18 PM	H2 MFC set to  0.000000
10/30/2011	4:00:18 PM	BCl3 MFC set to  0.000000
10/30/2011	4:00:18 PM	PHl3 MFC set to  0.000000
10/30/2011	4:00:18 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:00:18 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:00:18 PM	Tube furnace set to 0
10/30/2011	4:00:19 PM	Run finished at 4:00 PM
10/30/2011	4:00:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	4:00:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	4:00:22 PM	Recipe started at 4:00 PM
10/30/2011	4:00:22 PM	Helium valve closed
10/30/2011	4:00:22 PM	H2 valve closed
10/30/2011	4:00:22 PM	BCl3 valve closed
10/30/2011	4:00:22 PM	PH3 valve closed
10/30/2011	4:00:22 PM	SiCl4 pre valve closed
10/30/2011	4:00:22 PM	SiCl4 post valve closed
10/30/2011	4:00:22 PM	Main Vac valve closed
10/30/2011	4:00:22 PM	Bubbler valve closed
10/30/2011	4:00:22 PM	Bypass valve opened
10/30/2011	4:00:22 PM	Helium MFC set to  0.000000
10/30/2011	4:00:22 PM	H2 MFC set to  0.000000
10/30/2011	4:00:22 PM	BCl3 MFC set to  0.000000
10/30/2011	4:00:22 PM	PHl3 MFC set to  0.000000
10/30/2011	4:00:22 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:00:22 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:00:22 PM	Tube furnace set to 0
10/30/2011	4:01:16 PM	Helium valve closed
10/30/2011	4:01:16 PM	H2 valve closed
10/30/2011	4:01:16 PM	BCl3 valve closed
10/30/2011	4:01:16 PM	PH3 valve closed
10/30/2011	4:01:16 PM	SiCl4 pre valve closed
10/30/2011	4:01:16 PM	SiCl4 post valve closed
10/30/2011	4:01:16 PM	Main Vac valve closed
10/30/2011	4:01:16 PM	Bubbler valve closed
10/30/2011	4:01:16 PM	Bypass valve opened
10/30/2011	4:01:16 PM	Helium MFC set to  0.000000
10/30/2011	4:01:16 PM	H2 MFC set to  0.000000
10/30/2011	4:01:16 PM	BCl3 MFC set to  0.000000
10/30/2011	4:01:16 PM	PHl3 MFC set to  0.000000
10/30/2011	4:01:16 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:01:16 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:01:16 PM	Tube furnace set to 0
10/30/2011	4:01:20 PM	Helium valve closed
10/30/2011	4:01:20 PM	H2 valve closed
10/30/2011	4:01:20 PM	BCl3 valve closed
10/30/2011	4:01:20 PM	PH3 valve closed
10/30/2011	4:01:20 PM	SiCl4 pre valve closed
10/30/2011	4:01:20 PM	SiCl4 post valve closed
10/30/2011	4:01:20 PM	Bypass valve closed
10/30/2011	4:01:20 PM	Bubbler valve closed
10/30/2011	4:01:20 PM	Main Vac valve opened
10/30/2011	4:01:20 PM	Helium MFC set to  0.000000
10/30/2011	4:01:20 PM	H2 MFC set to  0.000000
10/30/2011	4:01:20 PM	BCl3 MFC set to  0.000000
10/30/2011	4:01:20 PM	PHl3 MFC set to  0.000000
10/30/2011	4:01:20 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:01:20 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:01:20 PM	Tube furnace set to 0
10/30/2011	4:01:21 PM	Run finished at 4:01 PM
10/30/2011	4:01:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	4:02:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	4:02:05 PM	Recipe started at 4:02 PM
10/30/2011	4:02:05 PM	Helium valve closed
10/30/2011	4:02:05 PM	H2 valve closed
10/30/2011	4:02:05 PM	BCl3 valve closed
10/30/2011	4:02:05 PM	PH3 valve closed
10/30/2011	4:02:05 PM	SiCl4 pre valve closed
10/30/2011	4:02:05 PM	SiCl4 post valve closed
10/30/2011	4:02:05 PM	Main Vac valve closed
10/30/2011	4:02:05 PM	Bypass valve closed
10/30/2011	4:02:05 PM	Bubbler valve closed
10/30/2011	4:02:05 PM	Helium MFC set to  0.000000
10/30/2011	4:02:05 PM	H2 MFC set to  0.000000
10/30/2011	4:02:05 PM	BCl3 MFC set to  0.000000
10/30/2011	4:02:05 PM	PHl3 MFC set to  0.000000
10/30/2011	4:02:05 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:02:05 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:02:05 PM	Tube furnace set to 0
10/30/2011	4:02:08 PM	H2 valve closed
10/30/2011	4:02:08 PM	BCl3 valve closed
10/30/2011	4:02:08 PM	PH3 valve closed
10/30/2011	4:02:08 PM	SiCl4 pre valve closed
10/30/2011	4:02:08 PM	SiCl4 post valve closed
10/30/2011	4:02:08 PM	Main Vac valve closed
10/30/2011	4:02:08 PM	Bypass valve closed
10/30/2011	4:02:08 PM	Bubbler valve closed
10/30/2011	4:02:08 PM	Helium valve opened
10/30/2011	4:02:08 PM	Helium MFC set to  500.000000
10/30/2011	4:02:08 PM	H2 MFC set to  0.000000
10/30/2011	4:02:08 PM	BCl3 MFC set to  0.000000
10/30/2011	4:02:08 PM	PHl3 MFC set to  0.000000
10/30/2011	4:02:08 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:02:08 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:02:08 PM	Tube furnace set to 0
10/30/2011	4:02:51 PM	Helium valve closed
10/30/2011	4:02:51 PM	H2 valve closed
10/30/2011	4:02:51 PM	BCl3 valve closed
10/30/2011	4:02:51 PM	PH3 valve closed
10/30/2011	4:02:51 PM	SiCl4 pre valve closed
10/30/2011	4:02:51 PM	SiCl4 post valve closed
10/30/2011	4:02:51 PM	Main Vac valve closed
10/30/2011	4:02:51 PM	Bypass valve closed
10/30/2011	4:02:51 PM	Bubbler valve closed
10/30/2011	4:02:51 PM	Helium MFC set to  0.000000
10/30/2011	4:02:51 PM	H2 MFC set to  0.000000
10/30/2011	4:02:51 PM	BCl3 MFC set to  0.000000
10/30/2011	4:02:51 PM	PHl3 MFC set to  0.000000
10/30/2011	4:02:51 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:02:51 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:02:52 PM	Tube furnace set to 0
10/30/2011	4:02:53 PM	Run finished at 4:02 PM
10/30/2011	4:02:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2011	4:02:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	4:02:56 PM	Recipe started at 4:02 PM
10/30/2011	4:02:56 PM	Helium valve closed
10/30/2011	4:02:56 PM	H2 valve closed
10/30/2011	4:02:56 PM	BCl3 valve closed
10/30/2011	4:02:56 PM	PH3 valve closed
10/30/2011	4:02:56 PM	SiCl4 pre valve closed
10/30/2011	4:02:56 PM	SiCl4 post valve closed
10/30/2011	4:02:56 PM	Main Vac valve closed
10/30/2011	4:02:56 PM	Bubbler valve closed
10/30/2011	4:02:56 PM	Bypass valve opened
10/30/2011	4:02:56 PM	Helium MFC set to  0.000000
10/30/2011	4:02:56 PM	H2 MFC set to  0.000000
10/30/2011	4:02:56 PM	BCl3 MFC set to  0.000000
10/30/2011	4:02:56 PM	PHl3 MFC set to  0.000000
10/30/2011	4:02:56 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:02:56 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:02:56 PM	Tube furnace set to 0
10/30/2011	4:03:50 PM	Helium valve closed
10/30/2011	4:03:50 PM	H2 valve closed
10/30/2011	4:03:50 PM	BCl3 valve closed
10/30/2011	4:03:50 PM	PH3 valve closed
10/30/2011	4:03:50 PM	SiCl4 pre valve closed
10/30/2011	4:03:50 PM	SiCl4 post valve closed
10/30/2011	4:03:50 PM	Main Vac valve closed
10/30/2011	4:03:50 PM	Bubbler valve closed
10/30/2011	4:03:50 PM	Bypass valve opened
10/30/2011	4:03:50 PM	Helium MFC set to  0.000000
10/30/2011	4:03:50 PM	H2 MFC set to  0.000000
10/30/2011	4:03:50 PM	BCl3 MFC set to  0.000000
10/30/2011	4:03:50 PM	PHl3 MFC set to  0.000000
10/30/2011	4:03:50 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:03:50 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:03:50 PM	Tube furnace set to 0
10/30/2011	4:03:58 PM	Helium valve closed
10/30/2011	4:03:58 PM	H2 valve closed
10/30/2011	4:03:58 PM	BCl3 valve closed
10/30/2011	4:03:58 PM	PH3 valve closed
10/30/2011	4:03:58 PM	SiCl4 pre valve closed
10/30/2011	4:03:58 PM	SiCl4 post valve closed
10/30/2011	4:03:58 PM	Bypass valve closed
10/30/2011	4:03:58 PM	Bubbler valve closed
10/30/2011	4:03:58 PM	Main Vac valve opened
10/30/2011	4:03:58 PM	Helium MFC set to  0.000000
10/30/2011	4:03:58 PM	H2 MFC set to  0.000000
10/30/2011	4:03:58 PM	BCl3 MFC set to  0.000000
10/30/2011	4:03:58 PM	PHl3 MFC set to  0.000000
10/30/2011	4:03:58 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:03:58 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:03:58 PM	Tube furnace set to 0
10/30/2011	4:03:59 PM	Run finished at 4:03 PM
10/30/2011	4:03:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	4:06:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	4:06:25 PM	Recipe started at 4:06 PM
10/30/2011	4:06:25 PM	Helium valve closed
10/30/2011	4:06:25 PM	H2 valve closed
10/30/2011	4:06:25 PM	BCl3 valve closed
10/30/2011	4:06:25 PM	PH3 valve closed
10/30/2011	4:06:25 PM	SiCl4 pre valve closed
10/30/2011	4:06:25 PM	SiCl4 post valve closed
10/30/2011	4:06:25 PM	Main Vac valve closed
10/30/2011	4:06:25 PM	Bubbler valve closed
10/30/2011	4:06:25 PM	Bypass valve opened
10/30/2011	4:06:25 PM	Helium MFC set to  0.000000
10/30/2011	4:06:25 PM	H2 MFC set to  0.000000
10/30/2011	4:06:25 PM	BCl3 MFC set to  0.000000
10/30/2011	4:06:25 PM	PHl3 MFC set to  0.000000
10/30/2011	4:06:25 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:06:25 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:06:25 PM	Tube furnace set to 0
10/30/2011	4:06:26 PM	Helium valve closed
10/30/2011	4:06:26 PM	H2 valve closed
10/30/2011	4:06:26 PM	BCl3 valve closed
10/30/2011	4:06:26 PM	PH3 valve closed
10/30/2011	4:06:26 PM	SiCl4 pre valve closed
10/30/2011	4:06:26 PM	SiCl4 post valve closed
10/30/2011	4:06:26 PM	Main Vac valve closed
10/30/2011	4:06:26 PM	Bubbler valve closed
10/30/2011	4:06:26 PM	Bypass valve opened
10/30/2011	4:06:26 PM	Helium MFC set to  0.000000
10/30/2011	4:06:26 PM	H2 MFC set to  0.000000
10/30/2011	4:06:26 PM	BCl3 MFC set to  0.000000
10/30/2011	4:06:26 PM	PHl3 MFC set to  0.000000
10/30/2011	4:06:26 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:06:26 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:06:26 PM	Tube furnace set to 0
10/30/2011	4:06:27 PM	Helium valve closed
10/30/2011	4:06:27 PM	H2 valve closed
10/30/2011	4:06:27 PM	BCl3 valve closed
10/30/2011	4:06:27 PM	PH3 valve closed
10/30/2011	4:06:27 PM	SiCl4 pre valve closed
10/30/2011	4:06:27 PM	SiCl4 post valve closed
10/30/2011	4:06:27 PM	Bypass valve closed
10/30/2011	4:06:27 PM	Bubbler valve closed
10/30/2011	4:06:27 PM	Main Vac valve opened
10/30/2011	4:06:27 PM	Helium MFC set to  0.000000
10/30/2011	4:06:27 PM	H2 MFC set to  0.000000
10/30/2011	4:06:27 PM	BCl3 MFC set to  0.000000
10/30/2011	4:06:27 PM	PHl3 MFC set to  0.000000
10/30/2011	4:06:27 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:06:27 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:06:27 PM	Tube furnace set to 0
10/30/2011	4:06:57 PM	H2 valve closed
10/30/2011	4:06:57 PM	BCl3 valve closed
10/30/2011	4:06:57 PM	PH3 valve closed
10/30/2011	4:06:57 PM	SiCl4 pre valve closed
10/30/2011	4:06:57 PM	SiCl4 post valve closed
10/30/2011	4:06:57 PM	Bypass valve closed
10/30/2011	4:06:57 PM	Bubbler valve closed
10/30/2011	4:06:57 PM	Helium valve opened
10/30/2011	4:06:57 PM	Main Vac valve opened
10/30/2011	4:06:57 PM	Helium MFC set to  20.000000
10/30/2011	4:06:57 PM	H2 MFC set to  0.000000
10/30/2011	4:06:57 PM	BCl3 MFC set to  0.000000
10/30/2011	4:06:57 PM	PHl3 MFC set to  0.000000
10/30/2011	4:06:57 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:06:57 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:06:57 PM	Tube furnace set to 0
10/30/2011	4:07:27 PM	Helium valve closed
10/30/2011	4:07:27 PM	H2 valve closed
10/30/2011	4:07:27 PM	BCl3 valve closed
10/30/2011	4:07:27 PM	PH3 valve closed
10/30/2011	4:07:27 PM	SiCl4 pre valve closed
10/30/2011	4:07:27 PM	SiCl4 post valve closed
10/30/2011	4:07:27 PM	Bypass valve closed
10/30/2011	4:07:27 PM	Bubbler valve closed
10/30/2011	4:07:27 PM	Main Vac valve opened
10/30/2011	4:07:27 PM	Helium MFC set to  0.000000
10/30/2011	4:07:27 PM	H2 MFC set to  0.000000
10/30/2011	4:07:27 PM	BCl3 MFC set to  0.000000
10/30/2011	4:07:27 PM	PHl3 MFC set to  0.000000
10/30/2011	4:07:27 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:07:27 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:07:27 PM	Tube furnace set to 0
10/30/2011	4:07:57 PM	H2 valve closed
10/30/2011	4:07:57 PM	BCl3 valve closed
10/30/2011	4:07:57 PM	PH3 valve closed
10/30/2011	4:07:57 PM	SiCl4 pre valve closed
10/30/2011	4:07:57 PM	SiCl4 post valve closed
10/30/2011	4:07:58 PM	Bypass valve closed
10/30/2011	4:07:58 PM	Bubbler valve closed
10/30/2011	4:07:58 PM	Helium valve opened
10/30/2011	4:07:58 PM	Main Vac valve opened
10/30/2011	4:07:58 PM	Helium MFC set to  20.000000
10/30/2011	4:07:58 PM	H2 MFC set to  0.000000
10/30/2011	4:07:58 PM	BCl3 MFC set to  0.000000
10/30/2011	4:07:58 PM	PHl3 MFC set to  0.000000
10/30/2011	4:07:58 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:07:58 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:07:58 PM	Tube furnace set to 0
10/30/2011	4:08:28 PM	Helium valve closed
10/30/2011	4:08:28 PM	H2 valve closed
10/30/2011	4:08:28 PM	BCl3 valve closed
10/30/2011	4:08:28 PM	PH3 valve closed
10/30/2011	4:08:28 PM	SiCl4 pre valve closed
10/30/2011	4:08:28 PM	SiCl4 post valve closed
10/30/2011	4:08:28 PM	Bypass valve closed
10/30/2011	4:08:28 PM	Bubbler valve closed
10/30/2011	4:08:28 PM	Main Vac valve opened
10/30/2011	4:08:28 PM	Helium MFC set to  0.000000
10/30/2011	4:08:28 PM	H2 MFC set to  0.000000
10/30/2011	4:08:28 PM	BCl3 MFC set to  0.000000
10/30/2011	4:08:28 PM	PHl3 MFC set to  0.000000
10/30/2011	4:08:28 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:08:28 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:08:28 PM	Tube furnace set to 0
10/30/2011	4:08:58 PM	H2 valve closed
10/30/2011	4:08:58 PM	BCl3 valve closed
10/30/2011	4:08:58 PM	PH3 valve closed
10/30/2011	4:08:58 PM	SiCl4 pre valve closed
10/30/2011	4:08:58 PM	SiCl4 post valve closed
10/30/2011	4:08:58 PM	Bypass valve closed
10/30/2011	4:08:58 PM	Bubbler valve closed
10/30/2011	4:08:58 PM	Helium valve opened
10/30/2011	4:08:58 PM	Main Vac valve opened
10/30/2011	4:08:58 PM	Helium MFC set to  20.000000
10/30/2011	4:08:58 PM	H2 MFC set to  0.000000
10/30/2011	4:08:58 PM	BCl3 MFC set to  0.000000
10/30/2011	4:08:58 PM	PHl3 MFC set to  0.000000
10/30/2011	4:08:58 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:08:58 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:08:58 PM	Tube furnace set to 0
10/30/2011	4:09:28 PM	Helium valve closed
10/30/2011	4:09:28 PM	H2 valve closed
10/30/2011	4:09:28 PM	BCl3 valve closed
10/30/2011	4:09:28 PM	PH3 valve closed
10/30/2011	4:09:28 PM	SiCl4 pre valve closed
10/30/2011	4:09:28 PM	SiCl4 post valve closed
10/30/2011	4:09:28 PM	Bypass valve closed
10/30/2011	4:09:28 PM	Bubbler valve closed
10/30/2011	4:09:28 PM	Main Vac valve opened
10/30/2011	4:09:28 PM	Helium MFC set to  0.000000
10/30/2011	4:09:28 PM	H2 MFC set to  0.000000
10/30/2011	4:09:28 PM	BCl3 MFC set to  0.000000
10/30/2011	4:09:28 PM	PHl3 MFC set to  0.000000
10/30/2011	4:09:28 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:09:28 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:09:28 PM	Tube furnace set to 0
10/30/2011	4:09:58 PM	H2 valve closed
10/30/2011	4:09:58 PM	BCl3 valve closed
10/30/2011	4:09:58 PM	PH3 valve closed
10/30/2011	4:09:58 PM	SiCl4 pre valve closed
10/30/2011	4:09:58 PM	SiCl4 post valve closed
10/30/2011	4:09:58 PM	Bypass valve closed
10/30/2011	4:09:58 PM	Bubbler valve closed
10/30/2011	4:09:58 PM	Helium valve opened
10/30/2011	4:09:58 PM	Main Vac valve opened
10/30/2011	4:09:58 PM	Helium MFC set to  20.000000
10/30/2011	4:09:58 PM	H2 MFC set to  0.000000
10/30/2011	4:09:58 PM	BCl3 MFC set to  0.000000
10/30/2011	4:09:58 PM	PHl3 MFC set to  0.000000
10/30/2011	4:09:58 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:09:58 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:09:58 PM	Tube furnace set to 0
10/30/2011	4:10:28 PM	Helium valve closed
10/30/2011	4:10:28 PM	H2 valve closed
10/30/2011	4:10:28 PM	BCl3 valve closed
10/30/2011	4:10:28 PM	PH3 valve closed
10/30/2011	4:10:28 PM	SiCl4 pre valve closed
10/30/2011	4:10:28 PM	SiCl4 post valve closed
10/30/2011	4:10:28 PM	Bypass valve closed
10/30/2011	4:10:28 PM	Bubbler valve closed
10/30/2011	4:10:28 PM	Main Vac valve opened
10/30/2011	4:10:28 PM	Helium MFC set to  0.000000
10/30/2011	4:10:28 PM	H2 MFC set to  0.000000
10/30/2011	4:10:28 PM	BCl3 MFC set to  0.000000
10/30/2011	4:10:28 PM	PHl3 MFC set to  0.000000
10/30/2011	4:10:28 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:10:28 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:10:29 PM	Tube furnace set to 0
10/30/2011	4:10:59 PM	H2 valve closed
10/30/2011	4:10:59 PM	BCl3 valve closed
10/30/2011	4:10:59 PM	PH3 valve closed
10/30/2011	4:10:59 PM	SiCl4 pre valve closed
10/30/2011	4:10:59 PM	SiCl4 post valve closed
10/30/2011	4:10:59 PM	Bypass valve closed
10/30/2011	4:10:59 PM	Bubbler valve closed
10/30/2011	4:10:59 PM	Helium valve opened
10/30/2011	4:10:59 PM	Main Vac valve opened
10/30/2011	4:10:59 PM	Helium MFC set to  20.000000
10/30/2011	4:10:59 PM	H2 MFC set to  0.000000
10/30/2011	4:10:59 PM	BCl3 MFC set to  0.000000
10/30/2011	4:10:59 PM	PHl3 MFC set to  0.000000
10/30/2011	4:10:59 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:10:59 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:10:59 PM	Tube furnace set to 0
10/30/2011	4:11:29 PM	Helium valve closed
10/30/2011	4:11:29 PM	H2 valve closed
10/30/2011	4:11:29 PM	BCl3 valve closed
10/30/2011	4:11:29 PM	PH3 valve closed
10/30/2011	4:11:29 PM	SiCl4 pre valve closed
10/30/2011	4:11:29 PM	SiCl4 post valve closed
10/30/2011	4:11:29 PM	Bypass valve closed
10/30/2011	4:11:29 PM	Bubbler valve closed
10/30/2011	4:11:29 PM	Main Vac valve opened
10/30/2011	4:11:29 PM	Helium MFC set to  0.000000
10/30/2011	4:11:29 PM	H2 MFC set to  0.000000
10/30/2011	4:11:29 PM	BCl3 MFC set to  0.000000
10/30/2011	4:11:29 PM	PHl3 MFC set to  0.000000
10/30/2011	4:11:29 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:11:29 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:11:29 PM	Tube furnace set to 0
10/30/2011	4:11:59 PM	H2 valve closed
10/30/2011	4:11:59 PM	BCl3 valve closed
10/30/2011	4:11:59 PM	PH3 valve closed
10/30/2011	4:11:59 PM	SiCl4 pre valve closed
10/30/2011	4:11:59 PM	SiCl4 post valve closed
10/30/2011	4:11:59 PM	Bypass valve closed
10/30/2011	4:11:59 PM	Bubbler valve closed
10/30/2011	4:11:59 PM	Helium valve opened
10/30/2011	4:11:59 PM	Main Vac valve opened
10/30/2011	4:11:59 PM	Helium MFC set to  20.000000
10/30/2011	4:11:59 PM	H2 MFC set to  0.000000
10/30/2011	4:11:59 PM	BCl3 MFC set to  0.000000
10/30/2011	4:11:59 PM	PHl3 MFC set to  0.000000
10/30/2011	4:11:59 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:11:59 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:11:59 PM	Tube furnace set to 0
10/30/2011	4:12:29 PM	Helium valve closed
10/30/2011	4:12:29 PM	H2 valve closed
10/30/2011	4:12:29 PM	BCl3 valve closed
10/30/2011	4:12:29 PM	PH3 valve closed
10/30/2011	4:12:29 PM	SiCl4 pre valve closed
10/30/2011	4:12:29 PM	SiCl4 post valve closed
10/30/2011	4:12:29 PM	Bypass valve closed
10/30/2011	4:12:29 PM	Bubbler valve closed
10/30/2011	4:12:29 PM	Main Vac valve opened
10/30/2011	4:12:29 PM	Helium MFC set to  0.000000
10/30/2011	4:12:29 PM	H2 MFC set to  0.000000
10/30/2011	4:12:29 PM	BCl3 MFC set to  0.000000
10/30/2011	4:12:29 PM	PHl3 MFC set to  0.000000
10/30/2011	4:12:29 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:12:29 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:12:29 PM	Tube furnace set to 0
10/30/2011	4:12:59 PM	H2 valve closed
10/30/2011	4:12:59 PM	BCl3 valve closed
10/30/2011	4:12:59 PM	PH3 valve closed
10/30/2011	4:12:59 PM	SiCl4 pre valve closed
10/30/2011	4:12:59 PM	SiCl4 post valve closed
10/30/2011	4:12:59 PM	Bypass valve closed
10/30/2011	4:12:59 PM	Bubbler valve closed
10/30/2011	4:12:59 PM	Helium valve opened
10/30/2011	4:12:59 PM	Main Vac valve opened
10/30/2011	4:12:59 PM	Helium MFC set to  20.000000
10/30/2011	4:12:59 PM	H2 MFC set to  0.000000
10/30/2011	4:12:59 PM	BCl3 MFC set to  0.000000
10/30/2011	4:12:59 PM	PHl3 MFC set to  0.000000
10/30/2011	4:12:59 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:12:59 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:13:00 PM	Tube furnace set to 0
10/30/2011	4:13:30 PM	Helium valve closed
10/30/2011	4:13:30 PM	H2 valve closed
10/30/2011	4:13:30 PM	BCl3 valve closed
10/30/2011	4:13:30 PM	PH3 valve closed
10/30/2011	4:13:30 PM	SiCl4 pre valve closed
10/30/2011	4:13:30 PM	SiCl4 post valve closed
10/30/2011	4:13:30 PM	Bypass valve closed
10/30/2011	4:13:30 PM	Bubbler valve closed
10/30/2011	4:13:30 PM	Main Vac valve opened
10/30/2011	4:13:30 PM	Helium MFC set to  0.000000
10/30/2011	4:13:30 PM	H2 MFC set to  0.000000
10/30/2011	4:13:30 PM	BCl3 MFC set to  0.000000
10/30/2011	4:13:30 PM	PHl3 MFC set to  0.000000
10/30/2011	4:13:30 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:13:30 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:13:30 PM	Tube furnace set to 0
10/30/2011	4:14:00 PM	H2 valve closed
10/30/2011	4:14:00 PM	BCl3 valve closed
10/30/2011	4:14:00 PM	PH3 valve closed
10/30/2011	4:14:00 PM	SiCl4 pre valve closed
10/30/2011	4:14:00 PM	SiCl4 post valve closed
10/30/2011	4:14:00 PM	Bypass valve closed
10/30/2011	4:14:00 PM	Bubbler valve closed
10/30/2011	4:14:00 PM	Helium valve opened
10/30/2011	4:14:00 PM	Main Vac valve opened
10/30/2011	4:14:00 PM	Helium MFC set to  20.000000
10/30/2011	4:14:00 PM	H2 MFC set to  0.000000
10/30/2011	4:14:00 PM	BCl3 MFC set to  0.000000
10/30/2011	4:14:00 PM	PHl3 MFC set to  0.000000
10/30/2011	4:14:00 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:14:00 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:14:00 PM	Tube furnace set to 0
10/30/2011	4:14:30 PM	Helium valve closed
10/30/2011	4:14:30 PM	H2 valve closed
10/30/2011	4:14:30 PM	BCl3 valve closed
10/30/2011	4:14:30 PM	PH3 valve closed
10/30/2011	4:14:30 PM	SiCl4 pre valve closed
10/30/2011	4:14:30 PM	SiCl4 post valve closed
10/30/2011	4:14:30 PM	Bypass valve closed
10/30/2011	4:14:30 PM	Bubbler valve closed
10/30/2011	4:14:30 PM	Main Vac valve opened
10/30/2011	4:14:30 PM	Helium MFC set to  0.000000
10/30/2011	4:14:30 PM	H2 MFC set to  0.000000
10/30/2011	4:14:30 PM	BCl3 MFC set to  0.000000
10/30/2011	4:14:30 PM	PHl3 MFC set to  0.000000
10/30/2011	4:14:30 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:14:30 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:14:30 PM	Tube furnace set to 0
10/30/2011	4:15:00 PM	H2 valve closed
10/30/2011	4:15:00 PM	BCl3 valve closed
10/30/2011	4:15:00 PM	PH3 valve closed
10/30/2011	4:15:00 PM	SiCl4 pre valve closed
10/30/2011	4:15:00 PM	SiCl4 post valve closed
10/30/2011	4:15:00 PM	Bypass valve closed
10/30/2011	4:15:00 PM	Bubbler valve closed
10/30/2011	4:15:00 PM	Helium valve opened
10/30/2011	4:15:00 PM	Main Vac valve opened
10/30/2011	4:15:00 PM	Helium MFC set to  20.000000
10/30/2011	4:15:00 PM	H2 MFC set to  0.000000
10/30/2011	4:15:00 PM	BCl3 MFC set to  0.000000
10/30/2011	4:15:00 PM	PHl3 MFC set to  0.000000
10/30/2011	4:15:00 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:15:00 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:15:00 PM	Tube furnace set to 0
10/30/2011	4:15:30 PM	Helium valve closed
10/30/2011	4:15:30 PM	H2 valve closed
10/30/2011	4:15:30 PM	BCl3 valve closed
10/30/2011	4:15:30 PM	PH3 valve closed
10/30/2011	4:15:30 PM	SiCl4 pre valve closed
10/30/2011	4:15:30 PM	SiCl4 post valve closed
10/30/2011	4:15:30 PM	Bypass valve closed
10/30/2011	4:15:30 PM	Bubbler valve closed
10/30/2011	4:15:30 PM	Main Vac valve opened
10/30/2011	4:15:30 PM	Helium MFC set to  0.000000
10/30/2011	4:15:30 PM	H2 MFC set to  0.000000
10/30/2011	4:15:30 PM	BCl3 MFC set to  0.000000
10/30/2011	4:15:30 PM	PHl3 MFC set to  0.000000
10/30/2011	4:15:30 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:15:30 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:15:31 PM	Tube furnace set to 0
10/30/2011	4:16:01 PM	H2 valve closed
10/30/2011	4:16:01 PM	BCl3 valve closed
10/30/2011	4:16:01 PM	PH3 valve closed
10/30/2011	4:16:01 PM	SiCl4 pre valve closed
10/30/2011	4:16:01 PM	SiCl4 post valve closed
10/30/2011	4:16:01 PM	Bypass valve closed
10/30/2011	4:16:01 PM	Bubbler valve closed
10/30/2011	4:16:01 PM	Helium valve opened
10/30/2011	4:16:01 PM	Main Vac valve opened
10/30/2011	4:16:01 PM	Helium MFC set to  20.000000
10/30/2011	4:16:01 PM	H2 MFC set to  0.000000
10/30/2011	4:16:01 PM	BCl3 MFC set to  0.000000
10/30/2011	4:16:01 PM	PHl3 MFC set to  0.000000
10/30/2011	4:16:01 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:16:01 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:16:01 PM	Tube furnace set to 0
10/30/2011	4:16:31 PM	Helium valve closed
10/30/2011	4:16:31 PM	H2 valve closed
10/30/2011	4:16:31 PM	BCl3 valve closed
10/30/2011	4:16:31 PM	PH3 valve closed
10/30/2011	4:16:31 PM	SiCl4 pre valve closed
10/30/2011	4:16:31 PM	SiCl4 post valve closed
10/30/2011	4:16:31 PM	Bypass valve closed
10/30/2011	4:16:31 PM	Bubbler valve closed
10/30/2011	4:16:31 PM	Main Vac valve opened
10/30/2011	4:16:31 PM	Helium MFC set to  0.000000
10/30/2011	4:16:31 PM	H2 MFC set to  0.000000
10/30/2011	4:16:31 PM	BCl3 MFC set to  0.000000
10/30/2011	4:16:31 PM	PHl3 MFC set to  0.000000
10/30/2011	4:16:31 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:16:31 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:16:31 PM	Tube furnace set to 0
10/30/2011	4:16:32 PM	Run finished at 4:16 PM
10/30/2011	4:16:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/30/2011	4:18:41 PM	Main Vac valve closed
10/30/2011	4:18:56 PM	Main Vac valve opened
10/30/2011	4:20:35 PM	Recipe started at 4:20 PM
10/30/2011	4:20:35 PM	Helium valve closed
10/30/2011	4:20:35 PM	H2 valve closed
10/30/2011	4:20:35 PM	BCl3 valve closed
10/30/2011	4:20:35 PM	PH3 valve closed
10/30/2011	4:20:35 PM	SiCl4 pre valve closed
10/30/2011	4:20:35 PM	SiCl4 post valve closed
10/30/2011	4:20:35 PM	Main Vac valve closed
10/30/2011	4:20:35 PM	Bypass valve closed
10/30/2011	4:20:35 PM	Bubbler valve closed
10/30/2011	4:20:35 PM	Helium MFC set to  0.000000
10/30/2011	4:20:35 PM	H2 MFC set to  0.000000
10/30/2011	4:20:35 PM	BCl3 MFC set to  0.000000
10/30/2011	4:20:35 PM	PHl3 MFC set to  0.000000
10/30/2011	4:20:35 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:20:35 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:20:35 PM	Tube furnace set to 0
10/30/2011	4:20:38 PM	Helium valve closed
10/30/2011	4:20:38 PM	BCl3 valve closed
10/30/2011	4:20:38 PM	PH3 valve closed
10/30/2011	4:20:38 PM	SiCl4 pre valve closed
10/30/2011	4:20:38 PM	SiCl4 post valve closed
10/30/2011	4:20:38 PM	Main Vac valve closed
10/30/2011	4:20:38 PM	Bypass valve closed
10/30/2011	4:20:38 PM	Bubbler valve closed
10/30/2011	4:20:38 PM	H2 valve opened
10/30/2011	4:20:38 PM	Helium MFC set to  0.000000
10/30/2011	4:20:38 PM	H2 MFC set to  500.000000
10/30/2011	4:20:38 PM	BCl3 MFC set to  0.000000
10/30/2011	4:20:38 PM	PHl3 MFC set to  0.000000
10/30/2011	4:20:38 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:20:38 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:20:38 PM	Tube furnace set to 0
10/30/2011	4:21:43 PM	Helium valve closed
10/30/2011	4:21:43 PM	BCl3 valve closed
10/30/2011	4:21:43 PM	PH3 valve closed
10/30/2011	4:21:43 PM	SiCl4 pre valve closed
10/30/2011	4:21:43 PM	SiCl4 post valve closed
10/30/2011	4:21:43 PM	Main Vac valve closed
10/30/2011	4:21:43 PM	Bypass valve closed
10/30/2011	4:21:43 PM	H2 valve opened
10/30/2011	4:21:43 PM	Bubbler valve opened
10/30/2011	4:21:43 PM	Helium MFC set to  0.000000
10/30/2011	4:21:43 PM	H2 MFC set to  500.000000
10/30/2011	4:21:43 PM	BCl3 MFC set to  0.000000
10/30/2011	4:21:43 PM	PHl3 MFC set to  0.000000
10/30/2011	4:21:43 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:21:43 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:21:43 PM	Tube furnace set to 0
10/30/2011	4:21:44 PM	Helium valve closed
10/30/2011	4:21:44 PM	BCl3 valve closed
10/30/2011	4:21:44 PM	PH3 valve closed
10/30/2011	4:21:44 PM	SiCl4 pre valve closed
10/30/2011	4:21:44 PM	SiCl4 post valve closed
10/30/2011	4:21:44 PM	Main Vac valve closed
10/30/2011	4:21:44 PM	Bypass valve closed
10/30/2011	4:21:44 PM	H2 valve opened
10/30/2011	4:21:44 PM	Bubbler valve opened
10/30/2011	4:21:44 PM	Helium MFC set to  0.000000
10/30/2011	4:21:44 PM	H2 MFC set to  500.000000
10/30/2011	4:21:44 PM	BCl3 MFC set to  0.000000
10/30/2011	4:21:44 PM	PHl3 MFC set to  0.000000
10/30/2011	4:21:44 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:21:44 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:21:44 PM	Tube furnace set to 1030
10/30/2011	4:41:44 PM	Helium valve closed
10/30/2011	4:41:44 PM	PH3 valve closed
10/30/2011	4:41:44 PM	Main Vac valve closed
10/30/2011	4:41:44 PM	Bypass valve closed
10/30/2011	4:41:44 PM	H2 valve opened
10/30/2011	4:41:44 PM	BCl3 valve opened
10/30/2011	4:41:44 PM	SiCl4 pre valve opened
10/30/2011	4:41:44 PM	SiCl4 post valve opened
10/30/2011	4:41:44 PM	Bubbler valve opened
10/30/2011	4:41:44 PM	Helium MFC set to  0.000000
10/30/2011	4:41:44 PM	H2 MFC set to  500.000000
10/30/2011	4:41:44 PM	BCl3 MFC set to  2.500000
10/30/2011	4:41:44 PM	PHl3 MFC set to  0.000000
10/30/2011	4:41:44 PM	SiCl4 MFC set to  50.000000
10/30/2011	4:41:44 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:41:45 PM	Tube furnace set to 1030
10/30/2011	4:57:44 PM	Helium valve closed
10/30/2011	4:57:45 PM	BCl3 valve closed
10/30/2011	4:57:45 PM	PH3 valve closed
10/30/2011	4:57:45 PM	SiCl4 pre valve closed
10/30/2011	4:57:45 PM	SiCl4 post valve closed
10/30/2011	4:57:45 PM	Main Vac valve closed
10/30/2011	4:57:45 PM	Bypass valve closed
10/30/2011	4:57:45 PM	H2 valve opened
10/30/2011	4:57:45 PM	Bubbler valve opened
10/30/2011	4:57:45 PM	Helium MFC set to  0.000000
10/30/2011	4:57:45 PM	H2 MFC set to  500.000000
10/30/2011	4:57:45 PM	BCl3 MFC set to  0.000000
10/30/2011	4:57:45 PM	PHl3 MFC set to  0.000000
10/30/2011	4:57:45 PM	SiCl4 MFC set to  0.000000
10/30/2011	4:57:45 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	4:57:45 PM	Tube furnace set to 750
10/30/2011	5:02:45 PM	H2 valve closed
10/30/2011	5:02:45 PM	BCl3 valve closed
10/30/2011	5:02:45 PM	PH3 valve closed
10/30/2011	5:02:45 PM	SiCl4 pre valve closed
10/30/2011	5:02:45 PM	SiCl4 post valve closed
10/30/2011	5:02:45 PM	Main Vac valve closed
10/30/2011	5:02:45 PM	Bypass valve closed
10/30/2011	5:02:45 PM	Helium valve opened
10/30/2011	5:02:45 PM	Bubbler valve opened
10/30/2011	5:02:45 PM	Helium MFC set to  500.000000
10/30/2011	5:02:45 PM	H2 MFC set to  0.000000
10/30/2011	5:02:45 PM	BCl3 MFC set to  0.000000
10/30/2011	5:02:45 PM	PHl3 MFC set to  0.000000
10/30/2011	5:02:45 PM	SiCl4 MFC set to  0.000000
10/30/2011	5:02:45 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	5:02:45 PM	Tube furnace set to 0
10/30/2011	5:22:36 PM	Helium valve closed
10/30/2011	5:22:36 PM	H2 valve closed
10/30/2011	5:22:36 PM	BCl3 valve closed
10/30/2011	5:22:36 PM	PH3 valve closed
10/30/2011	5:22:36 PM	SiCl4 pre valve closed
10/30/2011	5:22:36 PM	SiCl4 post valve closed
10/30/2011	5:22:36 PM	Main Vac valve closed
10/30/2011	5:22:36 PM	Bypass valve closed
10/30/2011	5:22:36 PM	Bubbler valve closed
10/30/2011	5:22:36 PM	Helium MFC set to  0.000000
10/30/2011	5:22:36 PM	H2 MFC set to  0.000000
10/30/2011	5:22:36 PM	BCl3 MFC set to  0.000000
10/30/2011	5:22:36 PM	PHl3 MFC set to  0.000000
10/30/2011	5:22:36 PM	SiCl4 MFC set to  0.000000
10/30/2011	5:22:36 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	5:22:36 PM	Tube furnace set to 0
10/30/2011	5:22:37 PM	Run finished at 5:22 PM
10/30/2011	5:24:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2011	5:24:50 PM	Recipe started at 5:24 PM
10/30/2011	5:24:50 PM	Helium valve closed
10/30/2011	5:24:50 PM	H2 valve closed
10/30/2011	5:24:50 PM	BCl3 valve closed
10/30/2011	5:24:50 PM	PH3 valve closed
10/30/2011	5:24:50 PM	SiCl4 pre valve closed
10/30/2011	5:24:50 PM	SiCl4 post valve closed
10/30/2011	5:24:50 PM	Main Vac valve closed
10/30/2011	5:24:50 PM	Bubbler valve closed
10/30/2011	5:24:50 PM	Bypass valve opened
10/30/2011	5:24:50 PM	Helium MFC set to  0.000000
10/30/2011	5:24:50 PM	H2 MFC set to  0.000000
10/30/2011	5:24:50 PM	BCl3 MFC set to  0.000000
10/30/2011	5:24:50 PM	PHl3 MFC set to  0.000000
10/30/2011	5:24:50 PM	SiCl4 MFC set to  0.000000
10/30/2011	5:24:50 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	5:24:50 PM	Tube furnace set to 0
10/30/2011	5:25:51 PM	Helium valve closed
10/30/2011	5:25:51 PM	H2 valve closed
10/30/2011	5:25:51 PM	BCl3 valve closed
10/30/2011	5:25:51 PM	PH3 valve closed
10/30/2011	5:25:51 PM	SiCl4 pre valve closed
10/30/2011	5:25:51 PM	SiCl4 post valve closed
10/30/2011	5:25:51 PM	Main Vac valve closed
10/30/2011	5:25:51 PM	Bubbler valve closed
10/30/2011	5:25:51 PM	Bypass valve opened
10/30/2011	5:25:51 PM	Helium MFC set to  0.000000
10/30/2011	5:25:51 PM	H2 MFC set to  0.000000
10/30/2011	5:25:51 PM	BCl3 MFC set to  0.000000
10/30/2011	5:25:51 PM	PHl3 MFC set to  0.000000
10/30/2011	5:25:51 PM	SiCl4 MFC set to  0.000000
10/30/2011	5:25:51 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	5:25:51 PM	Tube furnace set to 0
10/30/2011	5:26:51 PM	Helium valve closed
10/30/2011	5:26:51 PM	H2 valve closed
10/30/2011	5:26:51 PM	BCl3 valve closed
10/30/2011	5:26:51 PM	PH3 valve closed
10/30/2011	5:26:52 PM	SiCl4 pre valve closed
10/30/2011	5:26:52 PM	SiCl4 post valve closed
10/30/2011	5:26:52 PM	Bypass valve closed
10/30/2011	5:26:52 PM	Bubbler valve closed
10/30/2011	5:26:52 PM	Main Vac valve opened
10/30/2011	5:26:52 PM	Helium MFC set to  0.000000
10/30/2011	5:26:52 PM	H2 MFC set to  0.000000
10/30/2011	5:26:52 PM	BCl3 MFC set to  0.000000
10/30/2011	5:26:52 PM	PHl3 MFC set to  0.000000
10/30/2011	5:26:52 PM	SiCl4 MFC set to  0.000000
10/30/2011	5:26:52 PM	Bypass solenoid MFC set to  0.000000
10/30/2011	5:26:52 PM	Tube furnace set to 0
10/30/2011	5:26:53 PM	Run finished at 5:26 PM
10/30/2011	5:26:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
